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WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 MGZ 1000 (1001 to 1400) 204 (215) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235

d 330 e 480 f 640 g 265.5 h 315.5 i 480 j Model HRG001-A HRG001-W HRG002-A HRG002-W HRG005-A HRG005-W HRG010-A HRG010-W HRG015-A HRG015-W 61 61 94.5 334 105 330 480 640 265.5 315.5 480 61 94.5 105 330 480 640 265.5 315.5 480 61 94.5 334 105 330 480 640 265.5 315.5 480 153 298 398.5 451.5 135 625 741 153 298 398.5 451.5 135 325 625 741 242 342 402 452 115 230 400 560 242 342 402 452 115

0.15 2.0 15 or less 20 or less Double VQ2201 26 or less Rubber seal 0.80 0.30 3.2 0.55 0.28 2.2 20 or less 26 or less VQ2300 38 or less Metal seal 0.46 0.18 2.0 0.46 0.15 2.0 29 or less 58 or less Closed center VQ2301 44 or less Rubber seal 0.60 0.31 2.2 0.49 0.28 2.0 34 or less 64 or less VQ2000 VQ2400 38 or less Metal seal 0.60 0.15 2.6 0.46 0.15 2.0 29 or less 58 or less Exhaust center 105

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range For vacuum pressure ZSE30A 0 101 kPa 105 kPa 10 kPa For compound pressure 100 kPa 100 kPa ZSE30AF 105 kPa 105 kPa For positive pressure 100 kPa 1 MPa ISE30A 105 kPa (0.105 MPa) 1.05 MPa Rated pressure range of switch Set pressure range of switch Back page 2 These safety instructions are intended to prevent hazardous situations and/or equipment

[Communication connector D-sub] BUS OUT BUS 1 P 1 P 82.3 BUS IN E 3/5 E 3/5 2 2 B 2 B 2 PWR PWR 4 4 A 4 A 4 Note) These figures show the SS5Y3-10SQA-05D-C6. n: stations 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 103.7 L1 114.2 124.7 135.2 145.7 156.2 166.7 177.2 187.7 198.2 208.7 219.2 229.7 240.2 250.7 261.2 271.7 282.2 292.7 303.2 313.7 324.2 334.7 L2 63 73.5 84 94.5 105

Center A Right Model Arm opening angl CKZT25-105-DCL781EL 105 B CKZT25-90-DCN7018N CKZT25-45-DCN7017N 90 45 30 CKZT25-30-DCN577NN Left C

Power Clamp Cylinder T Z K C -X2797 -X2798 Compact Type 25, 32 How to Order CKZT X2797 S 25 105 Base type X2798 CKZT S 25 105 L With manually operated handle Bore size Manually operated handle mounting position L (Left side mounting) R (Right side mounting) 25 25 mm 32 32 mm Arm opening angle 90 90 105 105 Please contact SMC for other opening angles.

Suction Filter with Case FH99 Series How to Order 04 0 0 0 M 074 FH99 0 Companion flange Suction filter with cace Nil None With companion flange F Construction/Connection 0 1 Common with L-type threaded and flange L-type flange Nominal filtration 074 105 149 74 m 105 m 149 m Port size (Outlet side) 1/2B 04 06 08 10 12 16 20 24 28 32 3/4B M Micromesh Element Differential pressure indication

105 201 to 300 126 130 130 301 to 400 151 155 155 401 to 500 176 180 180 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256 260 262 294 Bore size 20 25 32 40 23.5 23.5 23.5 27 10.5 10.5 10.5 10.5 109.5 134.5 159.5 184.5 DBoss-cut Style With Air Cushion Built-in One-touch Fittings (mm) (mm) (mm) ZZ Q 21.5 24.5 27 32.5

Selection example) Based on the graph shown on the right side, Required force: 105 [N] Therefore, the LES25K is temporarily selected. This set value of pushing force is 40 [%].

with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4

When ventilative or leaky work must be adsorbed, please note that vacuum pressure will not be high. 0 0 0 0 25 20 15 5 10 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Flow rate l/min (ANR) Supply pressure (MPa) ZM10M Exhaust Characteristics Flow Characteristics 90 90 135 80 80 120 Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 70 105

3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105

) VV VV 2 x Rc 1/4 2 x Rc 1/4 (Hexagon socket head taper plug) (Hexagon socket head taper plug) MY1MG MY1MG (mm) NE NW PA A B C G GA GB H K J LD L LK LW M MM N NC Model LH LL NF NH 200 17 10.5 27 25 37.5 107 28 M14 x 2 11 200 2 128 15 M8 x 1.25 47 43.5 MY1M50 29 100 84.5 118 120 81 83.5 230 19 12.5 29.5 27.5 39.5 130 32 M16 x 2 13.5 230 5.5 152 16 M10 x 1.5 50 56 MY1M63 32.5 104 142 140 105

120 160 170 180 172.5 (180) 51.5 54.5 59 97 89.5 89.5 185 (192.5) 106.5 99 98.5 99 198.5 (205.5) 112.5 105 104.5 105 ( ) denotes the value for N.O. 12 Series VXD21/22/23 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

The minimum bending radius : Min. 45mm. 5 107 1 108 a 1 107 a : Long flex life encoder cable Long flex life motor power cable Long flex life motor brake cable Robot encoder cable Robot motor power cable Robot motor lock cable 5 106 1 106 b : Standard encoder cable Standard motor power cable Standard motor brake cable 5 105 lock cable Flexing life [times] 1 105 5 104 1 104 b 5 103 1 103 4

CHARACTERISTICS 101 to 107 10.1 Overload protection characteristics . 102 10.2 Power supply equipment capacity and generated loss . 103 10.3 Dynamic brake characteristics . 105 10.3.1 Dynamic brake operation . 105 10.3.2 The dynamic brake at the load inertia moment . 106 10.4 Cable flexing life . 107 10.5 Inrush currents at power-on of main circuit and control circuit . 107 11.

CHARACTERISTICS 101 to 10-7 10.1 Overload protection characteristics . 102 10.2 Power supply capacity and generated loss . 103 10.3 Dynamic brake characteristics . 105 10.3.1 Dynamic brake operation . 105 10.3.2 Permissible load to motor inertia when the dynamic brake is used . 106 10.4 Cable bending life . 107 3 10.5 Inrush currents at power-on of main circuit and control circuit . 107 11

(The equation will be changed to P_1H_3-60-45-105, so the vacuum pressure does not reach the point where the energy-saving function is triggered.) * The minimum value of P_1H_3 is -105.