Modular Design with Uniform Body Style

0 500 1000 1500 2000 Flow rate [L/min (ANR)] 0 1000 2000 3000 4000 Flow rate [L/min (ANR)] AW40(K)-D Rc1/2 AW40(K)-06-D Rc3/4 0.8 0.8 0.7 0.7 Outlet pressure [MPa] Outlet pressure [MPa] 0.6 0.6 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 1000 2000 3000 4000 5000 6000 7000 Flow rate [L/min (ANR)] 0 1000 2000 3000 4000 5000 6000 7000 Flow rate [L/min (ANR)] AW60(K)-D Rc1 0.8 0.7 Outlet pressure

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS32 LEKFS40 1000 1000 1000 800 800 800 L1 L1 [mm] L1 [mm] L1 [mm] 600 600 600 X 400 400 400 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 0 10 20 30 40 50 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 Horizontal/Bottom 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 0 10 20

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Short Stroke Electric Actuator Series LX

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

LEC-OM02904

(9001100) [mm] D H T E ()L d W D T Max.

Environment

position 2.6 LC3F2 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel Indicator light Slotted set screw (flat point) Indicator light Slotted set screw M2.5 x 4 L 8 2 8 3.2 4.6 2 4.6 2.6 SMC SMC 4 2.8 2.8 2.7 22 22 2.6 2.6 2.6 9.3 9.3 4 4 6 Most sensitive position 6 Most sensitive position 507 A

CS1

D-A5/A6, D-A59W Tie rod mounting D-G3/K3 Band mounting Solid state swich D-F5/J5, D-F5NT, D-F5W/J59W, D-F5BA, D-F5F Tie rod mounting 1.10-1 Air Cylinder/Standard Series CS1 Lube, Non-lube: 125, 140, 160, 180, 200, 250, 300 Air-hydro: 125, 140, 160 How to Order CS1 L 300 160 JR Rod boot/Cushion Rod boot Mounting J K N R H Nylon tarpaulin Heat resistant tarpaulin No cushion With cushion on

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm

Thermo-chiller/Rack Mount Type

V: Power supply voltage Power consumption P: 1000 [W] Q = P = 1000 [W] P Cooling capacity = Considering a safety factor of 20%, Power consumption 1000 [W] x 1.2 = 1200 [W] e Derive the heat generation amount from the output. w Derive the heat generation amount from the power supply output. Output (shaft power, etc.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0

JXCx-OMT0061CN

1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.

LEF-OM002xx

Bolts Size Belt Belt tension Part number (N) LEF16 LE-D-6-1 9.8 pull LEF25 LE-D-6-2 19.6 LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 Bolts Size Tightening torque 6.Motor cover is installed. (Only "With motor cover") (Nm) M2.5 0.3610% M3 0.6310% M4 1.510% M5 310% The fingernail of "Grommet" is inserted in the hole of "Pulley box". Grommet 43 - 7.

Modular Type Lubricators Series AL

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

1000 Pressure [kPa] 1000 Pressure [kPa] Pressure [MPa] 600 580 900 10 1 .05 0.105 0 0 1 .0 100 0 105 100 100 105 105 Functions Sub screen setting function The display of the sub screen can be selected.

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

A B C D Switch Internal Circuit Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Terminal no. 2 1 2 1 Signal name Yellow White Orange Blue 1 2 3 4 1 2 3 4 4 3 4 3 Plug connector pin arrangement D-coded Plug connector pin arrangement D-coded Metal parts Metal parts Shield Connections (Straight cable) EX9-AC 005 EN-PAPA (With angle connector on both sides (Plug/Plug)) 36.3 L Cable length (L) 005 500 mm 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm 30.8 6.5 Metal

Thermo-con/Rack Mount Type

[W] Ambient temperature 15C 2000 2000 1500 1500 Ambient temperature 25C Ambient temperature 25C 1000 1000 Ambient temperature 35C 500 500 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Heating Capacity HECR002-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 1000 900 800 700 600 500 400 300 200 100

JXCx-OMT0005CN

1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) 2DRIVEON No.1 (2)(5)(10)(13) DRIVE No.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000