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Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

(Light ON) One auto switch One position, any of q, w Detection combinations and e can be detected. Two auto switches Two positions of A Pattern B q, w and e can C be detected. Step 1) Fully close the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers.

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

Water 15% Ethylene Glycol Aqueous Solution Physical property value Physical property value Temperature Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Density r [kg/dm3] Specific heat C [J/(kgK)] Conventional units Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio c [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02 3.91

IDX-OM-W026-A / Series IDF22E-20(-A,C,K,L,M,R,T) IDF22E-30(-A,C,K,L,M,R,T) IDF37E-20(-A,C,K,L,M,R,T) IDF37E-30(-A,C,K,L,M,R,T) IDF55E-30(-A,C,L,M,R,T) IDF75E-30(-A,C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC ISO4414 *1) JIS B8370 *2 ) *1) ISO4414Pneumatic fluid power General rules and safety requirements

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating

4 C-9 MYMK-40-Stroke MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYMK-16-Stroke 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 C-6 MYMK-25-Stroke C-7 MYMK-32-Stroke Polyurethane Note) Two types of dust seal bands are available.

MY1W63 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4

9 Mounting screw 12-3-11 12 Series MHF2 Dimensions MHF2-8D 2.5H9 +0.025 0 depth 2.5 16 2.5H9 +0.025 0 depth 2.5 2-M3 x 0.5 thread depth 7 Mounting thread 3 28.3 3.4 36 32 2-M3 x 0.5 thread depth 4 15.8 22 Mounting thread 5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use

13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.

D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

IDX-OM-U010-H PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDFC60-23-C,L,R,T,V IDFC70-23-C,L,R,T,V IDFC80-23-C,L,R,T,V IDFC90-23-C,L,R,T,V This manual is intended to explain the installation and operation of the product.

The alarm groups indicated by numerical values are described as follows: "2": Alarm group B "4": Alarm group C "8": Alarm group D "0": Alarm group E Display/Non-display of OUT9 and OUT10 are switched depending on the set maximum number of step data in the parameter (profile). Maximum number of step data is 512: OUT9 and OUT10 are not displayed.

> 1-196 E <> 75 - <>EEPROM 1-197 E <> EEPROM 10 <>CPU CPU CPU 1-198 CPU E <> <>CC-Link WDT CC-Link (01-206) CC-Link WDT E <> *1 (RWr)code"01-***""*** 10.1.2 (RWr RWw)(P.38) 76 - 17.

a maximum of 152mm. 6 Series MF Dimensions Curved Type 15 32 MF -45 (D) H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424