3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
RSH20, 32 Graphq Graphw 1.0 RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] 0.8 1300 1300 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 600 600 0 500 100 200 300 400 63 Lateral load F [N] 500 500 50 400 400 RS1H50, 63,
Using VY1500, lower the 500 L tank pressure from 0.4 to 0.1. a) If describing the above graph in accordance with graphs, the exhaust time is read; 27 3 = 24 s. PVQ b) Then, to convert the time into one from a 500 L tank.
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13
0 Description Shield plate Switch ass'y Piston PT fittings Adjustment screw Pointer Spring Scale plate Miniseal Y type Magnet No. q w e r t y u i o !
Bit 3 of SW2 SW1 Station Address Bit 3 of SW2 SW1 Station Address OFF 0 Disabled ON 0 50H OFF 1 41H ON 1 51H OFF 2 42H ON 2 52H OFF 3 43H ON 3 53H OFF 4 44H ON 4 54H OFF 5 45H ON 5 55H OFF 6 46H ON 6 56H OFF 7 47H ON 7 57H OFF 8 48H ON 8 58H OFF 9 49H ON 9 59H OFF A 4AH ON A 5AH OFF B 4BH ON B 5BH OFF C 4CH ON C 5CH OFF D 4DH ON D 5DH OFF E 4EH ON E 5EH OFF F 4FH ON F 5FH Turn the power
Body material Port size Orifice diameter e VXS2 3 A w B 5 Body material C37 Port size 1/4 e A Orifice diameter 10 Step 3 Select electrical specification.
7 Stainless steel Stainless steel Piston rod Washer Nitriding e !8 Sainless steel Rack r Oil containing polyacetal with back metal Bearing !
SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.
Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal
Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A44C--Reed, DC Volt >5 <24, AC Volt <200, LED, Connector, None, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F5BA--Solid State, Water Resist., 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: -, Number: -
Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: F59W--Solid State, 2-color Indication, 3 Wire NPN, Lead Wire or Prewied Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -
Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -
Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59W--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -