B L L2 L 12 L1 U M D side Stations n U side 1 2 3 4 5 300 280 X V R S 2 x E Mounting hole H L K J L (mm) n (stations) Model Dimension 3 168 156 218 200 4 204 192 264 246 5 240 228 310 292 6 276 264 356 338 7 8 348 336 448 430 9 384 372 494 476 10 2 L1 L2 L1 L2 96 84 126 108 132 120 172 154 312 300 402 384 VVX31 VVX32 VVX33 (mm) DIN terminal Electrical entry (DC, AC/Class H) A B C D E F
D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R
3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !0 o r t ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e ZL ZY ZQ ZF ZP !
Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.
8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !
side, side port) End plate assembly (U side, side port) Aluminum Aluminum y y End plate assembly (U side, front port) End plate assembly (U side, front port) Note 2) O-ring e is included with manifold valve r.
A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic
How to Order Vacuum Pump Unit ZQ1000 U 5 K1 L EA u i o G q w e r t y !0 !2 !1 q Body type U M For single unit For manifold w Solenoid valve combination (Refer to Table (1).) r Solenoid valve rated voltage (Refer to Table (1).) e Pilot valve (Refer to Table (1).)
/ill be B port of the manifold base Applicable Valve : NVJ314, NVJ3i4M NVJ324. NVJ324M OFor type NWaJ3-41,541 lnsert the plug (VJ30O0-33-1) into the Fl port, which is not used for a 3 way valve. Outlet port of a 3 way valve will be B port of the manifold Applicable Valve : NVJ314, NVJ314M NVJ324, NVJ324M e g E A & irtu l )-#f13 way varve |>/flt -L-,\u,4# vJ30oo-33-l Pruq base.
4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !
When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA
Note 2) M-type plug connector is not available with the model with pressure sensor. 13A Table 3 Supply valve/release valve accessories Manual override Note 3) Supply valve/release valve model Accessories ZB1-VQ110UZB1-VQ110U-B ZB1-VQ110LZB1-VQ120UZB1-VQ120U-B ZB1-VQ110ZB1-VQ110-B Nil B Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs.
Note 2) The seal is for 40 m and 80 m elements. 784 Vacuum Filter AFJ20 to AFJ40 Series Dimensions AFJ20 N T J M D U Bracket (Option) S SP R ZCUK C B V Q IN OUT AMJ AFJ AFJ 2 x P (Port size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications
(While pressing DIN rail releasing buttons c , at two locations, separate the manifold base from the DIN rail.) 2 Additional bases are to be added to the U side. Press splitting button b of the manifold block assembly on the U Note 3) When bolt a for the end bolck is not sufficiently tightened during reassembly, air leakage may result.
Nil S n Mounting style CNA Basic style Axial foot style Rod side flange style Head side flange style Rod side trunnion style Head side trunnion style Clevis style B L F G U T D CNS Auto switch Nil Without auto switch (Built-in magnet) CLS For the applicable auto switch model, refer to the table below.
NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.
P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W) Control Circuit Power Supply Connector: CNP2 Accessory 24V Terminal name Function Details 0V 24 V side of the control circuit power supply (24 VDC) which supplies the driver.
Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17