Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Series AK1000

22 Hastelloy C-22 Hastelloy C-22 PCTFE 80 0.55 316 SS PCTFE (Option: Vespel) 70 0.48 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 Dimensions inch (mm) 50 0.34 AK1400T 40 0.28 30 0.21 2.12 (53.8) 20 0.14 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or BP) 0 0.00 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) AK1400T 80 psig (0.55 MPa) Inlet pressure

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1 5 10 20 0.5 1 5 10 20 Load (kN) Load (kN) 27 Hydraulic Cylinder Technical Data Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 50, 63, 80, 100 Bore size 50 B rod C rod 2000 5 2 4 8 3 7 2 4 8 3 7 5 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B rod C rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50

CE

mm) Applicable bore size (mm) D C d D C Part No.

VQZ1000/2000/3000

A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

PSE540/560

IS 0 1 MPa PSE560 100 kPa (0.1 MPa) 1 MPa ZSM For positive pressure 0 500 kPa PF2 PSE564 50 kPa 500 kPa IF Rated pressure range of sensor Regulating pressure range of controller Data 16-3-31

ISO Standard Hydraulic Cylinder

C Applicable Auto Switches/Refer to pages 431 to 490 for further details on each auto switch.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

Bore Size: 25mm, Port Thread: M Thread (ø16) Rc Threads (ø25, ø40), Stroke: 500mm, Stroke Adjustment Unit: Left, Right Side w/o Adjustment Unit, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 20mm, Port Thread: Rc (25-100 Bore, M Thread 16-20 Bore), Piping: Standard, Stroke: 500mm, Stroke Adjusting Unit: w/o Adjustment Unit, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 40mm, Port Thread: Rc: ø25, ø40, ø63/M Thread: ø16, Stroke: 500mm, Stroke Adjusting Unit: w/o Adjusting Unit, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 63mm, Port Thread: Rc: ø25, ø40, ø63/M Thread: ø16, Stroke: 500mm, Stroke Adjusting Unit: w/o Adjusting Unit, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal

Bore Size: 40mm, Port Thread: Rc: ø25, ø40, ø63/M Thread: ø16, Stroke: 500mm, Stroke Adjusting Unit: w/o Adjusting Unit, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 63mm, Port Thread: Rc: ø25, ø40, ø63/M Thread: ø16, Stroke: 500mm, Stroke Adjusting Unit: w/o Adjusting Unit, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Mounting: Front Flange, Bore Size: 100mm, Stroke: 500mm, Rod Boot: w/o Rod Boot, Cushion: Cushion On Both Sides, Connector: Connector, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Number: -, Port Thread: Rc, Lead Wire or Prewired Connector: -

Bore Size: 20mm, Port Thread: Bore 10, 15: M Thread, Bore 20, 25, 32, 40: Rc, Stroke: 500mm, Switch Rail: Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Mounting: D (Double Clevis), Tube Material: ø125-ø160: Aluminum or Steel, ø180-ø300: Steel, Bore Size: 160mm, Thread Type: TN (NPT), Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: D (Built-in), Mounting: L (Foot), Bore Size: 125mm, Port Thread: Rc, Stroke: 500mm, Rod Boot: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Mounting: B (Basic Style), Bore Size: 40mm, Thread: Rc, Stroke: 500mm, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal