Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100

CE

/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

CE

49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H/A80H D-A73C/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5

High Power Cylinder Series RHC

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 60 + 45 (n 2) 10 15 60 (n = 2, 4, 6...) (n 2) 2 D-C73C D-C80C D-H7C 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6...) D-B5/B64 D-G5/K59 D-G5W/K59W D-G5BAL D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

IZx-OMT0049

Bar 40 16 D 1 6H R F IZTB (1) (2) (3) (4) (5) (6) (7) (8) (6) Plug location (1) Model (5) One-touch Fitting Symbol Metric size Symbol Plug location Symbol Model 4H 4 straight Nil Without plug 40 Standard, AC type 42 Dual AC type Q High voltage cable side 6H 6 straight 8H 8 straight R The opposite side of the high voltage cable (2) Bar length AH 10 straight (7) Bracket for bar Symbol Type

High Vacuum Angle Valve

D-G

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators 2 position single (24 VDC) 10-SQ1131-51-C6 (4 sets) 2 position double (24 VDC) 10-SQ1231D-51-C6 (4 sets) Blanking plate SSQ1000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side D side 3m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting Manifold base (9 stations) 10-SS5Q13-09FD2-D F kit (D-sub connector kit)

CE

/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

CLS

7 7 7 6 6 B D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL Proper Auto Switch Mounting Position/ Auto Switch Mounting Height 6 6 5.5 5 5 D-G39/K39 D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL 10 10 10 11 11 Common for each auto switch Since this is a guideline including hysteresis, not meant to be guaranteed.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Plug: KPP Applicable fitting size d Weight g D Model L A L A 4 0.4 6 32 13.8 KPP-04 D d 6 15.7 0.7 8 35 KPP-06 8 10 39 17.3 1.1 KPP-08 Applicable fitting size d 10 12 19.2 1.7 43 KPP-10 12 2.5 14 45.5 20.7 KPP-12 The plug is commom for series KPQ, KPG and KP. 9

240

Mounting Position (Detection at Stroke End) and Its Mounting Height D-M9 D-M9W D-M9A D-A9 A 22 [24] (24.5) W B [ ]: Value of the D-M9A ( ): Value of the D-A90/A93 D-M9V D-M9WV D-M9AV D-A9V A 20 (22) W B ( ): Value of the D-M9AV/A9V (mm) D-A9, D-A9V D-M9W, D-M9 D-M9WV, D-M9V A 16.5 15.0 22.0 30.0 D-M9A A 16.5 15.0 22.0 30.0 D-M9AV A 16.5 15.0 22.0 30.0 Bore size (mm) 6 10 16 20 B 2.5 7.5

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Mist Separator

Disassembly Drawing] (P27). -10- 6 Bowl Assembly Specifications 6-1. Bowl assembly / auto drain for AFM20-D Option symbol Semi-standard symbol 6 C 6C Semi-standard: (Standard) Semi-standard: C Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C2SF-D C2SF-C-D G G NPT C2SF(-Z)-D NPT C2SF-C(Z)-D Appearance and part No.

Title not found

3 Cable color Circuit U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

Pin Clamp Cylinder Series CKQ/CLKQ

mounting type Applicable auto switch: D-A79W D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-F7WV D-F7BAL D-F7BAVL D-F7W D-J79W D-F7NTL D-F79F D-F7V D-J79C D-F7 D-J79 [For CLKQ] [For CKQ] B A B A U U Direct mounting type Applicable auto switch: D-A9 D-A9V D-F9WV D-F9BAL D-M9V D-F9W [For CKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V

CHKD/CHKG

Minimum Auto Switch Mounting Stroke (mm) D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number D-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 6 5.5 4.5 5.5 5.5 6.5 8.5 9.5 D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA 8 9.5

Slider Type/Ball Bushing Bearing

Technical Data 1519 A CY1L Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range (mm) Bore size Auto switch model 6 10 15 20 25 32 40 D-A7 /A8 D-F7 /J7 6 6 6 6 6 6 6 3 3 4 3 3 3 3.5 D-F79F 4.5 4.5 4.5 4.5 4.5 4.5 4.5 Since this is a guideline including hysteresis, not meant to be guaranteed.