3 Way,3 Port Solenoid Valve NVZ Series

Exhaust air from the main valve will not enter the oilot valve side due to a check valve. ( + J Aoolications aElimination of air contamination which pilot exhaust would creale. o Elimination of pilot exhaust noise. a Prevention of dL-lst entry into valve when used in extremely dusty envraonmenlS.

Compact Cylinder with Air Cushion and Lock Series RLQ

Description RLQ40 RLQ50 RLQ63 T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 Compact Cylinder with Air Cushion and Lock PT elbow Restrictor PT tee 32, 40: AS2200-(N, F)01-S 50, 63: AS2200-(N, F)02-S 32, 40: KRL06-01SW2 50, 63: KRL06-02SW2 TRB0604W KR-06C 2 Metal speed controller 5 2 Male elbow By-pass tubing Spatter

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02

PFxx-OMO0004CN

() C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () (3.02 ) ZS-

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Air cooled Thermo-con (Compact type)

used STX ETX ACK NAK ASCII code 30H 31H 32H 33H 34H 35H 36H 37H 38H 39H Number used 0 1 2 3 4 5 6 7 8 9 ASCII code 2DH 20H Number used SP Space Minus ASCII code 41H 42H 43H 44H 45H 46H 47H 48H 49H 4AH Character used A B C D E F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H 58H 59H 5AH Character used U V W X Y Z HEF002

Air cooled Thermo-con (Compact type)

-3 ASCII code ASCII code 02H 03H 06H 15H Code used STX ETX ACK NAK ASCII code 30H 31H 32H 33H 34H 35H 36H 37H 38H 39H Number used 0 1 2 3 4 5 6 7 8 9 ASCII code 2DH 20H Number used SP Space Minus ASCII code 41H 42H 43H 44H 45H 46H 47H 48H 49H 4AH Character used A B C D E F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H

DOC1003077

Circulating fluid IN/Drain E Screw for filter maintenance K PE connector (M4) Selecting 02 in Setting mode activates the control setting mode.

AME

It cannot be used if connected in the opposite direction. 4.6-24 Series AME Dimensions: AME150 to AME350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4, 3/8

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Pneumatic Positioner IP300/IP3100

Steel) 4w 1P300.1P3100 DIMENSIONS MODEL 1P300 (Lever Type) l t I I I J J O

ChemicalThermo-con

chlorine Free carbon Standard value 6.5 to 8.2 100to 800 [S/cm] 200 [mg/L] or less 200 [mg/L] or less 100 [mg/L] or less 200 [mg/L] or less 150 [mg/L] or less 50 [mg/L] or less 1.0 [mg/L] or less 0.3 [mg/L] or less Should not be detected. 1.0 [mg/L] or less 0.3 [mg/L] or less 4.0 [mg/L] or less Standard item Reference item Electrical conductivity should be 100 [S/cm] or more. 2.

High Pressure Coolant Valve

mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2

AME

Dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) HA Maintenance space AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2

AS-FM

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 20 10 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 10 5 20 10 0 5 20 10 10 0 5 0 10 Number of needle rotations Number of needle rotations Number

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 4 6 8 10 12 04 06 08 10 12 Made to Order Refertopage612for details.

Activated Carbon Filter

AMX-OMY0038-A PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK20-(F, N)01 ~ (F, N)02(B)(-2, 6, C, R, Z)-D AMK30-(F, N)02 ~ (F, N)03(B)(-2, 6, R, Z)-D AMK40-(F, N)02 ~ (F, N)04(B)(-2, 6, R, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5. Construction / Options / Replacement parts 10 6.

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

DIN rail for 9 stations F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit When ordering DIN rail only F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Type T2 T1 DIN rail no.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length.