C85

2 !3 !4 !5 !6 !

Digital Flow Switch (Integrated display type)

It is possible to select the function to memorize it. (Every 2 or 5 minutes.) When 5 minutes interval is selected, take into consideration the maximum number of times it is possible to write to the memory device (electronic part), which is 1 million times (5 minutes x 1 million times = 5 million minutes = Approx. 9.5 years for 24 hour energizing).

13

Selection Procedure When the suction flow rate of 53 kPa is obtained from the ZH07DS flow characteristics graph, the leakage volume is 5 l/min (ANR). () Leakage: Adsorption flow (5 l/min) (ANR) Example 2: For obtaining the discharge response time until the internal pressure in the 5 l tank is discharged to 95% (T2) of the final vacuum pressure through the use of a valve with an effective

CLS

2 !3 !4 !5 !

Fieldbus system Digital unit

I/O signal assignment (EX600-DM E) Configuration Pin number 1 2 3 4 5 6 7 8 Signal name Input 0 Input 1 Input 2 Input 3 Input 4 Input 5 Input 6 Input 7 Input signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Pin number 14 15 16 17 18 19 20 21 Signal name Output 0 Output 1 Output 2 Output 3 Output 4 Output 5 Output 6 Output 7 Output signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit

Stopper Cylinder

#0 $1 $2 @5 @3 @4 @6 #1 $6 #7 #5 #6 #8 @7 #2 #4 Only one roller is provided for 32. $0 #9 RSQ RSQ Component Parts No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

VX21 0 1 2 3 VX021N-12A Dimensions page 22 (Single unit) VX22 0 2 3 4 VX23 0 2 3 4 VX022N-12A VX22 0 5 6 VX23 0 5 6 VX023N-12A-L 4 5 Series VX21/22/23 For Water /Manifold Solenoid Valve for Manifold/Valve Specifications N.C. N.O.

ITV

ITV X88 2 0 1 0 S 0 1 2 High-speed response time specifications Model Pressure range 1 2 1000 type 2000 type 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Pressure display unit 2 3 4 5 MPa kgf/cm2 bar PSI kPa Power supply voltage Input signal 0 1 24 VDC 12 to 15 VDC 0 1 2 3 Current 4 to 20 mA (Sink type) Current 0 to 20 mA (Sink type) Voltage 0 to 5 VDC Voltage 0 to 10 VDC Cable connector type S L N Straight

Hygienic Design Cylinder Series HY

5 !8 i e !7 !4 t !9 !0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.

Compact Vacuum Unit

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

LEC-OM038xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

e-Rodless Actuator

Acceleration [m/s 2] Speed Setting Switch No. Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

Electromagnetic Digital Flow Switch

(Interval of 2 or 5 minutes can be selected.) If the 5 minutes interval is selected, the life of the memory element (electronic parts) is limited to 1 million times. (If energized for 24 hours, life is calculated as 5 minutes x 1 million = 5 million minutes = about 9.5 years.)

rep-filter-e

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.

Industrial Filters Replacement Procedure

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

30

" L2 M1 1/4" 5/32" O 1/4" 5/16" L1 N 3/8" 5/16" M2 3/8" 1/2" Note 1) D is maximum diameter.

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El 4 5 g ZPY2O!' 20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...) oe.4 1 5.5 7 2.5 ZJri'Otl 8 ,1\ ZPY32~ 32 35 14.5 Deep type I r.sXI 1., . "" , 1: t.i5 XQ! 'I U4!"'

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.