High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Reference page Item 3 Output type Example of internal circuit and wiring 4 Auto shift function, Chattering prevention function 5 Measures to be taken when error occurs 6 11 For General Fluids High Precision Digital Pressure Switch Series ZSE60F/ISE60 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 Bracket A ZS-24-A View A Bracket D A 30 20 20 45 55 4.5 4.2 11.5 40

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Bore size With One-touch fitting U01 U02 U03 U04 1 8 1 4 3 8 1 2 Needle Valve/Flow Characteristics AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations AS3201F, AS3211F

S Couplers Series KK/KK13

L1 L2 20 27.2 13 T T A A Width across flats H Width across flats 22 H Width across flats A T Connection male threads T Connection male threads Effective area mm Min. bore Weight g Model Effective area mm Min. bore Weight g Model A L L 41.5 R 1/8 30 R 1/8 81 18 45.5 34 19.0 6 6 22.6 KK13P-01M KK13S-01M 14 42.5 R 1/4 31 R 1/4 86 22 24.1 7 -02M -02M 48.5 37 42.1 R 3/8 30.6 R 3/8 89 7.5 35.3

REC

RHC 3. For installation other than horizontal mounting, it is recommended to use a system with reduced pressure supply circuit on the downward side. (This system is also effective for avoiding a start delay at rise and air consumption.) MK(2) RS Q G RS H A Cushion Adjustment Cushion adjustment mechanism is not designed.

VXP21/22/23

e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50 9 Series VXP21/

PSxx-OMM0002CN

6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa

3 Port Air Operated Valve Series SYJA300 1

N.O. 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) Flow Characteristics/Weight C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Effective area (mm2) Pilot port size Type of actuation Port size SYJA312-M3 SYJA322-M3 SYJA314-M5 0.41 0.18 0.086 0.35 0.33 0.086 Body ported N.C. N.O. N.C.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

3 !4 !5 !

Rotary One-touch Fittings Manifold Series KM

Thread R(PT) Port B min. port size Weight (g) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 6 4 KM14-04-06-01S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 19 26 39 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 64 65.5 67.5 1 8 1 4 3 8 8 4 KM14-04-08-01S-3 31 69.5 70.5 71 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 39 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 8 6 KM14

Filter Regulator AW30, 40

AR40P-270AS AR30P-270AS AR40P-270AS Set nut AR40P-260S AR30P-260S AR40P-260S G46-10-02 Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS

CEx-OMQ0010

0.2mm Max.DC30V,50mA A /B DC500V,50M (12V ) 33.3Hz 6.8G XY 2 Z 4 JIS D1601 30G XYZ 3 IP65IEC 5m10m15m20m 1CEU2 CEU1CEU5 14 4-3 () 200 1 L=1mm 6P6200.0( CEU2 ) L PRG STEP P6 200.0 2 1 200 300mm/sec 50% 35% 15 5-1 CE2 A A B B C C O M (OV) D C O M (OV) E +1224V F 0V G H 5-2 CEU1 CEU2 CEU5 CEU*3 +12V +12V COM +12V +12V COM +12V DC12V60mA .. 16 5-3

Related Products

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VZA200/400

(Value in the initial. stage) VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VR Model VH Flow characteristics (2) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Cv Type of actuation Port size Pilot port size b Cv b C [dm3/(sbar)] Valve model Pilot VHS Body

VHS

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 Pipipng direction VHS500-06 VHS501-06 SA Right IN1 (P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2) Weight (kg) VA 1 (P) 2 (A) 21 105 76 54 35 35 57 93 2 (A) 3 (R) SA 0.25 0.34 Left or right to the front face of the handle.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Booster Relay Series IL100

q and diaphragm A w and exerts a downward force on diaphragm B e.

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Body Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Mounting: B (Bracket), Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Mounting: B (Bracket), Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard