Series VQ1000/2000 10- 21- 5 Port Solenoid Valve (L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
B P A B P A B P VFR3000 VFR4000 ARBF5050 VFR5000 1.0 MPa (1) 0.1 to 0.83 MPa (2) 0.05 to 0.83 MPa 5 to 60C (No freezing) (3) 1 8 0.16 0.46 0.72 0.83 5.5 5.1 12 11 M5 x 0.8 Rc 21 18.5 11 35 31 26 18.5 22 12 31 31 40 55 36 45 24 44 38 32 38 40 90 77 P A P B A EA B EB Effective area at supply side (mm 2) S at P1 = 0.7 MPa/P2 = 0.5 MPa 31 Effective area at exhaust side (mm 2) S at P2 = 0.5
P P For the release valve, select a 2/3 port valve with a low vacuum specification. Also, use a needle valve to regulate the release flow rate. During the adsorption and transfer of a workpiece, verification of the vacuum switch is recommended. In addition, visually verify the vacuum gauge when handling a heavy or a hazardous item.
30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8
i j h OFF g 7.4 P.39 OFF8.5 ONP.44 7.2 P.32 8.4 P.43 c 38 No.JXC-OMU0004-A 7.4 LED a (ON) 0 3 7 LED I/O I/O 7 LED g g a 39 No.JXC-OMU0004-A 8. 8.1 () 2 h 15 g I/O IN03 ON * 1 2 () M (2) (1) 10.
ANSI symbol shows the valve as a single inlel 4.way, bul valve may be used, withoul modilica. tion, as a dual inlet 4.way, a 3.way, or a 2-way, by piping and/or plugging lhe appropriate ports.
42.5 28.3 64.7 17 48 (48) AS331F-03-06(S)A 6 11.2 12.9 16.6 20.2 36 21.4 57.8 AK 1/4 19 50 48.4 44.5 42.9 VCHC 13.3 34 (35) AS331F-03-08(S)A 8 13.2 37.1 23.5 52.2 14.2 35 (36) AS331F-03-10(S)A 10 15.9 17.4 23 41.2 26.1 54.8 15.6 38 (39) AS331F-03-12(S)A 12 18.5 42.5 28.3 57 17 40 (41) AS431F-04-10(S)A 10 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 61
(Example) CUJ-M3 x 27L A A C B B D Axial mounting Side mounting For axial mounting Without Auto Switch For side mounting Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 A B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 C D Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20
When using as a stopper, select a model with 30 stroke or less for bore sizes 20 and 25, and 50 stroke or less for bore sizes 32 to 100. 2. When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large.
7 N@4 CL1 A' A A' A MLGC CNG B MNB @5 !5 CNA CNS 20, 25: 50 stroke or less Over 100 stroke CLS CLQ Extension locking (Type F) Retraction locking (Type B) MLGP N#2 u #6 y @2 u #6 #2 y #5 @2 i i RLQ MLU ML1C D-X Section B-B' Section B-B' 20Section A-A' !6 !6 Section A-A' Data Component Parts Description Material Note No. !7 !8 !
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
Auto switch mounting groove 4 (For D-F, D-M9(V)) 3.7 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-38 38 Standard Type/Series MHZ2 Finger Option Through-holes in Opening/ Closing Direction [2/N2] Side Tapped Mounting [1/N1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL B A MHR 4-H (Hole for mounting attachment) MHK S S MHS O
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
Auto switch mounting groove 4 (For D-F, D-M9(V)) 3.7 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-38 38 Standard Type/Series MHZ2 Finger Option Through-holes in Opening/ Closing Direction [2/N2] Side Tapped Mounting [1/N1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL B A MHR 4-H (Hole for mounting attachment) MHK S S Courtesy
A ARX AMR ARM ARM ARP IR-A A-A X IR IRV VEX SRH SRP SRF ITV IC ITVH ITVX PVQ Component Parts Replacement Parts Description No.
Do not use a load that generates surge voltage.
VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.
set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.
set of a and b in the figures. wBJ3-1: A set of c, d and e in the figures.