Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Manifold VV8 1 5 D T 02 03 Port thread Nil T F Rc NPTF G Size 1 2 3 Size 1 Size 2 Size 3 Location of P, EA, EB port Number of stations D U Bottom Top 1 1 station 10 10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Compact manifold regulator ARM5 Series

ARM5B R 06 A Individual Supply Type 3. Semi-standard 1.

Related Products

133 47 61 34 52 64 (Max. 73) AVL4000-*04-*DZM 3/4 & 1 128 161 59 77 74 64 (Max. 73) AVL5000-*06 to 10 3/4 & 1 128 161 59 77 34 74 64 (Max. 73) AVL5000-*06 to 10-*DZM Soft start valve with lock out H Air direction Nil Left to Right F Port thread Body size R Right to Left Nil Rc 20 1/4 N NPT 30 3/8 F G 40 1/2 C E D 50 3/4, 1 Electric entry 1(P) 2(A) Port size Manual lockout Nil 1/4 (AVL2000

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Body Ported Plug Lead Unit Connector Kit How to Order Manifold Series VV5QZ 1 2 08 C DIN rail mounting None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) D DO VQZ1000 VQZ2000 VQZ3000 1 2 3 (1) Note 1) Order DIN rail separately.

ALF400 to 900, ALT-5/-9

1 Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9 Standard Specifications Model Auto feed lube Auto feed tank 1 2 ALT-9-IS1 2 ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 ALT-5 ALT-5-ISALT-9 ALT-9-IS4 1 2 1 1 1 1 2 4 1 4 3 AIR: OIL: 4 3 2 1 4 1 Port size 8 3 8 3 1 Fluid Proof pressure Max. operating pressure Air 1.5 MPa 0.7 MPa 1.0 MPa Courtesy of Steven Engineering, Inc.-230 Ryan

Table of Contents

Inlet pressure 0.5 MPa Total stroke time (t) (1) Piping length SV1000: 1 m, SV2000/3000: 2 m, SV4000: 3 m Stroke (L) Speed d% d% Stroke (mm) Speed at the end Cylinder direction Vertical upward Stroke Speed controller Meter-out, Directly connected to cylinder, Needle fully open (2) Load ratio {(Load weight x 9.8) Theoretical output} x 100% Speed at the end (u) Time (s) SOL: ON(OFF) 1-2-6

OMU0023

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

P

Symbol Thread dia. 1 A8 Adaptor connection thread Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] S ZP 06 B5 R [wR type adaptor] Adapter connection thread Symbol S Pad dia. 02 to 16 Pad dia.

Size: 3/4, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 3/4, Accessory: -, Option 1: -, Option 2: -

HRX-OM-R028

HRX-OM-R028 Contents Contents Chapter 1 Read before using. 1-1 1.1 Communication mode and operation method .1-2 1.2 Communication port.1-3 1.3 Key operations.1-4 1.4 Parameters .1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication .2-1 2.1.1 Precautions wiring communication. 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2 Communication

HRX-OM-T004

HRX-OM-T004 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

ZR

) Rc 1/8 P port (Air supply port) 2-4.2 (Mounting hole) 1 1 1 Ejector Bracket A Bracket A 10.2 10 13 15 D1 D2 D3 ZR1 SMC PRESSURE SWITCH RESET SET Attachment D Suction filter Digital pressure switch (73.3 for D2, D3 types) 81 71.3 61 SMC PV PD Filter block D 3 96 13-3-26 26 Series ZR Large Size Vacuum Module: Ejector System Nozzle dia./1.8, 2.0 mm 18 20 ZR1 1-E Note) 1 Dimensions for mounting

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

1.5 3.5 Note) Flow rate values are measured at 0.5 MPa and 20C Flow Direction Symbols on Body How to Order JIS Symbol Symbol 1F 06 D 200 AS Type adjustable by flat head screwdriver Body size 100 200 205 300 400 M5 standard Applicable tubing O.D. 1/8 standard Inch size Metric size 1/4 standard 3.2 3/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 1/2 standard 4 5/32" 6 3/16" 8 1/4"

5 Port Solenoid Valve Series SV

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

air-filter-e

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.