Compact Cylinder

Hs A B (mm) D-M9 D-M9W D-M9V D-M9WV D-A9V D-A9 Bore size (mm) A B A B W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 38.5 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 The value in parentheses [ ] is for 5 mm stroke with

Electric Actuators

4 Nickel plated 8 Bearing stopper Motor plate Guide ring Bearing Bushing Soft wiper Anodized Size 10 only 9 10 11 12 13 !2 e w i !1 t !

5 Port Solenoid Valve SY Series

Straight type 49 1 V100 Cable length 1 500 mm 300 mm 2 3 4 7 1000 mm DIN Terminal Type 2000 mm 5000 mm 5 D V115 Light/surge voltage suppressor Rated voltage Nil Without light/surge voltage suppressor S Z With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) 5 24 VDC 6 12 VDC 50 60 1 100 VAC Hz 50 60 2 200 VAC Hz DOZ is not available.

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Intrinsically Safe Valve

Zener barrier) for apparatus group IIC with the following maximum values: Ui = 28 V Ii = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH Confirm the solenoid input voltage at the lead wires is 12 VDC 10%. The resistance of the solenoid valve is R 20 + 278 3% Ohm at 68F (20C). Do not bend or pull cables repeatedly.

SI Unit for Vacuum Manifold

Table. 3-1 Head modules Head module Number of ejectors connected EX260-VPN1 ( 4) 1...4 EX260-VPN1 ( 8) 5...8 EX260-VPN1 (12) 9...12 EX260-VPN1 (16) 13...16 -15No.EX-OMY0014-A 3.3. Modules The GSD file contains the following modules. The number of occupied bytes of some modules differ by the selected head module.

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

Silencer Series AN

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

Fieldbus system (SI unit compatible CompoNet TM )

Insulation resistance 1000 M Withstand voltage 1000 V Operating temperature range -30 to +55 oC VCTF 2 core cable (0.75 mm2 x 2) VCTF 4 core cable (0.75 mm2 x 4) Use the M3 crimped terminal for the connection.

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

9.8

. -0.1 MPa (-100 kPa) 1/1000 1/100 (Only the displayed value is changed, and there is no effect on the accuracy.)

Nozzle Type Ionizer

No need to readjust the nozzle angle when the ionizer is restarted. eCartridge assembly p. 12 wBody assembly p. 12 Maintenance warning function Monitors emitter contamination or wear continuously and will turn on an LEDs and output signal.

A_HEC-OM-K001

A_HEC-OM-K001-1.7 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the Chemical Thermo-con . 1-1 1.2 Safety training . 1-1 1.3 Hazard Levels . 1-2 1.3.1 Definitions of Serious injury and Minor injury . 1-3 1.3.2 Symbols . 1-3 1.4 Hazard Warning Labels . 1-5 1.4.1 Location of hazard warning labels . 1-6 1.5 Safety Measures . 1-12 1.5.1 Precautions . 1-12 1.5.2 Protective

CLS

100 V, 200 V Solid state switch Reed switch 3-wire (NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 4-wire (NPN) Terminal conduit 12 V Relay, PLC IC circuit Yes 5 V, 12 V With diagnostic output (2-color indicator) 24 V 12 V Grommet 5 V, 12 V Water resistant (2-color indicator) 12 V 5 V, 12 V With diagnostic output (2-color indicator) IC circuit A96 A93 A90