Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

4/5 Port Air Operated Valve Series SYJA3000 1

Prefix it to the part nos. of the solenoid valve, etc. 3 position pressure center (A) 4 (B) 2 1 (P) 3 (R) Caution For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 5-2-22 5 Series SYJA5000 4/5 Port Air Operated Valve Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 x P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 2 position

One-touch Fittings

Tubing size Tensile force of tubing [N] 2, 3.2, 1/8" 5 4, 5/32", 3/16" 8 6, 1/4" 12 8, 5/16" 20 10, 3/8" 30 12, 1/2" 35 16 50 2) Removal of tubing (1) Push the release button flange evenly and sufficiently to release the tube. Do not push in the tubing before pressing the release button. (2) Pull out the tubing while keeping the release button depressed.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 5 +0.030 0 NA x M6 x 1 thread depth 6 M 37 25 KA 6.5 12 Bottom view of MXQ20-50 132225 K 12 48 36 6.5 12 43.5 0.5 6.5 46 Z ZZ H G (NN 1) x H 26 10.5 26 10.5 A B 9.5 5.1 5.1 11 11 29 1.5 A B NN x M6 x 1 thread depth 12 6 5H9 ( ) depth 5 +0.030 0 GA HA B-B A-A 5H9 ( ) depth 5 +0.030 0 (mm) Model F 45 40 48 58 42 55 50 55 62 N 4 4 4 4 6 6 8 8 8 G 22 22 22 22 17 18 37 56 H 46 46 46 56

Dual Speed Controller with One-touch Fitting Series ASD

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Step Motor Driver （ Pulse input type ）

Vcc B-4 Brown 12 C 20m *1) GND A-4 Black 13 A B-5 Red 7 *1) produced upon receipt of order A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can B A-6 Black 8 be selected. 3 signal Terminal no. Lock B-1 Red 4 Lock A-1 Black 5 Sensor B-3 Brown 1 Sensor A-3 Blue 2 Electric Actuator side Driver side 11 - (5) I/O Cable Pin No.

EX510

0 0 3 2 1 0 0 1 2 3 0 + + 0 80 40 7 6 5 4 4 5 6 7 1 1 to to to to to to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts

PEEK

N.C. 3 2 1 11 11 IN port 3 x M6 x 1, 1/4-28UNF OUT port (LVM10R3, 10R4) 6 Plug (2) 5 11 6 2 (COM) port (LVM105R) Plug (LVM10R6) 10 1 (N.C) port 3 (N.O) port 13 LVM105R 2 x M3 Thread length 5 For direct mounting The broken lines indicate with bracket. 10 Compact Direct Operated 2/3 Port Solenoid Valve for Chemicals Series LVM15/150 How to Order LVM 15R3 Base Mounted Y 5 A CE compliant Symbol

HRX-OM-R005

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-R016

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-W038

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

HRX-OM-O021

Display and setting of various functions . 5-1 5.1 List of function . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main screen . 5-7 5.3.1 Main screen . 5-7 5.3.2 Display on the main screen . 5-7 5.4 Alarm display menu . 5-8 5.4.1 Alarm display menu . 5-8 5.4.2 Content of display of alarm display menu . 5-8 5.5 Inspection monitor menu . 5-9 5.5.1 Inspection

CRBB-OM00004

Carefully fix the switch blocks (10) to the holding block (A) (7) using the cross recessed round head screw (11). 5. Mount the auto switches (2) to the switch blocks (5) using the cross recessed round head screws (12). 6. Move the switch blocks (10) to the setting position and fasten them with the cross recessed round head screws (11). For D-M9 1.

VZS

VZS2000/3000 Caution 5.

Micro Mechanical Valve Series VM1000

12 14 (Pilot exhaust port) 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 7.0 mm T.T. 4.6 mm O.T. 2.4 mm P.T. 7 N F.O.F. 5 x Rc 1 4 3 x 4.5 mounting hole 2338 Series VFM200 5 Port Mechanical Valve Metal Seal Series VFM200 Straight plunger VFM250-02-05 Panel mounting hole M x 18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1

IDG

(Refer to page 14-19-11.)

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz Valve size 1 to 4 1 6A 8A 10A 5 1 8 1 4 3 8 24V DC 12V DC 240V AC 50/60Hz 7 6 7 8 11 15 11 Other 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 25 4 20A 3 4 Valve size 5 to 7 25A 1 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange Electrical entry/Indicator light and surge voltage suppressor Grommet Grommet with surge voltage suppressor Grommet terminal Grommet terminal

Regulator

Note 3) : Select with an option E1, E2, E3 or E4. -8- 5.

IDX-OM-W026

2 6-4 . 6-3 1 6-5 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 . 11-2 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-