High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

HRX-OM-M005

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

IDX-OM-W032

R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-3 12-4 . 12-3 13 13-1 . 13-1 2 IDX-OM-W032 i i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4

EXxx-OMN0037CN

(ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -21No.EX-OMN0037CN-A (2)2 2 010 V05 V020 mA 15 V420 mA AD (ab) AD (

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x 1.25 15

RQ

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) YB-05 50, 63 11 60 120 22 6.5 12 YU-03 32, 40 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YB-08 80 14 75 230 28 8.5 16 YU-08 80 M16 x 2 24.8 23 13 90 9 22 8 20 YB-10 100 18 90 455 36 10.5 18 YU-10 100 M20 x 2.5 29.8 28 14 160 11 26 10 26 7-7-15 15 Series RQ Proper Auto Switch Mounting Position (Detection

IDX-OM-W020

S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 13 13-1 . 13-1 IDFB Series 2 IDX-OM-W020 i i i 1 () OFF 3 ON OFF i 1 1 3 i-1 IDFB Series i 1 IDX-OM-W020 i i 2 5 i 2 1 i-2 IDFB Series i 2 IDX-OM-W020 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 i-2-2 IDFB Series i 3 IDX-OM-W020 i i 2 6

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

RSQ

15 7 24.5 25.5 31.5 28 31 27 17 11 21 15 20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series RSQ Operating Range Bore size (mm) 12 Auto switch model 16 20 32 40 50 D-A7/A80 10 12 11 12 12 D-A7H

3 Port Air Operated Valve Series SYJA300 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R P 27 30 (2) 7 12.7 VR A 9.2 VH 2 15 (Bracket) 10 VHS 11 Base mounted: SYJA34-M5 14 5 10 Manual override (Non-locking) 2-3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P , A,

HRX-OM-S004

Drain port TS PS Temp. sensor (Ref. suction Compressor Refrigerating circuit Circulating fluid circuit Fig. 8-4 Flow diagram(HRS100/150-W-20/40/46-) HRS Series 8.3 Flow diagram 8-11 HRX-OM-S004 Chapter 8 Documents 8.4 Cooling capacity 8.4.1 HRS100-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 14 14 12 12 10 10 Cooling capacity [kW] Cooling

ISO Standard Hydraulic Cylinder

5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54 48 18.5 13.5 15 10 20 15 12 7 48 47 48 52 51 48 46.5 46 8.5 6 12.5 10 66.5 58 18.5 15.5 15 12.5 20 17.5 12 9.5 57.5 59 57.5 62.5 63.5 58 59 57 D-A5/A6/A59W cannot be mounted to 40, 50.

JXCx-OMT0001CN

No.JXC-OMT0001CN-C 4 TM) (EtherNet / IP // JXC93 Series 1. . 5 2. . 7 2.1. . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 1 . 11 (2) . 12 (3) . 13 3.6 . 14 1 . 14 (2). 17 (3) . 19 3.7 JOG . 20 (1) . 20 2 . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 3 . 24 (4) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

A

36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M

Prevents Micro-Bubbles

10 11 12 13 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class Body class Tubing size Plug Tubing size Plug LVC 6 1/4" 6 1/4" LVA Base type 2 2 8 8 A Stacking type LVH 10 3/8" 10 3/8" Manifold stations 10 3/8" 10 3/8" LVD 02 2 stations 3 3 12 1/2" 12 1/2" LVQ 05 5 stations 12 1/2" 12 1/2" LQ 4 4 19, 3/4" 19, 3/4" LVN TI/ TIL How to Order Valve PA LVH 2 0 S07 A PAX Body class

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

HRX-OM-T002

HRS090-A-20/40/46-. 9-10 9.3.2 HRS090-W-20/40/46 . 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRS090-A-20/40/46-. 9-11 HRS090 Series HRX-OM-T002 Contents 9.4.2 HRS090-W-20/40/46. 9-11 9.5 Pump capacity . 9-12 9.5.1 HRS090-A/W-20/40/46. 9-12 9.6 Types of hazard labels . 9-13 9.6.1 Locations of Hazard Labels . 9-14 9.7 Compliance standard . 9-15 9.8 Sample DoC. . 9-16 9.9 Daily Check Sheet . 9

IDX-OM-W034

Specification for Option S 10 1 Safety instructions . 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11 4 How to connect the power supply and signal cable . 11 -2 11 5 How to re-start the operation . 11 -3 11 6 Electric wiring diagram . 11 -4 Chapter 12 Specification for Option

AS-FG/ASD-FG

(ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000 10, 11, 12 08, 09 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle revolutions Number of needle revolutions 11 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 Parts list Material Note Description Note Description No. 12 Material No. 1 Body A Elbow body Knob Body