HRX-OM-O021

When the temperature of the circulating fluid is set to lower than 10oC, use a 15% aqueous solution of ethylene glycol. Tap water may freeze in the thermo-chiller, leading to malfunction. 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

Vacuum Gripper

11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2 ZP B30 J ZPGB30J-7A-X2 18 19 19 25 ZP2-B30J ZP3P 20 JT2 SF ZP3PG20JT2SF-7A-X2 21 ZP3P-20JT2SF-W ZP3PA-T1JT-7A-X2 ZP3P 20 JT2 SF M

Square Tube Type Air Cylinder Series MB1

(different sides, same side) D-Z73, Z76, Z80 Reed switch 15 25 1pc. D-Y59A(B), Y69A(B), 2pcs. (different sides, same side) 15 25 Y7P(V) 1pc. D-Y7NW(V), Y7PW(V), 2pcs. (different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

Process Valve Series VNA

Slotted locking type B (tool required) Note) 2 Note 1) Electrical entry: D or DZ only 15A 1 2 15 14 3 20 16 Note 2) Semi-standard 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Electrical entry/With light/surge voltage suppressor Flange E GS G Symbol Electrical entry Valve size

VQ5000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.

HRX-OM-M005

This system Your system Pin Item DC24V Pin No. 1 14 1 DC+24V output 24COM 3 14 24COM 4.7k 16 3 Start/stop signal 1 4.7k 4 16 Start/stop signal 2 4.7k 17 4.7k 4 DIO REMOTE signal 1 Recovery signal*1 6 17 DIO REMOTE signal 2 19 DIGITAL 6 OUT1 circuit 19 OUT2 7 7 OUT3 20 20 OUT4 8 OUT5 8 Circuit block diagram 15 Contact output COM 15 (P1, P2) 5 OUT6 18 11 ANALOG OUTPUT 1 23 10 ANALOG OUTPUT

Electric Actuator Miniature Rod Type Miniature Slide table Type

This matches the controller. (2) Check Parallel I /O configuration matches (NPN or PNP). (1) LEPS6J-50 NPN (2) 13 - 3.3 Construction Parts list 5 9 1 6 10 8 11 16 4 15 14 2 3 13 7 12 No.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

4, 2 5, 3 (A, B EA, EB) Bore size Positions C 10 12 10 12 10 11 10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal

58

with rod boot on both sides) ZZ + 2 x strokes (mm) Bore size (mm) 125 140 160 Stroke range (mm) B A AL B C D E F FD FT FX FY FZ J W V KA M G K Up to 1000 15 50 47 143 145 115 32 71 43 19 14 190 100 230 M14 x 1.5 17 27 13 15 15 Up to 1000 15 50 47 157 160 128 32 71 43 19 20 212 112 255 M14 x 1.5 17 27 13 15 15 Up to 1200 15 56 53 177 180 144 38 78.5 42 19 20 236 118 275 M16 x 1.5 20 34 15

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Auto Switch Guide

SMC 7 23 3.4 6.2 3.2 15 11 Most sensitive position 8.5 10-20-56 57 Water Resistant 2-color Indication Type Solid State Switch: Tie-rod Mounting Style D-F5BAL For details about certified products conforming to international standards, visit us at www.smcworld.com.

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

HRX-OM-M090

When the temperature of the circulating fluid is set to lower than 10oC, use a 15% aqueous solution of ethylene glycol. Tap water may freeze in the thermo-chiller, leading to malfunction. 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

LEH_C

+ 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

Ionizer

80 30 30 15 220 180 30 26 26 2 x 5.4 11 11 20 32 22 4.5 High-voltage unit full length: 220 mm High-voltage unit full length: 180 mm 31 (Full length of high-voltage unit and control unit) (Full length of high-voltage unit and control unit plus 62 mm) With bracket How to Order IZS31 180 X210 R Sensor Bar type Without bracket With bracket Note) Nil Bracket Without sensor Autobalance sensor

Vacuum gripper

ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2 ZP B30 J ZPGB30J-7A-X2

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA