Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

VZ3000

Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

Process Valve Series VNA

the case of EZ or TZ, the length is longer by 10 mm.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Floating Joint

53.1 57.7 63.5 69.3 75 86.5 DA00151 24 M161.5 10 27.7 DA00150 DA00153 24 27 M162 M181.5 10 11 27.7 31.2 Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

RZQ

Thread type Nil TN TF Rc NPT First-stage stroke Refer to "Standard Stroke" on page 10-10-3. Full stroke Refer to "Standard Stroke" on page 10-10-3. G Full stroke is 75 mm or less in the case of RZQB (through-hole type). Mounting Bracket Part No.

SL5200

40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

ChemicalThermo-con

Applicable Fluid Examples Applications Chemical Operating temperature range Chemical Operating temperature range Cleaning equipment 50 to 140F (10 to 60C) 50 to 140F (10 to 60C) Deionized water Ammonia hydrogen peroxide solution Plating equipment 50 to 104F (10 to 40C) 50 to 140F (10 to 60C) Hydrofluoric acid Sodium hydroxide 50 to 122F (10 to 50C) 50 to 140F (10 to 60C) Sulfuric acid (except

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

C92

2 (On different faces or same face) 15 130 125 120 95 70 25 75 D-F5NTL 1 10 D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 70 25 75 10 1 1.12-14

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Types with 10, 16, or 20 pins are also available. See p.1.10-67 for details.

Round Type Hydraulic Cylinder

(n 2) 2 D-C7 D-C80 D-H7C D-C73C D-C80C D-G5/K59 D-G5W/K59W D-G59F/G5BA/G5NT D-B5/B64 50 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 50 D(n = 2, 4, 6) Note 3) 15 + 50 (n 2) 2 65 + 50 (n 2) (n = 2, 3, 4, 5) 10 15 65 15 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) 10 15 75 (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 20 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 15 20 Note 3) When n is

Multi-channel Digital Sensor Monitor ( compatible)

Refer to the table for each pressure specification (page 110) Display/set pressure range Display/min. setting unit Power supply Used as switch output device 12 to 24 VDC (10%), and voltage ripple (p-p) 10% at max. voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Electric spec. Power supply voltage 12 to 24 VDC (10%), and ripple (p-p) 10% at max.

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA05 10 10 Electronic gear numerator *3. PA06 1 262144 (Position control mode) 5400 Electronic gear denominator *3.

Title not found

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Modular Type Regulators Series AR

) Note 10) Note 10) Note 10) Note 10) Note 10) Note 6) The only difference from the standard specifications is the adjusting spring for the regulator.

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

Modular Type Regulator Series AR

Applicable model Accessory AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Bracket assembly Note 1) AR50P-270AS Note 5) AR50P-270AS Note 5) Note 6) Note 6) AR10P-260S AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 Round 1MPa Note