Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke adjusting range (One side) 0 to 10 mm 0 to 15 mm [Built-in adjusting bolts (2 pcs.)]

MHZ2/MHZJ2

Dimension table Unit: mm Model A B D2 E D1 -0.016 -0.043 12f8 15 7 11 52.8 MHZ2-10 -0.016 -0.043 16f8 20 10 15 58.7 MHZ2-16 -0.020 -0.053 20f8 22 12 19 70.5 MHZ2-20 -0.020 -0.053 25f8 25 15 24 82.9 MHZ2-25 Other dimensions and specifications correspond to the standard type.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

Cylinder with Lock Series CLS

4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 9.5 7.5 13.5 12.5 7 5 3.5 1.5 7.5 5.5 10 8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 Figures in the table above are used as a reference when mounting the auto switches for stroke end detection.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

hole dimension) 1.5 VQ0 94 108.5 [Single, Double (Latching)] 113 [Double (Double solenoid), Dual 3 port valve] 122 (3 position) VQ4 34 10 47 4.6 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (108.5) 10 A B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 10.

Rotary Cylinder Series MRQ

(mm) (mm) Stroke 5 10 15 15 25 30 40 50 75 100 Y 12.5 15 15 15 20 15 17.5 17.5 25 30 DQ 20 20 20 20 30 E 68 68 70.5 70.5 70.5 68 70.5 75.5 80.5 83 349 Series MRQ With Auto Switch Refer to pages 761 to 809 concerning further information on specifications of the auto switch single body.

Air cylinder

4 0 4 0 10.5 7 10 6.5 40 10 10 14 14 7.5 7.5 7.5 7.5 7 7 4 4 4 4 10.5 10.5 10 10 50 11.5 10.5 15.5 14.5 9 8 9 8 8.5 7.5 5.5 4.5 5.5 4.5 12 11 11.5 10.5 63 12.5 11.5 16.5 15.5 10 9 10 9 9.5 8.5 6.5 5.5 6.5 5.5 13 12 12.5 11.5 80 17.5 14 21.5 18 15 11.5 15 11.5 14.5 11 11.5 8 11.5 8 18 14.5 17.5 14 100 17.5 15 21.5 19 15 12.5 15 12.5 14.5 12 11.5 9 11.5 9 18 15.5 17.5 15 (mm) Auto switch model

Pin Clamp Cylinders

(Cylinder stroke) 0 0.05 d 10 (Clamp stroke) Q Q SR Port side K B 120 C Mounting surface 8 to 10 26 12 48 67 10.5 (9) Port side C Mounting surface 14.5 15.5 30 Diamond cut shape (Guide pin dia.: 9.5 or more) Mounting surface 770.1 D 300.05 20 15 15 Port side (183) Clamp arm position 30 7.5 10.5 A Same as the port side B 90 from the port side C 180 from the port side D 270 from the port side

MY1

Therefore, check the allowable load for the selected conditions. 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130

Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

High Power Cylinder Series RHC

(10) AS4001F (16) AS320 (13) AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS420 (74) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000

Vacuum Unit Ejector / Vacuum Pump System

In such cases, the entire silencer case assembly needs to be replaced. 4 For nozzle size 07, 10 6 For nozzle size 12, 15 8.2.4.

Industrial Filters

13 18 10 13 18 12 15 20 Internal capacity (L) 14 21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

0 -0.074 0 -0.087 40 45 66 R0.5 23 10 60 44 18 25 14 17.5 M8 x 1.25 18 10 20 M14 x 1.5 30 1/4 37 114 11 17 15 50 50 73 R0.5 M10 x 1.5 25 9 73 53 20 28 17 17 20 10 22 M16 x 1.5 30 3/8 43 116 11 19 15 63 55 80 R0.5 M10 x 1.5 28 8 80 60 22.4 30 17 17 22 10 25 M18 x 1.5 30 3/8 47 120 11 21 15 80 65 90 R2.5 M12 x 1.75 32 8 100 75 28 32 22 20 26 13 29 M22 x 1.5 35 1/2 57 132 11 26 25 100 80 100

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20 MY-S25 MY-S32 61 67 81 100 120 142 172 26

Vacuum Ejector Series ZM

10 10 0 0 0 0 15 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Flow rate l/min (ANR) Supply pressure (MPa) ZM07H Exhaust Characteristics Flow Characteristics 90 90 40 80 80 Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 70 Suction flow rate 30 60 60 Air consumption 50 50 20 40 40 30 30 10 20 20 10 10 0 0 0 0 30 20 25 15 10 5 0.0

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting