ASR

Note 3) Not used for 10 and 12. 15-16-9 10 Series ASR/ASQ Flow Characteristics Pressure Valve: Series ASR (Inlet pressure: 0.5 MPa) ASR430F ASR530F ASR630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 12 1000 15 300 4 8 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Station n L1 L2 Station 2 77 49 Station 20 419 391 3 96 68 4 115 87 5 134 106 6 153 125 7 172 144 8 191 163 9 210 182 10 229 201 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 66 Series SYJ7000 Flat Ribbon Cable Manifold [ ]: AC SS5YJ7-21PStations (-00) Approx. 300 (Lead wire length) 10 L2 L1 4-4.5 (For mounting) + 16.5 + + 1/8 (A, B port

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

218 210 to 420 Max. speed[mm/s] *1 *3 400 200 100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line

VCA

S = 27mm 10. S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

In-line Air Filter

10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30

KT10

) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.

76

The amount of moisture is 3.0 g/m3. 10.

Angle Seat Valve

Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C./N.O. 1/4 to 50A 10 to 12 N.C.

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

(Atmospheric conditions) 1.3 x 10-7 Pam3/sec Leakage:1.3 x 10-7 Pam3/sec or less (at normal temperatures, excluding gas permeation) 0.1 MX Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 10-7 Particulate generation [particles/cycle] Standard value Note 1) The data indicates the leakage measured in

HRX-OM-W004

400 HIPRS ALARM REF TEMP READY HBAND KEY LOCK AMB HITEMP / Setting of circulating fluid discharge pressure rise alarm / / / / Setting of ambient temperature lower limit alarm*1 Ambient temperature *1 212 TEMP READY Band width Lower Limit 050 EASY mode ON -10 100 HIPRS WAKE EASY MODE AMB TEMP READY LBAND AMB LOTEMP Detection time of circulating fluid discharge pressure rise alarm

Rodless Cylinder for Vacuum Series CYV ø15, ø32

MTS Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa. CY Note 3) This data is considered typical but not guaranteed. 10-9 MG Leakage test result CX 10-10 0 5 10 DTime [min] -X e e a a l l k k w w a a 2 o o g g 1 O-ring seals separate vacuum and atmosphere.

CYV

Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

RSH

40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-4 Heavy Duty Stopper Cylinder Series RSH Operation Guide Precautions qAdjustment of shock absorber capacity (50 to 80) When a transported object is to stop softly loosen the set screw (M4) on the stopper section, turn the adjustment dial to set the energy absorption value for

K35-OMW0031

Cal Pos set to 20mA 7 Rod friction count 10%-30% Cal Pos set to 4mA 30%-50% 50%-70% 125 8 Movement area 9 Cal select status 70%-90% 160 10 Cal type 90%-95% 200 more than 95% 250 total 320 400 ON Setting error OFF (Default) It depends on DIP-SW or Rotary-SW Retracted end Automatic Calibration position Manual Stay 0 (Slow) 1 2 3 4 5 6 7 8 9 (Fast) (B) 1 E-Stop off OFF (Default) 2 Calibration

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Regulator for 2 MPa ARX 20

500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure characteristics

Mechanically Jointed Rodless Cylinder Series MY1

High precision guide Note 1) 10 is available with central piping only.