Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

70pvvna

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Miniature Regulator Series ARJ310

With One-touch fitting Thread type Applicable tube outside diameter (OUT) Metric size 1/8 (male thread), M5 x 0.8 (female thread) 01 Port size (IN) R, Rc NPT Nil N ARJ310-01 4mm 6mm 04 06 Accessories None Bracket Pressure gauge Nil B G Inch size ARJ310F-N01 5/32" 1/4" 03 07 Model Port size IN Note) Model OUT Rc 1/8 NPT 1/8 4 One-touch fitting 6 One-touch fitting 5/32 One-touch fitting 1/4

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

Air cooled Thermo-con (Compact type)

Request message to write (from master) 02 31 30 57 53 56 31 30 30 32 30 30 03 51 Address BCC data End code Start code Request to write Numerical data Identification code Response message from the product 02 31 30 06 03 06 Affirmation code Start code Address End code BCC data Code Symbol/Data ASCII code Start code STX 02H Address 10 31H 30H Required content W (write) 57H Identifier SV1

90

-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.

ALF400 to 900, ALT-5/-9

04 06 10 12 14 20 4 1 With bracket ALF400 to 600 B 8 3 Body size 2 1 F.R.L. 40 50 60 80 90 2 1 4 3 4 3 1 AV 1 1 1 4 1 2 1 1 2 2 1 Line pressure (MPa) AU 2 Thread type AF Nil N F Rc NPT G AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note 1) Tank pressure is

Air cooled Thermo-con (Compact type)

Request message to write (from master) 02 31 30 57 53 56 31 30 30 32 30 30 03 51 Numerical data Address BCC data End code Request to write Identification code Start code Response message from the product 02 31 30 06 03 06 Address End code BCC data Affirmation code Start code Code Symbol/Data ASCII code Start code STX 02H Address 10 31H 30H Required content W (write) 57H Identifier SV1

HAA

8 B 3 8 B 1 2 Thermometer for outlet air temp.

Gun Type Ionizer

Power supply cable (For 24 VDC wiring) N None Symbol Type 01 Standard nozzle 02 Bypass nozzle*3 *1 The AC adapter body and the power supply cable (For AC adapter) come as a set.

Size: 3/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: None, Option 1: Non-relieving, Option 2: -

PA3145/3165/3185

Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 5-5-25 2 Flow Characteristics/Weight Flow characteristics Port size 1 2 (IN OUT) 2 3 (OUT EXH) Weight (kg) Valve model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 10 28 0.36 7.6 26 0.35 7.0 1 (IN) , 2 (OUT) 3 (EXH) 3 8 1 2 3 4 VPA3145 3 4 1.0 Port size

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

) Manual override 2NPTF (P port) 2NPTF (P port) 10 60.9(GZ:61.6) [62.6] 59.9(GZ:60.6) [61.6] 10 78.8(GZ:80.2) [82.2] 91.7(GZ:93.1) [95.1] 35 B B B B B 19 P 40 39 P 35 A A A A A 19 2 MAX.5 10 10 (Lead wire length) G : About 300 H : About 600 24.5 (Pitch) P=10.5 10.5 (Mounting holes) L2 4 L1 (Non-locking) Manual override A A 20 48.5 [55] 15 B B 5 36.1 1.5 29.5 A A (Pitch) P=10.5 17.5 2n-One-touch

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Booster Relay Series IL100

How to Order IL 100 02 Suffix Booster relay Nil Standard Thread type T High temperature (5 to 100C) Nil Rc N NPT* L Low temperature (30 to 60C) F G* * Semi-standard S Copper-free ST Copper-free/ High temperature (5 to 100C) Port size 02 1/4 03 3/8 SL Copper-free/ Low temperature (30 to 60C) Accessories Nil None B With bracket Standard Specifications Flow-rate Characteristics Supply pressure

Air Cooled Aftercooler Series HAA 1

C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3