NCA1

A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 9/32 1.43 1 1.71 7.44 2.36 1.30 9.44 5.56 200 (2") 5/8 7/16-20 3/4 2.60 1 1/8 3/

NCA1

B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in) MM KK A AA B BA C D DD E EA EE G J R TN WF XT Y LF P A PB PC 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1.43 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200 (2") 5/8 7/16-20 3/4 2.6 1 1/8 1

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

A B 2 position single 2 position double PR R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no. : P3270157 Adapter B Ejector indication Nozzle dia./1.8, 2.0 mm ZR1-W 1 18 20 2 1 1 1 1 1 (Mounting hole) Silencer Adapter E Spacer B (Mounting hole) Rc 1/8 V port (Vacuum port) 1 M5 PD port (Vacuum release pressure port) Remove tha plug from PD port at external release.

High Purity Fluoropolymer

3/4" x 5/8" Class 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B 15A 20A 25A Note 1) For each piping diameter for each body size, the second and later numbers or symbols indicate reducing.

15

Description 2 Ring 1 1 1 2 Ring 1 3 Hub (Motor side) 1 1 1 1 1 1 3 Hub (Motor side) 1 1 4 Hexagon socket thin head cap screw 1 1 1 1 1 1 4 Hexagon socket thin head cap screw 1 1 5 Hexagon socket head cap screw 4 4 4 5 Hexagon socket head cap screw 4 840 LEJS Series Auto Switch Mounting Auto Switch Mounting Position (C) B (Table center) LEF LEJ LEL LEM LEY LES A LEPY LEPS [mm] LER

CRBU

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer A port B port Chamfer A port Chamfer R R A port B port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

VZ5000

4(A), 2(B) port Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-40 VV5Z5-41 VV5Z5-42-C6 VV5Z5-42-C8 1/8 1/8 C6 C8 0.59 0.55 0.52 0.53 0.23 0.30 0.23 0.26 2.5 2.2 2.2 2.2 0.51 0.50 0.38 0.46 0.28 0.30 0.32 0.24 2.1 2.0 1.5 1.9 1/4 1/4 1/4 1/4 VZ54 Note) Value at

New

Test sampleVXFA21A (Port size 3/4) VXFA22A (Port size 1) VXFA23A (Port size 1 1/2)VXFA24A (Port size 2) VXFA25A, B (Port size 2 1/2) VXFA26A, B, C, D (Port size 3) VXFA27B (Port size 3 1/2) VXFA28B (Port size 4) Test sampleVXF21A (Port size 3/4) VXF22A (Port size 1) VXF23A (Port size 1 1/2)VXF24A (Port size 2) VXF25A, B (Port size 2 1/2)VXF26A, B, C, D (Port size 3) VXF27B (Port size 3 1/

Fieldbus system PROFINET compatible SI Unit

0: No error, 1: Short circuit 5 Valve 26, 27 diagnostics 0: No error, 1: Short circuit 6 Valve 28, 29 diagnostics 0: No error, 1: Short circuit 7 Valve 30, 31 diagnostics 0: No error, 1: Short circuit 31 No.EX-OMW0011-B 5.1.2.

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

FILTER REGULATOR

1/8 M42X1.5 M42X1.5 38.4 38.4 AW40-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 AW40-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 1/8 44.3 AW60-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions Model Q S T U AW20-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30-B 41 40 45.8 6.5 8 53 2.3

MGP

Dimensions (mm) Dimensions (mm) 1 in = 25.4 mm 1 in = 25.4 mm M5 x 0.8 Relief port (Vacuum port) FB B + Stroke 5 10 A + Stroke (mm) FB A B Bore size (mm) B + Stroke FB 50mm stroke or less 66 67.5 109 109 117.5 117.5 121 141 51mm stroke or more 97.5 99 114 114 129 129 148 166 A + Stroke 20 25 32 40 50 63 80 100 19 20 22 22 23 23 24 29 Other dimensions are identical to the standard type. 66

FILTER REGULATOR

1/43/8 1/8 38.4 AW40K-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 1/8 44.3 38.4 80.8 75.7 AW40K-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 AW60K-B 95 234.1 175.5 47.5 30 47.5 3.2 28 42.5 80.8 42.5 1 1/8 Optional Bracket mount dimensions Panel mount dimensions Model Q S T U AW20K-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30K-B 41 40 45.8 6.5 8 53

ZP3

A12 M12 x 1 A B F Model A B C2 D E F Vacuum inlet direction q Pad dia.

Vacuum Unit

Voltage output type: 1 to 5 V Output impedance: Approx. 1 k Pilot valve for supply Pilot valve for supply + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k B C A B C A Coil + + Max. 80 mA Residual voltage: 2 V or less Max. 28 V, 80 mA Residual voltage: 2 V or less pe: 1 to 5 V e: Approx. 1 k Black For supply valve (,+)

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 3) Note 4) Note 4) Port size Note 1) 1 station weight (g) 5 stations

JXCx-OMT0061CN

5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 A-3 (8) (1) (2 ) (B 1) (14.2) A1 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

packaging equivalent to Class M3.5 Standard packaging equivalent to Class M5.5 Symbol H L B R Type Connector Elbow Branch tee Run tee Thread type Symbol Nil N Type R, Rc NPT Piping type Symbol M F Type Male Female Size combination Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 Port size A A B A B C D A B C D A B C A B C A* B* C* Applicable tubing size (mm) 4 x 3 3 x 2 Size Applicable