Model: 21, Orifice Diameter: 2 (3 mm), Valve/Body Configuration: 1 (N.C. for Manifold), Solenoid Valve Option: V (Aluminum Body, FKM Seal, Class B, Oil-free), Suffix: Standard, Manifold Designation: 00 (Aluminum Base Material), Voltage: 5 (24VDC), Lead Wire: DL (DIN Connector and Light)

Bore Size: 63 (2 1/2"), Stroke, Inch: 12, Stroke, Hundredths of an Inch: 00

Pad Diameter: 63 (ø63), Pad Form: BM (Bellows Type w/Groove), Pad Material: S (Silicone Rubber, White), Mounting: A (Metric, Male Thread, M8), Ejector/Nozzle Size: 00 (w/o Ejector)

.: 00 (Tube Connection Same Dia. as Tube), Thread Material/Surface Treatment: N (Brass + Electroless Nickel Plated), Sealant: None, Release Button: 1 (Oval Type)

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

Function: 1 (2 Position Single), Body Option: 00 (Base Mounted Plug-in), Pilot: Internal Pilot, Voltage: 3 (110~120VAC 50/60HZ), Lead Wire: F (Plug-in), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: P02 (Base Mounted w/Sub-plate, Plug-in Compact 1/4), Thread: N (NPT)

Function: 1 (2 Position Single), Body Option: 00 (Plug-in Type Sub-plate, Standard), Pilot Type: Internal Pilot, Voltage: 1 (100VAC 50/60HZ), Lead Wire: F (Plug-in Conduit w/Terminal), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 06 (Sub-plate Plug-in Terminal 3/4, Non Plug-in Standard 3/4), Thread: N (NPT)

Body Size: 60, Type: B (Regulator Type), Pipe Thread: R (Rc), Port Size: 00 (without Attachments), Normally Open, Closed: D (N.O., Normally Open, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: G (Non-locking Push Type), Made to Order Option: X102 (Hub and Relief Valve only)

A maximum effective area of 670mm² (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

Size: B (Base Mounted), Pilot: 0 (Internal Pilot), Power Source, Command Signal: 7 (12V, 4~20mA), Port Size: 00 (w/o Sub-plate), Thread: Rc, Option: G (Pressure Gauge)

Union "Y"), Tube Size: 06 (Ø6), Port Size/Applicable Tube: 00 (Same Dia. Tube)

Body Size: 60, Type: B (Regulator Type), Pipe Thread: N (NPT), Port Size: 00 (without Attachments), Normally Open, Closed: C (N.C., Normally Closed), Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (EXA1/ITV: Units Selection Function), Manual Override: E (Push-turn Locking Type, Manual), Made to Order Option: X102 (Hub and Relief Valve only

Model: H (Male Connector/Straight Union), Applicable Tubing OD: 08 (ø8), Port Size/Applicable Tubing: 00 (Same Diameter Tube), Sealant: No Sealant for Threaded Portion

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

ZP3

Form w 1 Material e r Vacuum inlet Connection thread N S U F GN GS HS 04 06 08 UM 02 10.8 7 2 1.4 KQ2H02-M5N C2 04 14.7 8 4 2.5 KQ2H04-M5N ZP3 Y B3 02 10.8 7 2 1.4 KQ2H02-M5N 04 14.7 8 4 2.5 KQ2H04-M5N 06 10 6 KQ2H06-M5N Vacuum inlet: One-touch fitting 10 13 16 Applicable tubing O.D.

Speed Controller with Indicator

, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

Speed Controller with One-touch Fitting

-04 1/2 Note 3) Note 1) Without sealant type can be selected as a standard option.