(in) D (D1): 1/4, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

(in) D (D1): 1/4, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

(in) D (D1): 1/8, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Size of Body: 1

(mm) D (D1): 4, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 1

(mm) D (D1): 6, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

(mm) D (D1): 6, Connection Screw Type M (M1): Rc, Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

(mm) D (D1): 4, Connection Screw Type M (M1): R, Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 1

(in) D (D1): 1/4, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

(in) D (D1): 1/4, Connection Screw Type M (M1): Rc, Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

(in) D (D1): 1/4, Connection Screw Type M (M1): NPT (Male thread), Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

(in) D (D1): 1/8, Connection Screw Type M (M1): NPT (Female thread), Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 1

(in) D (D1): 1/4, Connection Screw Type M (M1): NPT (Female thread), Connection Screw Nominal M (M1): 1/8B(6A), Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

NCA1

A AA B BA C D DD E EA EE F FB G J R TF UF W WF Y LF P ZB 150 (1.5") 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 0.551 1/4-28 2 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 5/8 1 1.71 3 5/8 2.36 4 3/4 200 (2") 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 0.551 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 5/8 1 1.71 3 5/8 2.4 4 3/4 250 (2.5") 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 3/8 3/8 1.3

NCA1

4 2.02 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 5/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 1 1.71 2.36 4 3/4 3 5/8 MB1 200 (2") 5/8 2 1/2 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 5/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 1 1.71 2.4 4 3/4 3 5/8 250 (2.5") 5/8 3 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 9/16 0 3/8 3/8 5/8 3/8 1.3 1.06 2.19 3 7/8 4 5/8 1 1.75 2.48 4 7/8 3 3/4 325 (3.25") 1 3 3/4 3/4-16 1 1/8 3.9 1 1

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 4 VSA440 3 4 , 1 2 3 4 1 2 standard 1 2 3 4 , Piping specifications/Side ported, bottom ported Type V Port size Rc EXH port Valve size Applicable valve Manifold base size Rc P EA, EB A, B , 1 4 3 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 1 2 1 2 VSA420 Common EXH , 3 8 1 2 , 1 4 3 8 , 3 8 1 2 , 3 8 1 2 3 8 standard

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Refer to section 3.10. 3 4 3.

HRX-OM-X037

3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and maintenance space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical wiring . 3-11 3.3.3 Preparation and wiring of power supply cable

NCM

Note 3) Stainless steel rod standard on 3/4" and 7/8".

HRX-OM-S004

2.3 Function of Parts . 2-4 2.4 Operation display panel . 2-5 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and Maintenance Space . 3-8 3.3 Installation . 3-9 3.3.1 Installation . 3-9 3.3.2 Electrical

HRX-OM-Y098

Transport. 3-1 3.1.1 Transportation using forklift and hanging . 3-2 3.1.2 Transportation using casters . 3-3 3.2 Installation . 3-4 3.2.1 Environment . 3-4 3.2.2 Location . 3-6 3.2.3 Installation and maintenance space . 3-7 3.3 Installation . 3-8 3.3.1 Installation . 3-8 3.3.2 Electrical wiring .3-10 3.3.3 Preparation and wiring of power supply cable .3-12 3.3.4 Contact input/output communication