VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

How to Order CP96S B W J 32 100 C CP96SD B W J S 32 100 M9BW C With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B Basic L Axial foot F Rod ange G Head ange C Single clevis D Double clevis Bore size Nil 2 S 1 3 3 n n 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Mounting brackets are shipped together, but not assembled.

Digital Flow Switch (Remote type monitor unit)

B: Contents revised in several places. C: Contents revised in several places. D: Contents revised in several places. E: Contents revised in several places. F: Contents revised in several places. G: Contents revised in several places. [July 2018] H: Contents revised in several places.

XLA Series

B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

CEx-OMQ0013

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

Fieldbus system EtherNet/IP TM compatible SI Unit

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible (8)EtherNet/IPTM communication cable PCA-1446566: Cable with M12 connector

Title not found

Torque Gravity Due to Acceleration US System (g) = 32.2 feet per sec. per sec.

Title not found

Torque Gravity Due to Acceleration US System (g) = 32.2 feet per sec. per sec.

EXxx-OMN0029CN

8370 JIS B 8361 JIS B 9960-1 -(1 ) JIS B 8433 *2) 1. 2. 3. 1. 2. 3. 4

Sine Rodless Cylinder Series REA

Stop 5 Series REA Sine Rodless Cylinder Dimensions (mm) REA 25, 32, 40 1in = 25.4mm Effective thread depth J L 0 0.1 NN G 4-MM H G B 2Port size I X D NB NB T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15

High Speed Pilot Operated

D-G

VHS20/30/40/50

G H F SMC P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

IDX-OM-W095

A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series 11-3 IDX-OM-W095 T 11.5 IDFC60/70-23-T A B AC 230V50Hz CM OLR FM MC MC2 PRS ILS THR C01 C11 TB CN TDR GFCI EDV PE BK WH IDFC80/90-20-T GR SY A B AC 230V50Hz BU BR YE OR G/Y / IDFC60/70/80/90 Series 11-4 IDX-OM-W095 V 12 V V 12.1 0 () 12.2 ( 10m) (12mm)

IDX-OM-W034

SIZE PORT SIZE B G H D E WITH LAMP SWITCH DRAFT AIR OUTLET THERMOMETER EVAPORATION BALL VALVE BLOCK TERMINAL AUTO DRAIN F C VENTILATION VENTILATION [DIA.911]) (WIRE DIA.0.4 ENTRY HOLE POWER CORD DRAIN TUBE LENGTH39.4[1000] J N M K L P [4XDIA.13] 4XDIA.0.5 (SIZE OF RECOMMENDED BOLTM10) A B C D E F G H J K L M N P Q R Model Port Size Dimensions (inch [mm] ) 31.5 [800] 34.2 [868] IDFB55E 2 1.4

IDX-OM-W035

G D E F C (35.4[900]) J M N P L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775] [600] 3.3 11.4 24.5 5.3 15.9 27.5 3.7 1.8 1 0.5 12.4 13.4 [290] [623] [134] [405] [698] [93] [46] [25] [13] [314] [85] [340] 26.8 33.7 IDFB37E 1/2 [855] [680] R IDFB55E/75E Q A B H G E D F C (0.4 (39.4[1000]) J L K M N P 4x0..5 [4x13

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Description Panel mounting adapter A, B ZS-22-E Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C With mounting bracket Panel mounting adapter With waterproof seal, mounting screw With waterproof seal, mounting screw Panel Front protective cover PF2D30 Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter Panel mounting adapter B Mounting bracket

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

G SMC H F P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH.