XL-OMV0002

AS568-227 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** AS568-233V B2401-V85V AS568-349V B2401-G155V AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** 1)(FKM:No.1349-80)(**) AS568-025-XN1 2)4 3) FKM for ULTIC EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

High Vacuum L Type Valve

179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

XL-OMY0003

SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

LEH_C

. / LEHF 3.1 LEHF10 LEHF20 LEHF32 LEHF40 16 24 32 40 /(mm) 32 48 64 80 (mm) 40/15 50/15 70/16 70/16 (N) 40100 1) 3) 37 1128 48120 72180 /(mm/s) 2)3) 580 /520 5100 /530 + () (mm) 4) 0.05 (mm) 5) 0.05 /(mm) 6) 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () (g) 370 750 1970 2500 340 610 1625 1980 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% / (W) 8) 11/7 28/15 34

High performance type Step Motor Controller (Servo/24 VDC)

Controller and its peripheral devices /Specific product precautions 69 14.1 Design and selection 69 14.2 Handling 69 14.3 Installation 70 14.4 Wiring 70 14.5 Power supply 71 14.6 Ground 71 14.7 Maintenance and inspection 71 15. Troubleshooting 72 3 No.JXC-OMY0002-A JXC5H/6H Controller 1.

XLF Series

170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Electric actuators/Common precautions . 66 14.1 Design and selection . 66 14.2 Mounting . 67 14.3 Precautions for Use . 68 14.4 Operating environment . 69 14.5 Maintenance . 70 14.6 Precautions for electric actuator with lock . 70 15.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

FILTER REGULATOR

2.3 35.5 42.5 21 7 AW40-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60-B 70 66 65.8 11 13 90 3.2 Dimension:B of auto-drain and optional bowl assembly Optional D C Standard 8 6 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 C 6C 2 8 AW20-B 87.4 87.6 87.6 87.6 91.4 93.9 91.4 91.4 91.4 104.9 104.6 104.9 104.9 104.9 190.8 188.8 156.8 273.9 188.9 186.9 156.8 AW30-B 117.6 115 137.6 121.9 122.1

XLG Series

183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11 XL*-OMI0010-E 5.

MHZ2/MHZJ2

Weight table Unit: g End boss type (symbol) Model W K M E MHZJ2-10 70 70 70 70 MHZJ2-16 165 165 165 165 MHZJ2-20 290 290 290 290 MHZJ2-25 525 525 525 525 19 Series MHZ2/MHZJ2 Auto Switch Common Specifications Auto Switch Common Specifications Solid state switch Type 1ms or less Operating time 1000m/s Impact resistance 50M or more at 500VDC (between lead wire and case) Insulation resistance

Compact Vacuum Ejector Series ZA

78 57.6 70 80 88 Approx. 3000 80 90 98 9.6 5.8 5 Suction filter 10 12 14 n x 10 M5 both sides common air pressure supply (P) port P P Note 1) The above dimensions are for ZZA103-00.

FILTER REGULATOR

2.3 35.5 42.5 21 7 AW40K-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60K-B 70 66 65.8 11 13 90 3.2 Dimension:B of auto-drain and optional bowl assembly Optional C D Standard 8 6 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 C 6C 2 8 AW20K-B 87.4 87.6 87.6 87.6 91.4 93.9 91.4 91.4 91.4 104.9 104.6 104.9 104.9 104.9 275.8 190.8 188.8 156.8 273.9 188.9 186.9 156.8 AW30K-B 117.6 115 137.6

Air Filter

147.1 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AF40-06-D 3/4 75 149.1 27 35.5 38.4 40 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 AF50-D 3/4, 1 90 220.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95 234.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 273.9 Semi-standard specifications Metal bowl with PC/PA bowl Metal bowl level gauge With element Model With With With

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Do not use it in a line that is kept pressurized because it could cause the body to break. 1106 Air Suction Filter Series ZFA Dimensions: ZFA 100 200 Single unit Bracket ZA ZX ZR Cover opened-up dimensions 70 Element extracted dimensions 55 ZM ZMA ZQ 2 x 4.5 ZH ZU 2 x Port size ZL Note) The above diagram is for ZFA200. The bracket location shows L side.

Air Slide Table Series MXJ

5 10 15 20 25 30 0 20 10 30 50 70 40 60 Load (N) Load (N) Load (N) 176 Air Slide Table Series MXJ Dimensions Note) In the MXJ4, there is no change in total length by stroke.

ITV

L-bracket 2.3 30 36 52 40 22 Straight type 3 m Cable connector TM-4DSX3HG4 50 Right angle type 3 m 4 x 5.5 8 x 4.5 4 x 7 22 TM-4DLX3HG4 50 36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 14-8-15 16 Series ITV1000/2000/3000 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.

PF2A/PF2W

17.0 l/min 1.7 to 17.0 l/min 2 to 16 l/min 0.1 l/min 0.1 l/pulse 3% F .S. or less 2% F .S. or less 0.35 to 4.5 l/min 0.35 to 4.5 l/min 0.5 to 4 l/min 0.05 l/min 0.05 l/pulse 3.5 to 45 l/min 3.5 to 45 l/min 5 to 40 l/min 0.5 l/min 0.5 l/pulse 7 to 110 l/min 7 to 110 l/min 10 to 100 l/min 1 l/min 1 l/pulse IF Data 5% F .S. or less 3% F .S. or less 5% F .S. or less (0 to 50C, based on 25C) 70

VCS

107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.