Profi-E

M ai nt enance and i nspect i on Turn of f t he pow er suppl y, st op t he suppl i ed ai r, exhaust t he resi dual com pressed ai r and veri f y t he rel ease of ai r bef ore perf orm i ng m ai nt enance. Forei gn m at t er caught i n t he i nl et of pi pi ng or exhaust m ay i nt erf ere w i t h norm al operat i on. Peri odi c cl eani ng i s necessary.

Miniature Regulator Series ARJ210

4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette Aluminum alloy Brass Brass POM Brass Brass Brass Brass Steel wire Stainless steel Steel band NBR NBR SS Steel band POM, Stainless steel !

I

How To Order Manifold Base NvvsFs<2o-H6S(T;-oo. . i r -007 serias vFsooo Manifoldl ;rY't5"r,on" Itanilold spsciticaliols+ : 1010 siations Appllcable itodel:NW5F5-2O R ' Series NVFSOO Construction,/Parts List Sngle Solenoid Symbol 3 Posiiion Cloced Center Main Parts No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

3 r q e !2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

JIS B2401-1A-P85 NBR I.D. 84.6 x 5.7 O-ring r JIS B2401-4D-P85 FPM JIS B2401-1A-P11 NBR u !

Series M Miniature Fittings M3, R(PT) 1/8, M5

32 to 140F (5 to 60C) Ambient and fluid temperature Accepts Many Types of Plastic Tubing 1 8 M3, M5, R(PT) Port size JIS B 0209 Class 2 (Metric coarse thread), JIS B 0203 (Taper pipe thread) Thread Hose nipple and hose elbow accepts nylon, soft nylon, and polyurethane tubing.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

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Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

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Com pressed ai r can be dangerous i f an operat or i s unf am i l i ar w i t h i t . Assem bl y, handl i ng or repai r of pneum at i c syst em s shoul d be perf orm ed by t rai ned and experi enced operat ors. D o not servi ce m achi nery / equi pm ent or at t em pt t o rem ove com ponent s unt i l saf et y i s conf i rm ed. A.

KT10

P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

Industrial Filters

ORIENTATION 2 x R DRAIN A B C FQ1 OUT IN OUT R3/4 FN Rp1/4 203 203 R3/4 EB ES DRAIN R3/4 90 90 260 DRAIN FGES type (V-band type) (mm) FGEL type (V-band type) (mm) FGET type (Bolt tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

C95Series

Rod Center Mounting Basic Fool ,r ' flange , trunn~~~ 1 !

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

R.

XLAQ/XLDQ

t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

RZQ

To confirm this distance of an extra travel (overrun) in Graph 3 , Lines q to r can be selected from the following table.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.