High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Proof pressure Operating temperature 0 to 200C Burst Pressure and Heat Resistance Performance 4.0 3.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.0 2.5 Pressure (MPa) 2.0 1.5 1.0 0.5 0 20 40 60 80 100 120 140 160 180 200 Temperature (C) 1/8", 3/16", 1/4", 4,

High Vacuum Angle Valve, XL Series

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

Servo Motor Controller (24 VDC)

It will be necessary to refer to this manual along with the teaching box and the setting software manuals at installation and faultfinding. 6 - 2.2 How to Order The part number construction for this product is as follows: L E C A 6 N Controller Actuator part number Compatible motor (LE to Stroke of the actuator part number) Servo motor24VDC A Example: If LESH16RAJ-50BS-R16N1D is the Number

Step Motor Controller (Servo / 24 VDC)

Compatible Rotating angle: For LER10K-2L-R16N1D, P Step motor (Servo / 24 VDC) specify LER10K-2. Number of step data (Enter from the electric actuator part number LE 6 64 data to stroke/ rotating angle) Parallel I/O type Blank controller *1) BC I/O cable length Note 1) Specified software (LEC-BCW) is required.

XL

The recommended operating temperature ceiling is 200C. Several variations of Chemraz are available and it is advisable to make a selection based upon the particular plasma being used and other conditions, etc. Chemraz is a registered trade mark of Greene, Tweed & Co.

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A LEY32A / LEYG32A LEY32B / LEYG32B LEY32C / LEYG32C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 19 300 15 300 2 40 400 23 400 20 400 3 48 500 27 500 30 500 4 56 600 32 600 40 600 5 64 700 44 700 50 700 6 80 800 54 800 60 800 7 100 900 77 900 70 900 8 150 1000 90 1000 80 1000 9 200 1200 120

Refrigerated Thermo-chiller

There are many types, including perfluoropolyether (PFPE), perfluorocarbon (PFC), hydrofluoropolyether (HFPE), and hydrofluoroether (HFE), but they share the characteristic of high electrical insulation properties, and grades can be selected with appropriate fluidity even at low temperatures, such as 100C, and high temperatures, such as 200C and above.

1.1

There are many types, including perfluoropolyether (PFPE), perfluorocarbon (PFC), hydrofluoropolyether (HFPE), and hydrofluoroether (HFE), but they share the characteristic of high electrical insulation properties, and grades can be selected with appropriate fluidity even at low temperatures, such as 100C, and high temperatures, such as 200C and above.

2

Bending value (Reference) 20 Complies with FDA (Food and Drug Administration) 177-1550 Operating temperature Air, Inert gas: 20 to 200C, Water: 0 to 100C (No freezing) dissolution test.