(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) 3 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC 5 q Ambient

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Regulator Series AR-B 1021Series ARK-B 1021Regulator with Backflow Function How to Order Clean series K F 10 AR B 30 03 BG 1N K F 21 AR B 30 03 BG 1N Copper, fluorine and silicone-free + Low particle generation q r t y w e Regulator Option/Semi-standard: Select one each for a to g.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

JAS

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.

Thermo-chiller

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 3 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 460 VAC 4 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 460 VAC 5 q Ambient temperature

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200/400 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200/400 VAC

Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢, Version A), SI Unit Common, End Plate: 5 (Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), P, E Port Size: ø8 One-touch Fitting, Mounting: D

Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢, Version A), SI Unit Common, End Plate: 5 (Negative Common, 7/8" Connector), I/O Unit Stations: 1 Station, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), P, E Port Size: ø8 One-touch Fitting, Mounting

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Block Assembly: G (Port Location U Side, External Pilot), P,E Port Size: ø8 One-touch Fitting, Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 6 Stations, P,E Port, SUP/EXH Block Assembly: C (Port Location U Side, Internal Pilot, Built-in Silencer), P,E Port Size: N (ø5/16" One-touch Fitting)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 8 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 16 Stations, P,E Port, SUP/EXH Block Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø5/16" One-touch Fitting), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 8 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Block Assembly: U (Port Location U Side, Internal Pilot), P, E Port Size: N (ø3/8" One-touch Fitting)

Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit: WF (PROFINET, Compatible Wireless Base Unit), SI Unit Output, End Plate Type: 4 (SI Unit Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 10 Stations, P,E Port Entry, SUP/EXH Block: E (D Side, 2 to 10 Stations, Internal Pilot, Built-in Silencer), P,E Port Size: N (ø1/2" One-touch Fitting), Mounting: D12 (

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 4 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting),

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting),

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 5 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting),

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 4 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting),

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 1 Station, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 2 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option

Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option