HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations. 

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations. 

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Bracket: F (Bracket)

Size: 02 (1/4), Thread: F (G), Bracket: F (Bracket)

A, B Port Size: 02 (1/4), Thread: F (G), Bracket: F (Bracket)

, Bracket: F (Bracket)

Thread: F (G), Bracket: F (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: F (G), Port Size: 03 (3/8), Output Specification/Temperature Sensor: B (Out 1: PNP, Out 2: Flow Rate: PNP, Temp.: None, Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: F (Instantaneous Flow: gal/min, Accumulated Flow: gal, Temperature: °F), Bracket

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: F (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: F (Instantaneous Flow: gal/min, Accumulated Flow: gal, Temperature

ø 50, ø 63 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Model Selection CKZ3N North American Type Made to Order European Type CKZ3T

mounting Nil F No Cylinder port Nil TF TP Yes NPT G Proximity switch T P W Rc TURCK P&F Arm opening angle 15 30 45 60 75 90 105 120 135 None 15 30 Arm mounting position 45 R Right L Left D 60 Both sides 75 90 105 120 135 Refer to Other Clamp Cylinders on page 12 for 80.

Shot Pin Cylinder CKZP Series ø 57, ø 71

Wiring Diagram (PNP Connection Circuit) Theoretical Output OUT IN [N] Black Bore size Operating direction Operating pressure [MPa] LED: Yellow 0.4 0.5 0.6 0.7 Blue () 57 IN 823 1029 1235 1440 2 3 1 4 OUT 1009 1264 1519 1765 LED: Red (+) Brown White 71 IN 1176 1470 1764 2058 OUT 1578 1970 2362 2761 * Applicable to both TURCK and P&F switches. * Please contact SMC for NPN switches. 2

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: R (Bracket)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: R (Bracket)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Temperature Sensor: T (Temperature Sensor), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: R (Bracket)