VXA21/22 VN Valve option Nil V Standard For vacuum, non-leak LVC LVA Select an option mark in page 17-3-13 by Applicable Fluids Check List for special fluids outside of the standard. LVH LVD Table (1) Port/Orifice Size Table (2) Bracket Part No. Model Orifice size (No.) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) LVQ Part no.
Example) IS10M-6LP 0.1 0.3 0.2 0.4 MPa C q V B Symbol Description Body size 30 40 20 50 60 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V V V V V a 6 Note 1) range Semi-standard + Lubricator Nil 0.5 m V V V V V V V V V V V V V V V Lead wire w V L Z b 3 m 5 m A D Regulator Air filter length + Applicable model A 11 13 15 17 22 B 74 85 93 97 91 C 61 67 72 75 64 D 28 30 36 44 53 Nil
Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW
KKA6P-04 F-1 Rc1 / 2 Rc1 / 2 KKA6S-06F-1 KKA6P-06F-1 Rc3 / 4 Rc3 / 4
IDX-OM-W029 5 5 5-1 3 ON OFF () 3 2 R T 5-2 600mm 1 5-2 5-2 10% 5-2 () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W029 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W029 5 5-2 (IDU55E,IDU75E) 1-1 5-1 OFF IDU22E,55E,75E OFF IDU55E IDU75E () ON IDU55E,75E OFF ON IDU Series 5-2 5 3 IDX-OM-W029 6 6 6-1 IDU22E IDU37E IDU55E IDU75E 3/min (ANR)( 1)
Function: 5 (3 Position Pressure Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: F (Plug-in), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1/2, Non Plug-in
Function: 5 (3 Position Pressure Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: F (Plug-in), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1/2, Non Plug-in
Function: 5 (3 Position Pressure Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: F (Plug-in), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1/2, Non
Function: 5 (3 Position Pressure Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 1 (Direct Manual Override), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: F (Plug-in), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal
Function: 5 (3 Position Pressure Center), Body Option: 1 (Base Mounted Non Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1
Function: 5 (3 Position Pressure Center), Body Option: 1 (Base Mounted Non Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1
Function: 5 (3 Position Pressure Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: F (Plug-in Conduit w/Terminal), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal
Function: 5 (3 Position Pressure Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: F (Plug-in Conduit w/Terminal), Surge Suppressor: None, Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1/2, Non Plug-in
Function: 5 (3 Position Pressure Center), Body Option: 0 (Base Mounted Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: F (Plug-in Conduit w/Terminal), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal
Function: 5 (3 Position Pressure Center), Body Option: 1 (Base Mounted Non Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: P (Non-rotating DIN Connector), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal
Function: 5 (3 Position Pressure Center), Body Option: 1 (Base Mounted Non Plug-in), Direct Manual Override: 0 (Standard), Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side Ported (Or None in Case of w/o Subplate), Port Size: 04 (Sub-plate Plug-in Terminal 1
Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]
Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)
Body Class: 5 (ø16 Orifice), Valve Type: 2 (Double Acting), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT)