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O-P-30:Q; July 1995, 25(RP) Specifications subject to change without notice. Printed in Singapore

Pressure Control Equipment Specifications 0 to 1 MPa Rated pressure range Output Specifications 0.1 to 1 MPa Set pressure range NPN open collector output 1.5 MPa Withstand pressure Max. 30 V, 80 mA Residual voltage 1 V or less 0.01 MPa Set pressure resolution 12 to 24 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage Brown DC (+) 55 mA or less (at

Series VVS410 Manifold Specifications Specifications Applicable valve VS4110/4210/4310/4410 Valve stations Max. 10 stations (Standard) With terminal With interface regulator With stop valve/With flow controls Option Accessory VK VZ Standard Piping Specifications Port size Rc Conduit port size G VF Type Configuration P A, B EA, EB VFR 1 4 , 3 8 1 8 , 1 4 1 4 , 3 8 Common EXH VP4 (Side)

Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

Check valve Pressure switch (for vacuum) Suction filter Variable throttle # P Variable throttle Suction filter 3 port valve is used to generate and stop the vacuum (vacuum release is performed simultaneously). Variable throttle is installed for break flow adjustment.

outlet 2 x Port size SFD LLB AD GD Ball valve Power source code Port size A 460 588 394 484 33 52 70 70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 13

ID P. 14-20-55 AMG Max. air flow rate (m3/min (ANR)) AFF Caution AM Note) Make sure to select a model that has the maximum flow rate line above the obtained intersecting point. With a model that has the maximum flow rate line below the obtained intersecting point, the flow rate will be exceeded, thus leading to a problem such as being unable to satisfy the specifications.

P . 14-20-55 Accessory (Option) AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Applicable model Bracket assembly With cap bolt and spring washer BM51 BM52 BM53 BM54 BM55 BM56 BM57 Caution Be sure to read before handling.Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, pages 14-14-6 to 8 for Precautions on every series,

AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Max. air flow rate (m3/min (ANR)) JIS Symbol P . 14-20-55 Inlet pressure (MPa) Caution Be sure to read before handling.

Flow Characteristics Air pressure 0.7 MPa (Example) To get pressure drop at 0.3 MPa of air pressure, 2000 l/min (ANR) of air flow, and model HAA22, use P = 0.0007 MPa from the table and convert P1 to 0.3 MPa.

(Example) 40D-A3C-4, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 7 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire)

A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm. 32 40 50 63 80 100 90 90 102 102 124 124 164 200 200 141 145 164 Stroke range Bore size (mm) Effective thread length Width across A D Ee11 F G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32

Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10