Air Cylinder NCQ7 Series Compact Cylinder

1 .30 1.42 1.54 250 1 . 1 2 1 . 1 6 '1.18 1 . 2 1 1.24 1 . 2 7 1.30 1 .33 '1.40 1.46 1.53 1 .59 '1.72 1.84 2.O9 2.22 300 1 .58 1.63 1 .66 1 . 7 0 1 . 7 4 1 .78 1.82 1.86 r.95 2.03 2 . 1 2 2.2\ 2.38 2.55 2.84 3.01 400 3.10 3.16 3.20 3.26 3.32 3.44 3.50 \r.o I 3.73 3.97 4.20 4.44 4.67 5 . 1 9 Weight sw Dtype {rbs) 056 0.099 0.104 0 . 1 1 0 0.1 17 0.1230.1300.1340.141 0.154 0 . 1 6 3o.172 0.185

KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm2 Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection thread R Weight g M L2 D2 L1 2-Applicable tubing M L1 M KPT04-01 KPT04-02 KPT06-01 KPT06-02 KPT08-01 KPT08-02 KPT10-02 KPT10-03 KPT12-03 KPT12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 24.5 26.5 27 29

KG

27 27.5 29 29 1 8 Applicable tubing 6 1 4 17 11.4 9.0 12.8 10 20 Connection thread 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 27 32 30 33 32 34.5 8 21.6 14.9 18.5 15.2 12 23 Applicable tubing 21.6 14.9 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 22 20.9 17 28.5 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101

IDX-OM-M050

1 1 . 2 Options of product . 1 2 1. 2. 1 Anti-corrosive treated copper tube (option C) . 1 2 1. 2. 2 Medium pressure type (option K) . 1 2 1. 2. 3 Metal name plate (option P) . 1 2 1. 2. 4 Ground fault circuit interrupter (option R) . 1 2 1. 2. 5 Timer type solenoid valve with auto drain (option V) . 1 2 1. 2. 6 Ventilation direction . 1 2 1 . 3 Name and function of parts . 1 3 Chapter 2

Series AK1000

) tGauge port (Outlet) 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 2) Other range available.

IDX-OM-N030

Name and Function of Parts 1 . 1 Part number of product .1 1 1 . 2 Options of product.1 2 1. 2. 1 Anti-corrosive treated copper tube (option C) .1 2 1. 2. 2 Medium pressure type (option K) .1 2 1. 2. 3 Ground fault circuit interrupter (option R) .1 2 1. 2. 4 Timer type solenoid valve with auto drain (option V) .1 2 1 . 3 Name and function of parts .1 3 Chapter 2 Transportation and installation

PSE200

CAT.ES100-41 A Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE

LFE-OMY0008

OUT2 OUT1 1. 1. 1. 1.

5 Port Solenoid Valve SY Series

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075

4/5 Port Air Operated Valve Series SYJA3000 1

type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 1/4 With sub-plate 02 3 position exhaust center 2 position single 2 position double 5 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 3 position

4/5 Port Air Operated Valve SYJA3000 Series

VGA Port size Symbol Body ported Thread type VPA Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 2 position single 2 position double 1/8 With sub-plate 01 F N T VPA3 2(B) (A)4 2(B) (A)4 3 position closed center 3 position exhaust center (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position

IDX-OM-U022

-4 i.2.6 . i-4 i.2.7 . i-4 i.2.8 . i-5 i.2.9 . i-6 i.3 . i-7 i.4 / . i-7 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 R . 1-2 1.2.5 V . 1-2 1.3 . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 2.3 . 2-8 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 1 3.5 . 3-2 3.6 . 3-2 3.7 . 3-3 3.8 . 3

Air cylinder

Name Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 2 7 Bushing 1 8 Cushion valve 2 9 Tie rod 4 10 Hexagon nut 8 11 Bumper 2 12 Wear ring 1 13 Scraper 1 14 Rod seal 1 15 Cushion seal 2 16 Piston seal 1 17 Cushion valve seal 2 18 Cylinder tube gasket 2 19 Magnet (1) 32 - Revision history B Revise by adding 180 to 320.

IZx-OMV0005

Doc. no.IZ-OMV0005 PRODUCT NAME Ionizer Nozzle type MODEL / Series IZN10E Series 1 Doc. no.IZ-OMV0005 Contents Safety Instructions . 3 1. How to Order . 9 1-1.Ionizer body . 9 1-2.Accessories . 10 1-3.Repair parts . 11 1-4. Options . 12 2. Procedures to Operation . 12 3. Installation and wiring . 13 3-1. Installation . 13 3-1-1. Precautions for Installation . 13 3-1-2.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLAV16-30-1-2 XLAV25-30-1-2 XLAV40-30-1-2 XLAV50-30-1-2 With XLAV16A-30-1-2 XLAV25A-30-1-2 XLAV40A-30-1-2 XLAV50A-30-1-2 Indicator Valve size 63 80 Without XLAV63-30-1-2 XLAV80-30-1-2 With XLAV63A-30-1-2 XLAV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 With XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 Indicator Valve size 63 80 Without XLFV63-30-1-2 XLFV80-30-1-2 With XLFV63A-30-1-2 XLFV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

Process Valve

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T A B C NBR seals FKM seals EPR seals Nil B Note) None With bracket Refer to Table (1) for availability. 2 0 1 A VNA Air operated 15A 2 to 4 External pilot solenoid 2 VNA 1 1 A 15A 1 T CE-compliant Nil Q CE-compliant Note) CE-compliant: For D or DZ only Manual override Rated voltage Valve size Valve type Port size 3 Note

KA

thread M 1 8 KAH06-U01 14.5 6 5 12 19.5 17 1 4 KAH06-U02 13 17 14 12 13.1 13.1 10 H 3 8 KAH06-U03 17.5 11.5 16 1 8 1 4 KAH08-U01 KAH08-U02 20.5 15.5 25 21.5 11 27 Applicable tubing 14 D 14 8 18.0 18.0 18.5 3 8 KAH08-U03 17 19.5 13.5 33 1 8 KAH10-U01 28 23 17 MS 1 4 3 8 KAH10-U02 KAH10-U03 22 18 17 17 10 29.5 29.5 21 24 14 T 1 2 KAH10-U04 22 14 28 22 16 22 Connection

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction

KS/KX

(mm) 8 6 4 Model 10 12 Connection thread Male connector KSH KXH M5 x 0.8 M6 x 1 1 8 R K R 1 4 M R 3 8 H R 1 2 Male elbow KSL KXL D M5 x 0.8 M6 x 1 MS R 1 8 T R 1 4 VMG R 3 8 R 1 2 Precautions Be sure to read before handling.