SMC Corporation of America
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PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

Load Grey Analogue output 200 L/min 1000 L/min 2000 L/min 500 L/min 3000 L/min [At shipment] Main circuit Analogue input Installation Simple Setting Mode Load Sensor + Black OUT1 4 DC12 to 24 V Load Mounting with bracket Mount the bracket to the body with mounting screws (Self tapping screws: Nominal size 3 x 8L (2 pcs)), then set the body to the specified position. : Tighten the bracket

F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20] =00 = ON EEPROM 100 +100 OFF GND 30 msec. 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] [-] [F20] -47No.PF-OMM0004-D [F22] 5 V20 mA [F22] [AnA] [AnA][-] [F22] -48No.PF-OMM0004-D OFF ON 5 V 20 mA 10% [F22] -49No.PF-OMM0004-D [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200

([F20](45 )) [F82](51 ) c () -44No.PF-OMN0011CN-C [F20] =00 = ON EEPROM 100 +100 OFF 30 msec.GND 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] OFF [-] [F20] -45No.PF-OMN0011CN-C [F22] 5 V20 mA [F22] [AnA] [AnA][-] tEMP FLoW [F22] ON OFF -46No.PF-OMN0011CN-C OFF ON 5 V 20 mA 10% [ V ] 4 L/min 1~5 V [F22] 5.6 V110 -47No.PF-OMN0011CN-C [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200

Approx. 1.00 mm Colours Brown, blue, black, white, grey Sheath Material Heat and oil resistant plastic Finished O.D. 3.5 mm -63No.LFE*-OMZ0013 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out

.: ZVB-P1A) Hose band (Material: SUS) Exhaust duct hose (Material: PVC) (*) Connection inside diameter Duct collector bag filtration rating 10m (Material: Polyester) Hose band (Material: SUS) -12- 2.5 Offset Voltage and Discharge Time Ionizer 100 180 200 Actual measurement values of the static elimination performance at the points 1 to 6 are shown below.

Discharge capability 1) Flow-rate characteristics PB1013A Flow-rate characteristics (5Hz) PB1013A flow-rate characteristics (When operated at PB1013A5Hz 5H ) 0.7 Discharge pressure (MPa) 0.6 SUP=0.7MPa 0.5 MPa SUP=0.5MPa 0.4 SUP=0.35MPa 0.3 SUP=0.2MPa 0.2 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution The above flow characteristic graph is for clean water (viscosity

Discharge capability 1) Flow-rate characteristics PB1313A Flow-rate characteristics (5Hz) PB1313A5Hz 0.5 SUP=0.5MPa Discharge pressure (MPa) 0.4 SUP=0.4MPa MPa 0.3 SUP=0.3MPa 0.2 SUP=0.2MPa 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution -The above flow characteristic graph is for clean water (viscosity 1mPas, specific gravity 1.0).

VCC12(D)-00 (2 port valve) VCC13-00 (3 port valve) Full length: 44.8 to 45.1 0.2 Full length: 54.6 to 54.9 0.4 Except face seal (O-ring) Except face seal (O-ring) Tighten the screw until it hits the body by pressing the orifice body with approx. 100 to 200 N of force. ( Additional tightening is not necessary.)

To use the power of the device, the total load current must be 200 mA or less. 2 : Refer to 2.4.2 Contact output signal 4 to 6. 2.2 Communication specification HRL Series 2-2 HRX-OM-W069 Chapter 2 Contact input/output communication /Analog output communication Table 2.2-3 Contact input/output communicatin /Analog output pin number PIN No.

To use the power of the device, the total load current must be 200 mA or less. 2 : Refer to 2.4.2 Contact output signal 4 to 6. 3 : For option D1 CH1 Electric conductivity control, it can be set.

To use the power of the product, the total load current must be 200 mA or less. 2.2 Communication specification HRLE Series 2-2 HRX-OM-Z015 Chapter 2 Contact input / output communication Table 2-4 Contact input/output communication terminal number PIN No.

(No indication on display) Sets target temp. for control. 0.0 to 50.0C (0.1C) 25.0 1.0 to 60.0C (0.1C) 60.0 -9.99 to 9.99C (0.01C) 0.00 -9.9 to 49.0C (0.1C) -9.9 10 to 999% (1%) 200 0.0 to 10.0C (0.1C) 1.5 0.0 to 10.0C (0.1C) 1.5 2 PB Range Sets PB (Proportional Band) range used for PID control. 0.3 to 9.9C (0.1C) 3.0 0.0 to 99.9sec (0.1sec) 0.0 None, Odd, Even None On, Off Off 600, 1200,

25 XYC-25 XMC-40 XYC-40 XMC-50 XYC-50 XMC-63 XYC-63 XMC-80 XYC-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 160 200

(Table 1) Table 1 Example of applicable fitting: Male connector (O-ring parallel thread) (Made by Swegelok) Cylinder Fitting thread size for Example of Piping tube OD (inch) model piping applicable fitting CYV15 5/16-24 UNF SS-200-1-OR 1/8 CYV32 7/16-20 UNF SS-400-1-OR 1/4 2.

How to order 002 FGH 100 03 T Element seal aterial PTFE Nominal filtration accuracy Nominal filtration Applicable Applicable Symbol accuracy Element model Element length 002 2m Filtration Element Applicable 004 4m HEPO FGH100 Symbol efficiency length Element 300 006 6m 99% 100 L117 EJ701S 013 13m 200 L246 EJ801S,ED801S X20 0.2m Filtration FGH200 300 L496 EJ901S,ED901S efficiency Membrane

(Note1) (Petroleum,Water-glycol, Emulsion,Phosphoric ester) Applicable model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 INOUT Port size (Rc) 3/4B 1B 1 1/4B 1 1/2B 2B 2 1/2B 3B Drain port size M162 Rated flow Paper 50 80 120 160 260 450 600 rate Micromesh 60 100 150 200 300 550 700 (L/min) Operating pressure 1.0MPa Operating temperature 80oC Nominal filtration 1.

.(-1060 25) CEUL/CSARoHS 01 02 C01 N01 N02 A2 B2 R1/8 M50.8 Rc1/8 NPT1/8 R1/4 NPT1/4 M50.8 URJ1/4 TSJ1/4 M50.8 M50.8 C3604SUS316L PSE563 5.1 3 m 2 0.2 mm 1.12 mm PSE56--28: 2 5.1 3 m 2 0.2 mm 1.12 mm 193 g 200 g 194 g 201 g 187 g 203 g 193 g 101 g 108 g 102 g 109 g 95 g 111 g 101 g -12No.PS-OMG0005CN-E [mA] [V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa

Series 140 160 180 200 CQ2-Z 7.5 8.0 7.0 7.0 CQM RZQ MK-Z MGP-Z MGZ 2 : The range of operation is a standard including hysteresis, and is not guaranteed. 1: Bore sizes 32 and higher for the MHS series require a separate mounting bracket. (Bracket Part number: BMG2-012) 2: All bore sizes for the MGZ and MHC series require a separate mounting bracket.

This person should also continuously review all specifications of the product referring to its latest catalogue information, with a view to giving due consideration to any possibility of equipment failure when configuring the equipment. 100 0.05 0.09 0.15 0.24 0.39 0.64 1.00 125 0.07 0.11 0.18 0.29 0.47 0.76 1.20 150 0.08 0.13 0.21 0.34 0.54 0.89 1.30 200 0.10 0.17 0.28 0.44 0.70 1.10 1.70