Large Size Vacuum Module: Series ZR

80mA 15 AMJ Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m W/o lead wire L C 55 AMV CL CN Connector type AEP HEP With Connector/How to Order Related Equipment . .

HRX-OM-W004

HRX-OM-W004-H Operation Manual Communication function Thermo-chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRR010-A-10HRR012-A-10HRR018-A-10HRR010-A-20HRR012-A-20HRR018-A-20HRR024-A-20HRR030-A-20HRR050-A-20HRR050-A-40HRR010-W-10HRR012-W-10HRR018-W-10HRR010-W-20HRR012-W-20HRR018-W-20HRR024-W-20HRR030-W-20HRR050-W-20HRR050-W-40Keep this manual available whenever necessary

JXCx-OMT0028CN

(H) 00 64 h (H) (L) 44 - 32 32 1)700.00mm GW [OUT Data]Address.6 Address.9 0.01mm 700.00mm 7016 00011170h PLC 00 01 11 70 h 2)-700.00mm GW [OUT Data]Address.6 Address.9 Address.7 Address.6 01h 00h 15bit 8bit 7bit 0bit (H) 00 01 11 70 h (H) Address.9 Address.8 70h 11h 15bit 8bit 7bit 0bit (L) 00 01 11 70 h (L) 0.01mm 2 -700.00mm -7016 FFFEEE90h PLC FF FE EE 90 h Address.7 Address

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L RUN SERIAL UNIT L ERR.

Compact

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

Compact Cylinder

Material: Chromium molybdenum steel (Nickel plated) (mm) L UT YB-03 YB-05 32, 40 50, 63 12 12 7 9 25 32 9 11 34 42 11.5 depth 7.5 14.5 depth 8.5 C UA Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) 25 40 YU-03 YU-05 17 17 11 13 15.8 19.8 14 18 M8 x 1.25 M10 x 1.5 8 10 7 7 6 6 32, 40 50, 60 Weight (g) Bore size (mm) T2 V W RS T1 Part no.

Magnetically Coupled Rodless Cylinder

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

AMD

40 4B flange 60 6B flange Type Type 00 With manual drain cock 10 With auto-drain 01 With manual drain cock 11 With auto-drain Max.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (4) Wiring Note 8) Symbol Type L Individual wiring Note 9) F D-sub connector (25 pins) Note 10) P Flat ribbon cable connector (26 pins) Note 10) N No wiring (No valve) Note 8) Common wiring is available only solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors. Note 9) Select L, L#, or W for (6) Wiring Combinations for the single unit model.

ZL3-OM00601

Other shapes do not comply with ISO1603 or ISO1179. 8) Light/surge voltage suppressor 7) Electrical entry Z Light/surge voltage suppressor L Lead wire length 0.3(m) L shaped plug connector LO Without connectors M Lead wire length 0.3(m) M plug connector MO Without connectors 9) Manual override Nil Non-locking push type D Push-turn locking slotted type E Push-turn locking (manual type) 10)

ZL3-OM00801

m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [Hz] 5 [DCV] 24 10 [W] 0.4 *1 JIS B 8419:2010 20 9.3 9.4 GZ33-K1K-01-

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

Vacuum Unit Ejector / Vacuum Pump System

Note 9) Select L, L#, or W for (6) Wiring Combinations for the single unit model.

AC Servo Motor Driver (SSCNET Type)

[1] Power supply input terminals, L1, L2: Provide specified power supply to input terminals L1 and L2. [2] Connect the motor input terminal (U, V, W) to the driver power terminal (U, V, W).

COQ2BP

M~-ill w". w r: L-+. !ill! L 3() same side I HI 49 65.5 55 5 SeIIh, Itrokt end within ::/-1.5mm or less ollhe above specIfied positioning order to mulmlzt the high magnetic fielll reslstabilhy. L, ' N X NZ NX NZ L, P i A A 0ND. o oNDI1'o A, U, NX bJ AppI bore size A ., E, 11 MM 'R, U. -. . No. CQ2 Single Rod Clevis (mm) C02 Double Rod Clevis (mm) ;1 AppI bon ...

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F5PW Indicator light / Operation D-A59W D-859W D-F5-W, DGs',W, D-J59W, D-Fs'F, D-.J59W, D-K59W. DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock.

AMR3000 to 6000

Model IS1000-01 0.1 to 0.4MPa Set pressure range (OFF) 0.08MPa Differential 1a Contact point construction 2VA AC, 2W DC Max. contact point capacity 12V 48V 100V 24V Voltage (AC, DC) 50mA 40mA 20mA 50mA Max. current 1.2ms Operating time 30G Shock resistance JIS symbols w AMR4000 AMR3000 AMR5100 1.10-1 Regulator with Mist Separator AMR3000 to 6000 How to Order Adapter Assembly (part number

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

0 w !2 ASR ASF Component Parts Component Parts No. Model No.

LX Series Compact Electric Actuators

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !