Compact Vacuum Unit

2.5) Supply pressure psi (MPa) Suction flow SCFM (L/min (ANR)) Nozzle Size 0.4 mm Supply Valve, Latching Type/ZB04-Q 1 2 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 72.5 psi (0.5 MPa)) 0.53 14.5 14.5 Suction flow SCFM (L/min (ANR)) Air consumption SCFM (L/min (ANR)) (15) (100) (100) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 0.42 11.6 11.6 Vacuum pressure

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

VC L type L/M type fitting assembly procedure VDW t Fitting nut r Tubing Turn the lever q and move to SET POS. 1 u Knob w Insert pin assembly VQ Place the insert bushing e on the insert pin assembly w. 2 e Insert bushing VX2 Space Cut the end of the tubing r at a right angle and pass it through the fitting nut t.

MXS

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

REC

9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Description Material Note Component Parts Qty. No. No. Description Material Note Qty. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 1 Rod cover Aluminum alloy Rod seal A NBR White anodized q !

Series VS

Wiring & Light / Surge Voltage Suppressor How to calculate Flow (At an air temperature 20C) AC AND 100 VDC AC AND 100 VDC WITH LIGHT WITH LIGHT TERMINAL no.1 (+) TERMINAL no.1 (+) Subsonic flow: P1+0.1013<1.89(P2+0.1013) SINGLE SINGLE Q=226S P(P2+0.1013) Sonic flow: P1+0.1013>1.89(P2+0.1013) ZNR ZNR Q=113S(P1+0.1013) Q: Flow rate under standard conditions [l/min(ANR)] S: Effective area (mm2

Slider Type/Ball Bushing Bearing

Thread size M4 x 0.7 M8 x 1.25 M5 x 0.8 M6 x 1.0 Bolt dimensions Dimension t L-7 L-8 L-8 L-12 L-9 N m 13.2 4.4 1.37 2.65 Tightening torque Square nut L t Service Life and Replacement Period of Shock Absorber Caution 1.

Plug-in Unit

L L (60) 44 8 16 14 25 1 13 47.04 50 " 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no. (arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !

Precautions 1

MM ND hole Shaft ND hole H10 ND hole H10 MM MM Shaft d9 Shaft d9 NX2 L R2 U2 A H Z E1 E1 NX NZ L NX NZ L (Min.) A1 U1 L1 A A1 U1 L1 A Applicable cylinder bore size 20 ND E1 L L1 MM A A1 H L MM ND NX2 R2 U2 Y Z A Part no.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

CV/MVGQ

MQQ M RHC L N 40 100 JN 1 W D CVS1 Without auto switch MK(2) L 100 Y7BW N 40 JN 1 W D CDVS1 With auto switch RS Q G Suffix for cylinder RS H A Built-in magnet J K N R H Nil Nylon tarpaulin Heat resistant tarpaulin Without cushion With cushion on rod end With cushion on head end With cushion on both ends Solenoid valve voltage Rod boot Mounting style 1 2 5 9 100 VAC (50/60 Hz) 200 VAC

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Stainless Steel 316

Model Weight (g) N L A Q M D (mm) 4 6 8 10 12 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 10.6 20.6 28.7 4.1 18 6.4 28 3.2 13 22.4 31.4 4.9 18.8 10.6 42 M N D L A 15 25.5 36.3 6.1 20.9 25.6 57 D 4.2 18 28.6 40.6 7.1 23 40 95 Q 20.8 31.4 44.5 8.1 24.8 57.4 129 M M L L Note 1) D is maximum diameter.

CLQ

Component Parts No. q w e r t No. !7 !8 !

Series CE1

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No. No.

VXP21/22/23

K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50 9 Series

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Non-contact Gripper

C 16.5 L H L H 4 x M depth ML 4 x M depth ML L L 16.5 (mm) Part no.

Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric Nil B L None With bracket With bottom bracket Inch Note 1) Accessories are shipped together.