Clean Room Rodless Cylinder Series CYP ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

Digital Gap Checker ( compatible)

(B) Within the acceptable range (Seats correctly).

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

Digital Flow Switch ( compatible)

data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 4 L 0.125 0 L/min 16 L 0.25 0 40 L 0.5 0 PF2MC7 4 L 0.004415 0 cfm 16 L 0.0088275 0 40 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF2MC7 series, unit L/min, flow range 1000 L and PD = 2500

AC Servo Motor Driver (SSCNET Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

B' B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5

EX510

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

Multi-channel Digital Sensor Monitor ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -46No.PS-OMW0012-C [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

HRX-OM-Q026

B Contact output signal 3 selected alarm Sets the alarm selected for the contact output signal 3. ---(AL.01)6 1: Default when CO02 is set to PRO1 or PRO2. 4: Default when CO23 is set to A.SEL. 2: Default when CO15 is set to SW-A or SW-B. 5: Default when CO26 is set to A.SEL. 3: Default when CO19 is set to SW-A or SW-B. 6: Default when CO29 is set to A.SEL.

Manifold Specifications

Cv C [dm3/(sbar)] b Cv 1.3 0.12 0.31 1.5 0.12 0.37 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.35 1.6 0.10 0.36 1.4 0.14 0.36 1.5 0.11 0.35 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Manifold Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve.

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

Digital Flow Switch ( compatible)

data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 4 L 0.125 0 L/min 16 L 0.25 0 40 L 0.5 0 PFMC7 4 L 0.004415 0 cfm 16 L 0.0088275 0 40 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PFMC7 series, unit L/min, flow range 1000 L and PD = 2500)

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

EXxx-OML0010CN

JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

4-channel Flow Monitor ( compatible)

(2) Conversion formula from the measurement value to the process data: (PD) = (Pr b) / a Pr: Measurement value and directive value PD: Measurement value (process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Applicable products Unit Range Inclination a Intercept b 4 L/min 0.004 0 16 L/min 0.016 0 L/min 40 L/min 0.04 0 100 L/min 0.1 0 250 L/min 0.25

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value

Silencer Series AN

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 M5 x 0.8 15 Body (Resin) A 1/8 23 11 A 16 14 1/4 32 Hexagonal flats D 16.5 14 1/4 45 20 17 3/8 58.5 Port size 24 21 1/2 68 2 Silencer Compact Resin Type/One-touch

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of

IP8101 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant

Magnetically Coupled

JM-025 NSNJ-015 JM-08 NSN-03 NSN-04 0.26 0.30 0.30 0.39 0.39 0.51 0.51 1.00 1.13 1.50 2.00 2.00 2.13 2.50 2.50 3.00 0.47 0.59 0.71 0.91 1.08 1.36 2.44 2.50 3.25 4.17 4.38 4.88 5.88 7.00 7.50 1.18 1.26 5/16-24UNF 3/8-24UNF 3.07 3.24 3.99 5.19 5.38 6.14 7.14 7.16 7.66 C H B d 1/4-28UNF 3/8-24UNF 5/8-18UNF 1-12UNF 1-1/4-12UNF H 0.16 0.12 0.38 0.31 0.43 B 0.44 0.55 0.94 1.22 1.61 C 0.51 0.64