mb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

70astamb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

1.1

With Communications Function (RS-232C) P.11 High-lift Pump P.12 With DI Control Kit P.12 Optional Accessories Dustproof Filter Set P.13 By-pass Piping Set P.13 DI (Deionized Water) Filter P.14 Insulating Material for DI (Deionized Water) Filter P.14 Specific Product Precautions P.15 to 17 Safety Instructions Back cover Front matter 1 Series HRGC Model Selection Guide to Model Selection

Vacuum Unit Ejector / Vacuum Pump System

selection function Note 12) NPN 2 outputs F SI unit only Note 13) -100 to 100 H PNP Unit selection function Note 12) 2 outputs J SI unit only Note 13) K Unit selection function Note 12) NPN Pressure switch for 1 output Q SI unit only Note 13) -100 to 100 vacuum with energy R PNP Unit selection function Note 12) saving function Note 11) 1 output S SI unit only Note 13) N Without pressure

Fieldbus system PROFINET compatible SI Unit

Product Summary 11 1.1. Features 11 1.2. Structure 12 2. General Specifications 13 3. Installation 14 3.1. Mounting 14 3.2. Wiring 16 4. Commissioning 22 4.1. Configuration 22 4.2. Parameterisation 26 5. Diagnosis 30 5.1. Diagnostics data on I/O mapping 30 5.2. Maintenance alarm for the Fibre-optic cables 34 6. SI Unit 35 6.1. Parts and description 35 6.2. Specifications 37 6.3.

SMC Pneumatic Clean Series

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

ZPT/ZPX

Series ZPX Female thread Female thread 13-11-77 to 13-11-80 Lateral vacuum entry Buffer body (Male thread) Female thread Pad dia.

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) Q1 = M Q2 = M 10 X L1 max Q1 7 to 8 Size Y-3 M4 Y = 10 15 8.5 to 9 9 to 14 X-5 M4 Y-3.5 M5 L2 = L1 = 15 20 10 11 to 18 X-6 M5 Y-4 M6 20 30 X = 13 13 to 20 X-7 M6 Y-5 M8 30 40 15 16 to 22 X-8 M8 Y-6 M10 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Vacuum gripper

9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

SOL.B 23 23 () (+) Gray Red 10 stations SOL.B SOL.A 11 11 () (+) White Red SOL.A SOL.B 24 24 () (+) Black White 11 stations SOL.B SOL.A 12 12 () (+) Yellow Red SOL.A SOL.B 25 25 () (+) White None 12 stations SOL.B COM. 13 13 (+) () Orange Red COM. Note) Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.

Thermo-chiller/Rack Mount Type

The weight will decrease by 1 kg for Option Z (Removed parts) 11 Options M (Applicable to DI water piping) and MT (Applicable to DI water piping + High-pressure pump mounted) do not contain copper or bronze. 12 For Option DM (With electric conductivity control function, Applicable to DI water piping) 13 If the product is used at an altitude of 1000 m or higher, refer to For altitudes of

VZS

3 in the side added with manifold block. 2 stations (10 stations) 3 stations (11 stations) 2. Joint the tie-rod y to increase stations and add manifold block assembly. (Put packing B w on the surface contacting to the end plate.) 4 stations (12 stations) 5 stations (13 stations) 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !

Plug-in Unit

A (+) () () (+) 11 11 Station 6 Station 6 SOL. B SOL. B (+) () () (+) 12 12 SOL. A SOL. A (+) () () (+) 13 13 Station 7 Station 7 SOL. B SOL. B (+) () () (+) 14 14 Connector Manufacturers Example: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd.

A_HEC-OM-K001

11 7.4.9 Setting of control operation mode (without writing EEPROM) . 7-12 7.4.10 Reading of control operation mode . 7-12 7.4.11 Setting of PB range (without writing EEPROM) . 7-13 7.4.12 Reading of PB range . 7-13 7.4.13 Setting of ARW range (without writing EEPROM) . 7-14 7.4.14 Reading of ARW range . 7-14 7.4.15 Setting of I constant (without writing EEPROM). 7-15 7.4.16 Reading of I

Round Type Low Pressure Hydraulic Cylinder Series CH
M

6 51 21 68 12 8 41 5 8 30 5 M8 x 1.25 13 26 15.5 23 f8 25 to 800 22 44 17 32 12 16 7 9 53 27 70 12 8 46 6 8 32 5.5 M10 x 1.25 13 28 19.5 25 f8 32 to 800 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 31 f8 40 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 34 f8 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15

EXxx-OMW0014CN

11.4. 1 1 2 EX245-ZJP . 11-7 (EX245-ZJP) EX245-DX1EX245-DY1EX245-LA1/LB1 EX245-EA2-1/2/3/4/5 1 3.1.2 79 No.EX-OMW0014CN-A 12. 12.1. . 12-1 . 12-1 EX245-EA2-1 . 11-1 EX245-SPN1A/SPN2A/SPN3A n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6(8 ) mm 80 No.EX-OMW0014CN-A 13. 13.1.

HRX-OM-W058

Weight*11 kg 45 *1 Use the product in conditions where freezing will not occur.

10

Q F G1/2 23 Y C R E C R (1.5) (1.5) Y E B1 B A B1 B A 2 x P Port size 2 x P Port size Terminal part U W M U W M Flat terminal connector 250 Series X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole 11 9 6.5 15 (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50

Square Tube Type Air Cylinder Series MB1

(Refer to Rod boot/Air cushion on page 11.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

steel, NBR, (FKM, EPDM) 13 Valve spring Stainless steel 14 Buffer PPS 15 Bonnet Stainless steel 16 Bolt Fe 17 Bracket Fe 6 Armature assembly Stainless steel, PPS, NBR, (FKM, EPDM) Stainless steel, PPS, NBR, (FKM) 7 Bracket Fe 8 Mounting screw Fe 9 Bonnet Stainless steel 10 Gasket NBR, (FKM, EPDM) NBR, (FKM) 11 Bolt Fe 12 Body Brass Stainless steel Aluminum 13 O-ring NBR, (FKM, EPDM) NBR,