Ionizer Gun

Doc. no.IZ*-OMX0012-B PRODUCT NAME Ionizer Gun MODEL / Series / Product Number IZG10 1 Doc. no.IZ*-OMX0012-B Contents Safety Instructions . 3 1. How to Order . 9 1-1. Ionizer . 9 1-2. Accessories . 9 1-3. Repair parts . 10 2. How to Use . 11 2-1. Procedures to operation . 11 3. Wiring . 12 3-1. AC adapter type/ IZG10-01, 02 . 12 3-2. Power supply cable type/ IZG10-03 . 12 4.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

HRX-OM-X010

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

HRX-OM-K003

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Circulating fluid disposal. 1-15 1.7.2 System disposal . 1-15 1.8 Material Safety Data Sheet (MSDS) . 1-15 Chapter

5

D-A9lV D-M9lWV D-M9lAV D-A9l D-M9lW D-M9lA D-M9l D-P3DWA Note 1) REB With 1 pc. 5 5 10 10 (5) 15 (10) 15 (5) 15 With 2 pcs. 5 10 10 10 15 (10) 15 (5) 15 REC Note 1) 25 is only applicable for the D-P3DWAl.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

> Solid state D-H7A1, D-H7A2, D-H7B, D-H7BAL, D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Caution 1.

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 10 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to CCT63

7ND9071en

SPOOL VALVE PNEUMATIC CONNECTIONS (S, C1, C2) ND7_HXT, ND7_HZT: II 1 G Ex ia IIC T6...T4 Ga II 1 D Ex ta IIIC T90 C Da II 2 G Ex ib IIC T6...T4 Gb II 2 D Ex tb IIIC T90 C Db Ui 28 V, Ii 120 mA, Pi 1 W, Ci 22 nF, Li 53 H, external load resistance 0690 . 02 Low capacity. Stroke volume of actuator < 1 dm3. G 1/4 (ND7100), 1/4 NPT (ND7200). 03 Medium capacity.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Blank plate SYJ3000-21-1 Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) A A Blank plate SYJ3000-21-1 Manifold gasket VJ3000-14 -3 Manifold gasket VJ3000-14 -1 A A Blank plate SYJ3000-21-1 Applicable manifold base SS5YJ3-20 Applicable manifold base (sub-plate) SS5YJ3-41 SS5YJ3-S41 SS5YJ3-46 SS5YJ3-S46 SS5YJ3-31

KJ

53 9.2 15.5 2.5 1 4 1 8 1 4 1 8 Applicable tubing 5 32 10 3 16 Connection thread 1 4 1 4 12.5 4.6 17 3 8 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 5 16 14 6 18.5 15 3 8 16.5 7 21 19 14.5 18.5 20 9.6 22 1 2 Note) D: Max. diameter 15-4-13 6 Series KQ2 Straight Union: KQ2H Min. port size Applicable tubing O.D.

High Power Cylinder Series RHC

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-A9 D-M9 D-M9W Note 1) qBMA2-040 wBJ3-1 Note 1) qBMA2-050 wBJ3-1 Note 1) qBMA2-063 wBJ3-1 Note 1) qBMA2-020 wBJ3-1 Note 1) qBMA2-025 wBJ3-1 Note 1) qBMA2-032 wBJ3-1 D-C7/C80 D-C73C D-C80C D-H7 D-H7W D-H7BAL D-H7NF BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL D-G5NBL

RHC

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

High Power Cylinder Series RHC

D-C73C, D-C80C Reed BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state D-B53, D-B54, D-B64, D-B59W Reed BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5NTL Solid state D-A33, D-A34, D-A4 Reed BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M D-G39, D-K39 Solid state 2 Series RHC Theoretical Output Table

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCHIS10M-20-1-D to IS10M-60-1-D Model IS10M-20-1-D A B C D 10.6 83.8 66.3 42 12.6 91.8 70.3 53 14.6 97.8 72.3 58.6 16.6 100.8 73.8 59.3 22 110.8 78.8 90 IS10M-30-1-D IS10M-40-1-D IS10M-50-1-D IS10M-60-1-D -19- 11-3.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25