Series VQ Metal Seal/Rubber Seal Body Ported

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VQ5000

Note3) When specifying more than one option, enter symbols in alphabetical order. 3m 11 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (D Sub Connector Kit) F Applicable connector: D sub connector (25 pin) (conforms to MIL-C-24308) 83 29.5 29.5 2-Rc1/8 (pilot EXH. port) 12 21 47.5 36 5 R1 PE 3 R2 1 P SMC 6-Rc3/4 Ports P(SUP), R(EXH) 179 106 9 9 59.2 46.8 With connector on

Series VQ Base Mounted Metal Seal/Rubber Seal

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Mini Free Mount Cylinder

(Compared with the CQS series cylinders, double acting, with magnet) CQS Dimensions (With Magnet) (mm) CUJ Bore size (mm) A(a) B(b) C(c) c + Stroke 12 16 20 17 (25) 21 (29) 25 (36) 26.5 (25) 29.5 (29) 36 (36) 19.5 (22) 21 (22) 23.5 (29.5) C + Stroke ( ): Dimensions of the CQS series cylinders b A B a Full length is shortened by up to approx. 64%.

Sine Cylinder Series REC

63 40 59.5 36.5 53.5 30.5 56.5 33.5 53 30 58.5 35.5 55 32 40 69.5 38.5 73.5 42.5 70 39 64 33 67 36 63.5 32.5 69 38 65.5 34.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Process Valve Series VNA

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port

Plug-in/Plug Lead: Single Unit

Type SU 2-6-36 Base Mounted Series VQ5000 Manifold mounted exhaust cleaner Applicable exhaust cleaners AMC610-10 (Port size Rc 1), AMC810-14 (Port size Rc 11/2) VV5Q5 --CD (D side mounting) VV5Q5 --CU (U side mounting) 1 5 1 5 Note 1) Exhaust cleaner: AMC610-10 and MC810-14 are not included. (Order separately) Note 2) Mount so that the exhaust cleaner is at the lower side.

Compressed Air Cleaning Filter Series

Main Line Filter AFF220A Micro Mist Separator AMD90/100/91 Unit: Nm Recommended Torque Connection thread Torque 1 2 1/8 1/4 3/8 1/2 3/4 1 1 2 1.5 to 2 7 to 9 12 to 14 28 to 30 28 to 30 36 to 38 48 to 50 48 to 50 After tightening manually, tighten additionally by about 1/6 turn with a tightening tool. 2.

Dual Rod Cylinder Series CXSJ/CXS

24.5 28 17 27 38 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Mechanically Jointed Rodless Cylinders

Rubber bumper) MY3B Basic standard type (Air cushion) Loading Capacity MY3M MY3A/3B 70 200 M2 m1 180 60 Allowable moment (Nm) 160 Load weight (kg) 50 140 120 40 100 MY3M 30 80 60 Slide bearing guide type (Air cushion) 20 40 10 20 Work pieces can be loaded directly on the work table due to the integrated guide. 0 0 16 25 40 63 16 25 Bore size (mm) Bore size (mm) 40 63 Height (H) reduced by 36%

5 Port Solenoid Valve Series VQZ1000/2000/3000

26 or less 18 or less 13 or less 30 or less 30 or less 30 or less 22 or less 13 or less 33 or less 33 or less 33 or less 0.20 0.40 0.20 0.40 0.29 0.38 0.28 0.38 0.41 0.21 0.39 0.21 0.39 0.21 0.33 0.23 0.33 0.28 0.34 0.23 0.34 0.23 0.34 0.19 0.30 0.19 0.30 0.25 0.38 29 or less 34 or less 13 or less 13 or less 40 or less 47 or less 40 or less 47 or less 47 or less 34 or less 36

0.55

Port size: 1/4 36 Series VPA300/500/700 Series VPA300/Dimensions Type 41/Common exhaust: VV3PA3-411-02 Stations 72.5 24 2 x 6.5 (For mounting) N.C.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 28.5 32 Z ZZ G (NN 1) x H 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35 50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10

LEC-OM02904

SSCNET 7. 4 SSCNET 8 10 8 (2) 35 1. 2. 3. 4. 36 2 SSCNET (70ms ) 1. SSCNET 2. SSCNET (3.9 ) 3. SSCNET 4. 5. SSCNET SSCNET 2.43.9 6. SSCNET 37 1. 1 TM MR Configulator2 2. No.PA02 No.PA02 2 3. EEP-ROM 12 10 4. 3D No.PD16PD17 8 11 8 (2) 45 1. 55 0 55 2.

Cylinder with Lock Series CNG

Piston gasket NBR 36 Note) In the case of cylinders equipped with auto switches, magnets are installed in the piston.

Hydraulic Cylinders

50 45 21 106 17 142 3/8 36 15 Note 1) Body dimensions are the same with or without auto switches.

MXS Series Air Slide Table

36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 HA 40 40 40 25 36 72 76 MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 125.5 179.5 58 Air Slide Table MXS Series Dimensions MXS 12 With shock absorber(12) MXS12BS, BT, B 17 A 8 31.5 31.5 15 15 45 Shock absorber at retraction end Shock absorber at extension end (mm

5 Port Solenoid Valve SY Series

.: 4, 5/32" 8, 5/16" 6, 1/4" (Lead wire length) 63.7 11.6 88.6 [90.8] B A Manual override (For manifold mounting) 23.2 14.5 36 (For mounting) 23.2 (45) 1.2 (37) 40.4 (4.9) (Light/surge voltage suppressor) 40.4 (4.9) 10.5 (40.2) (36.7) 12.7 28.1 [35.1] + 20.5 SY5120-01(-F ) G H 1 2 23 32.3 (A, B port) 1/8 0.8 1.6 16.2 (20) 15 EA P EB 28.1 [32] For manifold gasket positioning 22.2 die-cast

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note3) When specifying more than one option, enter symbols in alphabetical order. 3m 11 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (D Sub Connector Kit) F Applicable connector: D sub connector (25 pin) (conforms to MIL-C-24308) 83 29.5 29.5 2-Rc1/8 (pilot EXH. port) 12 21 47.5 36 5 R1 PE 3 R2 1 P SMC 6-Rc3/4 Ports P(SUP), R(EXH) 179 106 9 9 59.2 46.8 With connector on