Ionizer

Bar length (mm) IZS31-E3 IZS31-E3 IZS31-E4 IZS31-E5 1 300 30 1 380 1 1 620 80 1 1 780 L 1 3 1100 3 1 1260 2 2 1500 Part no L 5 1 1900 IZS31-E3 IZS31-E4 IZS31-E5 200 4 2 2300 280 360 The model number requires the suffix -X14 to indicate that the body is to be shipped fitted with a security cover. IZS31 Standard part no.

CEx-OMP0016

steel 4 11 Belt separator Special resin 2 46 Diaphragm NBR 2 12 Guide roller Special resin 1 47 Brake body Aluminum alloy 1 Hard anodized 13 Parallel pin Carbon steel 1 48 O-ring NBR 1 14 Seal belt Special resin 1 49 Slide table Aluminum alloy 1 Hard anodized 15 Dust seal band Stainless steel 1 50 Sensor body Aluminum alloy 1 Chromated 16 Belt clamp Special resin 2 51 Connector gasket NBR

Compact Vacuum Unit Ejector/ Vacuum Pump System

2001 (JIS B8392-1:2003).

Rotary Table: High Precision Type

M(D)SUA1 P211070-1 M(D)SUA3 P211090-1 M(D)SUA7 P211060-1 M(D)SUA20 P211080-1 *The auto switch unit can be retrofitted on a rotary actuator.

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

,,: ,.

Male Connsctor Plug-in Elbow 01 ,/g -/92 05 -/1 07 ,4 1 0 1 1 l l 1 1 3t ' o ' Pr. SAE propoad 3pci{icrto.i, all mal ttr.ad8 wltl incorporEt6 1 3 1; Male Branch Union 'Y" 18 " Note: 1/8 tub sizes ar6 de6onatEd by a KO sdos pad numb6( end arc not covgred undr tho OOt or SAE pcificetions, shce OOT doe not spcity prirmanc Fquiromehls.

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

4

P = 26 25 55.2 19 G: 300 H: 600 50.6 Applicable cable O.D. 6 to 8 Grommet (G, H) Pg9 DIN terminal (D, DZ) Manual override (Non-locking) For 4 x M4 (For mounting) 83 111 4.6 43.5 39.3 21.6 27 R R P 29 38 20 11 (1) 1 (Pitch) P = 26 1/8" [3(R) port] 1/4" [1(P) port] 28.5 12 18.5 L1 L2 6 (Station n) (Station 1) Max. 10 75.6 62.5 40 A A 31 1/4", 1/8" [2(A) port] (Pitch) P = 26 5 22 n: Stations

CLK1

Operating Environment Lubrication Piping Caution Caution Warning 1. Lubrication of cylinder The cylinder has been lubricated for life at the factory and can be used without any further lubrication. 1. Do not use in environments where there is a danger of corrosion. 1.

VQ

Plug Lead Unit Manifold 2 08 01N VV3Q 1 Example Plug lead unit manifold with cable (3m) 1 set 4 sets 1 set Manifold base No. Valve No. (1st to 4th stations) Blank plate part No. (5th station) VV3Q12-05 VQ110-5L VVQ100-10A-2 Applicable Solenoid Valve (Plug lead style) VQ1l0l-lL VQ1l0l-lM VQ1l0l-lG 1 VQ100 Series Place in front of the part No. of solenoid valve which is to be mounted.

LX Series Compact Electric Actuators

1{11n]!

VEX-OMT0003

Please consult with SMC before applying paint to resinous parts, as this may have an adverse effect due to the solvent in the paint. 1/4 812 3/8 1520 1/2 2025 3/4 2830 1 3638 1 1/4 4042 1 1/2 4850 2 4850 3) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB

MU

, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

mlu

4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

mb1

, refer to page 6-17-1.)

70astamb1

, refer to page 6-17-1.)

With Factory Installed

Confirm the cover fits tight. ~ + ~~ IZ/ A Modular Type Regulator with Built-in Pressure Gauge Series AR200 1 250 1 300 1400 1 Specifications Model AR2001 I AR2501 I AR3001 I AR4001 1/4,3/8 1 1/4,3/8 I 1/4,3/8,1/2 Port size 1/8,1/4 -' Proof pressure 1.5MPa 115.3kgflcm21 Max. operating pressure 1.0MPa 1 10.2kgf/cm21 Set pressure range 0.05~0.85MPa 10.51 ~8.7kgf/cm2J Ambient and fluid temperature

Booster Regulator Series VBA1110 to 4200 1

Pressure gauge Lubrication Not required ITV Installation Horizontal AN200-02 AN400-04 AN300-03 AN300-03 AN400-04 Silencer Pressure adjustable mechanism Relieving type IC How to Order Pressure VBA Pressure increase ratio 2.0 MPa 1 Twice 4 times 0 1 VE Pressure setting Handle operated type 1 Port size VBA1110-02 VY1 Body size Port size Rc 1/4 Symbol 02 1/4 1 VBA1-02 G VBA 1 1 02 1 0 GN Series