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light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

How to Order Manifold Assembly (Example) Ordering example (VV3PA3-41) VPA344-1-B VPA344-1-A VP300-25-1A Stations D side U side VV3PA3-41-051-02 1 set (Type 41, 5-station manifold base part no.) VP300-25-1A 1 set (Blanking plate assembly part no.) VPA344-1-A 2 sets (N.C. type part no.) VPA344-1-B 2 sets (N.O. type part no.) 3 2 1 The asterisk denotes the symbol for assembly.

connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P=17.5 63.3 44.5 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Formula

B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL. A 6 Station 8 SOL.

VG How to Order Manifold Assembly (Example) VP D side U side 1 3 4 5 stations 2 VQ VQZ VQZ212-5M-C6 4 set VV3QZ22-05C VVQZ200-10A-2 VQZ212-5M-C6 1 set (C kit 5 stations manifold base) 1 set (Blank plate assembly) 4 sets (N.C. style) VZ VS Prefix "" mark to valves etc. to be assembled on the manifold.

How to Order Manifold VV5QC 1 1 08 C6 SDQ S kit B Note 1) Option Series Nil None All stations with back pressure check valve With DIN rail (rail length: standard) With DIN rail (rail length: special) 1 VQC1000 B D D Note 2) Manifold 1 Plug-in unit Note 3) Special wiring specifications (except for double wiring) With name plate External pilot Direct exhaust with built-in silencer Note 4) K

Dimensions PFM -C4/C6/C8/N7--X693 7 5 PFM -C4/C6/C8/N7--X694 7 5 10.2 10.2 1 43 A 43 1 IN OUT (34.2) 3 (34.2) 13 3 13 A 18 OUT 2 x 3.4 18 IN B B 48 20 48 20 2 x 3.4 One-touch fitting Applicable tube O.D.

www.stevenengineering.com I 1.84 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCA1 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S D U A L O P E R A T I O N D O U B L E R O D X C 1 0 O P T I O N XC10 N + NC A1 R A U T O S W I T C H C A P A B L E S T R O K E B M O U N T I N G C U S H I O N S B O T H E N D S N N O N E H H E A D E N D R R O D E N D B O R E S I Z E S T R

2.5 depth 6 2 x P Q PF2M711/721S-02(-L) 98 17 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N2(-L) 98 17 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-F2(-L) 106 21 2.8 depth 6.2 2.5 depth 5 PF2M7mW-m1/2(-L) A D 58 48 18 OUT1 OUT2 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 38.5 (30.9) 3 C 18 2 x 3.4 Width across flats B 2 x Port size Port size: 1, 2 OUT IN 68 [mm] 28 Model A C B D P PF2M705/710/725/750W -01(

Note) Note) For the special voltages, please consult with SMC. 4-14-33 Base Mounted 34 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 5 08 C6 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) External pilot specifications D DO R Note) Manifold Note) Order DIN rail separately.

How to Order Applicable Valves B C6 SQ 2 3 5 1 Y 1 Series SQ2000 C G B B A A A B A B A A D F E D Coil voltage Type of actuation A 1 2 Note 1) 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O. Dual 3 port valve N.C. + N.O.

(2) (b) (3) (c) 7 8 7MR Configurator (4) (d) (5) (e) 1 (6) (f) (7) (g) Enter (8) (9) (10) (11)(h) 7 9 7MR Configurator 7.6 PD12PD14 (1) 7 10 7MR Configurator (2) (a) DIDO a b d c (a) (b) (c) (d) 7 11 7MR Configurator (b) DIDO a b DIDO ON(a) ON (2)(c) (b) 7 12 7MR Configurator (c) ON DIDOON a b c d e ONONON ON(a) ON ON(b) ON ON(c) ONON ON(d) ON ON(e) 7

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Note 4) When specifying more than one option,indicate them alphabetically. 2.10-31 VQZ100/200/300 Base Mounted How to Order Manifold VQZ200/300 VV3QZ 2 5 08 C6 C D Series Option 2 3 VQZ200 VQZ300 None DIN rail mounting (DIN rail standard length) DIN rail mounting (Without DIN rail) External pilot specification D DO R Manifold type 5 Base mounted Kit Order DIN rail separately.

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

: AC, DC D A 1a 2 VA (AC), 2 W (DC) 100 V or less Applicable model A B C D Model AC20 AC25, AC30 AC40 AC40-06 AC50, AC55, AC60 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 11 76 66 28 13 86 72 30 12 V to 24 VAC, DC: 50 mA 48 VAC, DC: 40 mA 100 VAC, DC: 20 mA 15 95 77 36 Maximum operating current 17 99 79 44 22 92.5 68.5 53 Note) For detailed specifications on the IS1000 series,

Flat wi1h rib mm Model ;A ;B .c F:M5 x O .8 F:M6 x l F: }l 1 Y Model ;A ;B c F:M 6x l F :lJllxl251 F: ~ E Y D E . G .D. E G D E 0 D ..1 D Flat Flat wit. h rib ZPTIOg 10 ! 12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

(Note 3) 0 0. b JOG operation, positioning operation, programmed operation, DO forced output. (Note 1) # #. b (Note 3) Test operation mode Motor-less operation # #. d # #.

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.