Series H, DL, L, LL Self-align Fittings

3.5 52.7 10 14 10 1 4 1 8 LL04-02 LL06-01 53 47 14 10 54.9 51.9 54.7 54.8 1 4 3 8 1 8 6 LL06-02 LL06-03 LL08-01 44 66 63 14 17 12 16 9 55.9 57.9 52.9 21.8 56.8 58.5 57 12 10 14 1 4 3 8 1 4 8 LL08-02 LL08-03 LL10-02 68 77 89 16 19 14 17 14 23.3 56.9 58.9 58.9 59 60.7 62.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation. 10 LL10-03 LL10-04 LL12-02 98 117 121

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 121 Made to Order/TSUBAKI CABLEVEYOR Specification Series LJ1H10 Dimensions/LJ1H101 (X40) Scale: 25% Dimensions other than those shown in the drawing are the same as standard. 100 80 2-5H10 depth 6 4-M5 x 0.8 For work piece mounting 20 Mounting plate 4-9.5 4-5.2 (4-M5 x 0.8) 5.5 13 21 Work piece mounting dimensions 83 50 20 15.5 10 95 103 80 42 This drawing

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

each Metal stopper Reed switches (2 wire, 3 wire) Solid state switches (2 wire, 3 wire) 2 color indication solid state switches (2 wire, 3 wire) Auto switches +1 0 mm Stroke length tolerance Theoretical Output MXP16 (N) Operating pressure (MPa) Cylinder bore size (mm) 6 10 12 16 Piston area (mm) 0.2 6 16 23 40 0.5 14 40 57 101 0.7 20 55 79 141 0.4 11 32 45 80 0.3 8 24 34 60 0.6 17 47 68 121

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

4E)-Ms, B3r Stationsn ) 2 6 a 9 '10 ll 13 14 16 t8 19 20 L-l 1.47 (47.5)2.24 2.70 (58) (68.5)(79) (89.5)3.94 000) 4.35 (n0.5) 4.76 \121) 5.18 03I.5) 5.59 (142) 6.00 (152.5) 6.42 0631 6.A3 (173.5) 7 .24 (184) 7.66 (194.5) 4.07 (205) 4.48 (215.5) 8.90 \2?6) 9.31 (236.s) u 1.56 (39.5)1.97 (50) 2.38 (60.5)2.& (?

Mechanical Valves Series NVM, NVFM, NVZNI

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

Air Cylinder NCQ7 Series Compact Cylinder

0.594 0.590 0.594 0.590 1.220 0.590 0.594 0.590 0.594 1.090 0.594 25O (2%') 0.767 0.668 o.767 0.668 1.641 0.668 0.767 0.668 0.767 r.418 o.767 2.294 300 (3) o.762 0.7 62 0.735 0.735 0.762 0.735 0.762 1.485 0.7 62 2.361 400 (4') 0.879 0.930 0.879 0.930 1.749 0.930 0.879 0.930 0.879 1.680 0.879 2.556 (rbs) Weight Basic type (NCOTOO-OD) 056 0.066 o.o71o.o770.084 0.090 0.097 0.1010 . 1 0 8 o.121

Compact Cylinder Series NCQ8

OUT IN Theoretical Output Table Unit: lbs Bore size (in) Operating direction Operating pressure/PSI (MPa) 45 (0.3) 75 (0.5) 145 (1.0) 200 (1.4) IN 8.87 14.6 28.6 39.2 056 (9/16") OUT 11.1 18.2 35.7 48.9 IN 16.4 27.0 52.9 72.5 075 (3/4") OUT 19.9 32.7 64.1 87.8 IN 30.8 50.8 99.5 136 106 (1-1/16") OUT 39.7 65.3 128 175 IN 65.7 108 212 290 150 (1-1/2") OUT 79.5 131 256 351 IN 121 200 391 536

Electro-Pneumatic Valve NVEP/NVEF Series

otr (101) 0.83 (211 5.08 (129) 3.74 (9s) 2.56 (65) 2.01 (51) U v w x Y z AA BB cc DD EE FF GG HH JJ KK 1.38 (35) 2.52 (64) 0.35 (9) 1.42 (36) o-u6 (154.5| 4.7 4 020.s) 2.09 (53) 3.23 t82l 2.28 (58) 3.19 (81) o.47 (121 4.O2 (102) 1.97 (50) 4.35 (110.5) z.ud (s2) 2.60 (66) Millimele|s in psrentheses NVEF, NVEP PROPORTIONAL VALVE Valve Installation Wiring Procedure for DIN FILTRATION Cord Relainer

Series KG Stainless Steel One-touch Fittings

P. 125 P. 128 P. 129 121 Stainless Steel One-touch Fittings Series KG Model Different dia. union Y Plug-in reducer Tube cap P. 129 P. 130 Use to branch line in the same direction from female thread. KGU P. 129 KGR Use to change size of one-touch fittngs. KGC Use to plug up the useless tube connection. Plug-in Y KGU Use to branch tubing in the same direction from onetouch fittings.

Guide Cylinder Series MGG

(mm) Mounting Bore size 20-MGG Bearing type Stroke X Y Q Bore size (mm) Copper-free 39 86 (94) 25 32 Specifications 46 96 (105) 29 40 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 57 109 (121) 31 50 Double acting Action 56 112 (124) 34 63 Air 68 137 (151) 46 Fluid 80 Maximum operating pressure 1.0MPa 68 138 (152) 47 100 Minimum operating pressure 0.15MPa (horizontal with no load) Dimensions

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

To prevent this, install an air dryer, after cooler etc.. 3 Thread M3 0.78 (3 to 5) M5 13 to 17.3 (15 to 20) Rc(PT)1/8 61 to 78 (70 to 90) If excessive carbon powder is present in the line, install a mist separator on the upstream side of the valve. 4 Rc(PT)1/4 104 to 121 (120 to 140) Piping to product When installing piping to a product, refer to operation manual to avoid mistakes. 5 Refer

5 Port Solenoid Valve, Series VQ2000/Sub-plate Single Type

Sub-plate Nil Without sub-plate 02 With sub-plate (port size: 1/4) Sub-plate single type VQ2000 PW 02 Dimensions 4 2-4.5 mounting hole 89.4 Manual override Indicator light VQ210 --02 37 45 5 121 (DC) 130.1 (AC) 22.4 (86.3) (AC) 15.5 (77.1) (DC) Clamp screw M5 x 0.8 External pilot port 78.5 (AC) 72.6 (DC) 70.7 25 25 25 15.4 12 5 2.5 14.5 19.5 G 3/8 Electrical entry 43.8 39.1 53.6 IP65

High Vacuum Angle Valve, XL Series

48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

for filtration of compressed air requiring high cleanliness for coating lines, compressed air for clean rooms and compressed air for equipment necessary to avoid oils.Super mist separator, Modular connection is possible , Filter replacement time can be judged visually , Port size: 1/8, 1/4, 3/8, 1/2, 3/4, 1, 1 1/2, 2 , Threads: Rc, G, NPT, SUPER MIST SEPARATOR, SUPER MIST SEPARATOR, 121

OMU0023

78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121

IDX-OM-W029

(Ex.) 1. 2. 3. 4. 12-2 IDU22E/37E-23-V IDU55E/75E-23-V IDF-S0198 IDF-S0302 1.6MPa AC230V10% (50Hz) ON 0.5sec 2.0sec OFF 30 IDU Series 121 IDX-OM-W029 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 10 0.5 5 ON:SEC OFF:MIN 0.5 12-4 V 6-4 6-3 T 11-6 11-3 IDU Series 122 IDX-OM-W029 13 13 13-1 / IDU Series 13-1 13-1 B2022 9 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku

IDX-OM-W032

IDFA Series 12-1 121 IDX-OM-W032 12 V 12-2 Drain tube (O.D. 10m) (10) IDFA22E,37E,55E,75E-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30sec IDFA Series 12-2 122 IDX-OM-W032 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 0.5 0.5 5 ON:SEC OFF:MIN 12-4 R 6-4 6-3 T 11-6 11-3 IDFA Series 12-3 123 IDX-OM-W032 13 13 13-1 / IDFA Series 13-1 13-1 D:2021/11 4-14-1

IDX-OM-W038

(2) 17. 18. 19. 20. () IDH Series 22 2.2 IDX-OM-W038 2. 2.2.2 6.2 IDF-AB500 1 2 600mm 600mm 600mm 600mm 600mm 600mm 600mm 600mm 1 2 IDH Series 23 2.2 IDX-OM-W038 2. 2.2.3 4040 3 2 121 2.2.4 10mm ( IDH Series 24 2.2 IDX-OM-W038 2. 2.2.5 ,(6-1 ) 1 2 3(0.61Nm) 4 5 (17) (17) 3 7 6 5 1 2 4 PE M3 6.5mm (N.O) 2 1.25mm (N.C) IDH Series 25 2.2 IDX-OM-W038 2. 2.3