CG5-S (mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8
-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1
5H9 ( ) depth 5 +0.030 0 NN x M6 x 1 thread depth 12 A B 1 24 5.1 5.1 10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123
5 Port Solenoid Valve VQ4000/5000 Series Metal Seal Rubber Seal VQ4000 SV VFS3000 Installation volume 42% SYJ SZ Reduction VF VP4 123 96.5 Installation area 26% VQ 1/2 VQ 4/5 VQ 4/5 Reduction 201 VQC 1/2 163 240 VQC 4/5 185 Compact and large flow capacity VQZ SQ Possible to drive cylinders up to 160 VQ4000 VQ5000 VFS Possible to drive cylinders up to 180 When the average speed is 200 mm
P. 123 For Oil VXE Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 124, 125 VXP How to Order . P. 126 VXR For Heated water VXH Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 127, 128 How to Order .
suppressor 3-3-47 Series VZ3000 Type 43 Manifold: Side Ported VV5Z3-43Station 1-C4 Manual override (Non-locking) Grommet (G), (H) (PE port) (Pitch) (Mounting hole) (1(P), 3/5(R) port) 4-Rc 1/8 G: 300 mm H: 600 mm (Lead wire length) 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model: T0425 (Pitch) (mm) Stations 2 3 52 43 68 59 20 340 331 L1 L2 4 84 75 5 100 91 6 116 107 7 132 123
For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1
For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1
8 9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E F E E F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 50.5 49 113 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123
Speed 600 mm/s 2.5 2.7 3.2 3.6 4.1 REBH15 5.3 6.0 6.6 7.3 8.0 9.4 REBH25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 REBHT25 9.6 10.7 11.9 13.0 14.2 16.5 18.8 REBHT32 Theoretical Output Magnetic Holding Force (N) (N) High Precision Guide Type REBH Bore size (mm) Operating pressure (MPa) Piston area (mm) Bore size (mm) 15 25 32 0.3 70 0.2 0.4 88 0.5 105 0.6 123 0.7 176 Holding force 52 137 363 588
-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1
4.9 5.4 C J G5-S REAH25 5.3 6.0 6.6 7.3 8.0 9.4 REAHT25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 CV REAHT32 9.6 10.7 11.9 13.0 14.2 16.5 18.8 MVGQ Theoretical Output Magnetic Holding Force CC (N) RB Operating pressure (MPa) Piston area (mm2) Bore size (mm) 10 15 20 25 32 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 J 10 Holding force (N) 15 23 78 31 39 54 46 53.9 137 231 363 588 D35 52 15 176 70 88 123
(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260
MUB32 MUB40 MUB50 MUB63 Model MUB25 MUB32 MUB40 MUB50 MUB63 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 7-8-6 7 Plate Cylinder Double Acting, Single Rod Series MU Dimensions of Each Mounting Axial foot style (mm) ZZ 109 122 133 159 169 Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 thread depth 4.5 W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (Piping port) (Opposite side: Same) 66 103 46 40 10 (Z) (13) (13) 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50
to 400 st 50 st 32 40 50 63 97 102 140 17.5 55.5 127 12.5 42.5 20 97 102 140 11 49 127 6 36 20 106.5 118 161 21 64 131.5 9.5 34.5 25 106.5 118 161 16 59 131.5 4.5 29.5 25 MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 25 st 125 to 200 st 75 st 100 st 125 to 200 st 250 to 400 st 250 to 400 st 50 st 75 st 100 st 32 40 50 63 84.5 98 118 140 13.5 33.5 55.5 123
(mm) Rod end lock Head end lock O P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123
25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123
51 24 247 M6 x 1.0 64.5 9 41.5 16.5 39.5 27 M14 x 1.5 55 9 6 8 50 183 11 1/4 40 237 3.2 46 58 27 279 M8 x 1.25 77.5 10.5 20 47.5 47 31.5 70 M18 x 1.5 9 7 9 63 197 14 3/8 48 251 3.6 56 58 27 296 M8 x 1.25 93 12 23 55 55.5 31.5 M18 x 1.5 80 12 7 8.5 80 245 14 3/8 55 305 4.5 72 72 30 361 M10 x 1.5 106 14 33 61 61.5 38 100 M22 x 1.5 12 10 10.5 100 265 16 1/2 65 329 4.5 89 72 32 385 M10 x 1.5 123
subplate, 1/4 npt, VQZ2000 VALVE, SOL 4/5-PORT*** $8.84 + Add to Quote Add To Cart Add to Cart SMC VQZ2000-S-02T-Q subplate, 1/4 npt, VQZ2000 VALVE, SOL 4/5-PORT*** $10.45