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[N] Bore size [mm] 6 8 12 16 20 25 Piping port size M5 x 0.8 Fluid Air Action Double acting Operating pressure 0.15 to 0.7 MPa*1 (End lock: 0.35 to 0.7 MPa)*1 Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 6 3 OUT 57 11 17 23 29 34 40 IN 42 8 13 17 21 25 29 Proof pressure 1.05 MPa 8 4 OUT 101 20 30 40 51 61 71 Ambient and

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Bore e f 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 1 to 50 12.5 12.5 12.5 12.5 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 68 72 72 77 20 25 32 40 68 72 72 77 35 35 35

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing RQ printing RQ 8150SZ Printed in Japan. D-G

Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Nil Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part

B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101

B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101

25 32 40 M8 x 1.25 5 28 41 8 57.5 18 13 M20 x 1.5 13 26 5 8 15 24 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 15.5 M10 x 1.25 5.5 33.5 45 10 63.5 22 13 M26 x 1.5 17 32 6 8 15 30 19.5 M10 x 1.25 5.5 37.5 45 12 68 22 13 M26 x 1.5 17 32 6 8 15 34.5 19.5 M14 x 1.5 7 46.5 50 14 76 24 16 M32 x 2 22 41 8 10 21.5 42.5 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101

Vacuum port pressure range: 101 kPa to 0.6 MPa Pressurize only when releasing the vacuum. At that time, use it under the cylinder operating pressure. Rod piping Lighter weight than the cap piping. Can also be used for air blowing. Vacuum port pressure range: 101 kPa to 0.6 MPa 55 57 Free Mount Cylinder for Vacuum Series ZCUK How to Order Nil 2 pcs.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The VP series may be used as either a selector valve, or a divider valve.  It is available in a normally closed or a normally open style. The series is vacuum applicable up to –101.2kPa., VP valve manifold, 3 PORT SOLENOID VALVE, J31,

PSE3 Applicable pressure sensor For compound For vacuum For low pressure For positive For low differential Rated pressure range -100 to 100 kPa 0 to -101 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa 0 to 2 kPa Set pressure range 1 -101 to 101 kPa 10 to -101 kPa -10 to 100 kPa -0.1 to 1 MPa -50 to 500 kPa -0.2 to 2 kPa Set pressure resolution 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa

ZK2-OM01301 (5) Pressure Sensor/Pressure Switch for Vacuum Symbol Type Pressure range [kPa] Specifications P Pressure sensor Note 10) 0 to -101 Analog output 1 to 5V T -100 to 100 Analog output 1 to 5V A Unit selection function Note 12) NPN 2 outputs B SI unit only Note 13) 0 to -101 C PNP Unit selection function Note 12) 2 outputs D SI unit only Note 13) Pressure switch for vacuum E Unit

ZK2-OM00201 (5) Pressure Sensor/Pressure Switch for Vacuum Symbol Type Pressure range [kPa] Specifications P Pressure sensor Note 10) 0 to -101 Analog output 1 to 5V T -100 to 100 Analog output 1 to 5V A Unit selection function Note 12) NPN 2 outputs B SI unit only Note 13) 0 to -101 C PNP Unit selection function Note 12) 2 outputs D SI unit only Note 13) Pressure switch for vacuum E Unit

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

Model/Series SX7000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics (1) Port size Weight (g) (2) Valve model Type of actuation L plug connector M plug connector C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Grommet Single Double Closed center Exhaust center Pressure center 222 (100) 223 (101) 229 (107) 231 (109) 0.41 1.1 4.1 0.29 1.0 4.1 2 position 0.43 0.80 2.6 0.41 0.72 3.0 SX740--

Front matter 1 Model Selection Moment of Intertia 12, 16 20, 25 103 101 102 MK MK2T Allowable moment of intertia [kgm2] Allowable moment of intertia [kgm2] 104 MK2 103 MK 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 MK2T MK2T MK2 Allowable

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28 (38) 25 (35) 22 (27) 48 (58) 40 (50) 36 (41) 71 (101) 56 (86) 50 (75) 133 (170) 106 (143) 95 (128) 235 (294) 193 (252) 176 (230) 347 (425) 286 (364) 262 (335) For the mass of auto switch, refer to page 1263.

to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 134 CP96 Series Dimensions Basic: CP96S (D) B C (JJ) W Bore size Stroke With rod boot at both ends PL 2 x EE port PL Cushion valve Width across flats SW Width across