MG to 400 st 50 st 32 40 50 63 97 102 140 17.5 55.5 127 12.5 42.5 20 97 102 140 11 49 127 6 36 20 106.5 118 161 21 64 131.5 9.5 34.5 25 106.5 118 161 16 59 131.5 4.5 29.5 25 MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 25 st 125 to 200 st 75 st 100 st 125 to 200 st 250 to 400 st 250 to 400 st 50 st 75 st 100 st 32 40 50 63 84.5 98 118 140 13.5 33.5 55.5 123
25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123
51 24 247 M6 x 1.0 64.5 9 41.5 16.5 39.5 27 M14 x 1.5 55 9 6 8 50 183 11 1/4 40 237 3.2 46 58 27 279 M8 x 1.25 77.5 10.5 20 47.5 47 31.5 70 M18 x 1.5 9 7 9 63 197 14 3/8 48 251 3.6 56 58 27 296 M8 x 1.25 93 12 23 55 55.5 31.5 M18 x 1.5 80 12 7 8.5 80 245 14 3/8 55 305 4.5 72 72 30 361 M10 x 1.5 106 14 33 61 61.5 38 100 M22 x 1.5 12 10 10.5 100 265 16 1/2 65 329 4.5 89 72 32 385 M10 x 1.5 123
to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 69.6 78.6 76.2 173.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 101 to 500 178.5 160 LEC Y Size Stroke range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123
-D PF3W704/720/740() A AA B D F K L N P Q Q PF3W704S 104 50 63.6(Max.68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W720S 112 54 63.6(Max.68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W740S 142 71 75.25(Max.81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W704S 56.5 22 PF3W720S 60.5 22 PF3W740S 78 30 -84No.PF-OMM0004-D PF3W704/720/740(+) A AA D K S PF3W704S--T 115 50 81.2 69.5 67.5 PF3W720S--T 123
PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/521() A AA PF3W504--T 81 50 PF3W520--T 89 54 PF3W540--T 109 71 PF3W511--T 135 92 PF3W521--T 115 74 PF3W521-F12-T 119 76 PF3W521-F14-T 123
Setting 1 Language Disp Easy Item Speed SET MENU 123 - No.LEC-OM00101 2008 10 TB Ver. 1.** No.LEC-OM00102 2009 3 TB Ver. 1.** No.LEC-OM00103 2011 4 TB Ver. 1.**2.** TB Ver2.** No.LEC-OM00104 2012 4 UL No.LEC-OM00105 2012 12 TB Ver2.1 URL http//www.smcworld.com 2012 SMC Corporation All Rights Reserved 124 -
ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123
Therefore, it is important to secure as a danger zone a cylindrical area with the length of the clamp arm as its radius, and the stroke plus 20 mm as its height. 123 135 155 203 363 518 65 56 Head flange (including mounting bolt) 130 150 175 209 371 578 69 58 Calculation: (Example) MKG20-10RNZ Standard calculation: MKB20-10RZ Extra weight calculation: Head flange With arm ...222 g .130
51 24 247 M6 x 1.0 64.5 9 16.5 41.5 39.5 M14 x 1.5 27 55 9 6 8 50 183 11 1/4 40 237 3.2 46 58 27 279 M8 x 1.25 77.5 10.5 47.5 20 31.5 47 70 M18 x 1.5 9 7 9 63 197 14 3/8 48 251 3.6 56 58 27 296 M8 x 1.25 93 23 12 55 55.5 M18 x 1.5 31.5 80 12 7 8.5 80 245 14 3/8 55 305 4.5 72 72 30 361 M10 x 1.5 106 33 14 61 61.5 100 M22 x 1.5 38 12 10 10.5 100 265 16 1/2 65 329 4.5 89 72 32 385 M10 x 1.5 123
Position of piston across 4 flats of double rod is not same. 7-8-11 12 Series MUW Dimensions of Each Mounting Foot style LS + Stroke (mm) Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 79 90 96 116 123 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUWL25 MUWL32 MUWL40 MUWL50 MUWL63 Flange style (mm) FZ 24 28 32 39 50 FY 66 82
(Hexagon socket head cap screw) 8-M5 x 0.8 with depth 7.5 (Opposite side: Same) (30) (Z) 30 (mm) 19 11.5 Z ZZ SS S 10 Model CXSW32-10 CXSW32-20 CXSW32-30 CXSW32-40 CXSW32-50 CXSW32-75 CXSW32-100 CXSW32-125 CXSW32-150 CXSW32-175 CXSW32-200 143 213 83 9 20 153 233 93 20 Standard stroke 163 253 103 30 56 56 173 273 113 40 4-Rc 1/8 with depth 6.5 (Piping port) (Opposite side: Same) 183 293 123
X12 100/110VAC Tamagawa Seiki Co., Ltd. 111.5 80.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 123 91 X16 200VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 111.5 87.5 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 123 91.5 X22 200
IDU3D, 4D, IDF1D to 4D 25 Terminal board W: Water cooled condenser (IDF37C1 to 240D) Model IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D 74 Condenser type Shell & coil system B 247 298 123 123 173 197 A 24 20 47 55 37 45 Model IDU3D IDU4D IDF1D IDF2D IDF3D IDF4D Cooling water flow l/min Note1) 6 8 20 50 65 80 90 A 53 Cooling tower capacity RT Note 2) 2 2 3 5 7.5 7.5 7.5 B Water flow
33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70 7 M18 x 1.5 47.5 58 20 10.5 27 11 279 M8 x 1.25 63 55.5 31.5 3/8 197 8.5 12 48 251 3.6 56 93 80 7 M18 x 1.5 55 58 23 12 27 14 296 M8 x 1.25 80 61.5 38 3/8 245 10.5 12 55 305 4.5 72 106 100 10 M22 x 1.5 61 72 33 14 30 14 361 M10 x 1.5 100 69.5 38 1/2 265 10.5 14 65 329 4.5 89 123
D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Standard strokes (mm) Bore size (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 25 to 1000 50 to 1200 Note) Refer to the stroke selection Table in Technical Data 2, starting with page 123
MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF
1) 3.2 {&.s) 3.65 (92) 4.U {102.5) 4.45 (fi3) 4.86 (123.s) 5.2A (134) 5.69 (144.5) 6.'to (155) (166.5) 6.93 (176)7.34 t186.5) 7.76 097) 8.17 \207.5, (218) 9.OO {228.5) (D y r c l | $*Or> Symbol 4 Port (Mahitold only 5 Port dI/Nlh J!'
X12 100/110VAC Tamagawa Seiki Co., Ltd. 111.5 80.5 X13 200/220VAC MSD3A1P1E MSD3A1P1E MSD3A3P1E MSD3A3P1E MR-C10A1 MR-C10A1 MR-C10A MR-C10A SGDE-A3BP SGDE-A3BP SGDE-A3AP SGDE-A3AP X15 100/115VAC Matsushita Electric Industrial Co., Ltd. 123 91 X16 200VAC 30W X18 100/115VAC Mitsubishi Electric Corporation 111.5 87.5 X19 200/230VAC X21 100/115VAC Yaskawa Electric Corporation 123 91.5 X22 200
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD