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(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

www.stevenengineering.com I 6.16 VACUUM VACUUM PADS SERIES ZP ZP SERIES VACUUM PADS 288 Standard Options 12 Diameters 4 Types 6 Materials D I M E N S I O N S ZP VA C U U M PA D S D I M E N S I O N S ZP VA C U U M PA D S D I M E N S I O N S ZP VA C U U M PA D S F L AT T Y P E PA D Part No Type A C B D E F Y ZP02U U02 2 2.6 1.2 7 12 0.8 ZP04U U04 4 4.8 1.6 7 12 0.8 D E E P T Y P E PA D ZP06U

, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod 12 16 5, 10, 15, 20 25, 30 How to Order . 1 Construction . 9 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300

(V), D-A93 (V), D-A96 (V) Switch operation range Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300 A 52.5 31.5 27.5 27.5 27.5 27.5 B 79.5 100.5 125.5 150.5 175.5 200.5 B A MXW 8 6 W 32.5 11.5 7.5 7.5 7.5 7.5 V 99.5 120.5 145.5 170.5 195.5 220.5 A 51 31 31 31 31 B 104 124 149 174 199 MXW12 6 W 31 11 11 11 11 V 124 144 169 194 219 W V A 59.5 34.5 34.5 34.5 34.5 34.5 B

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.

Auto Switch Specifications Grommet PLC: Programmable Logic Controller D-M9E, D-M9EV (With indicator light) Auto switch model D-M9NE D-M9NEV D-M9PE D-M9PEV D-M9BE D-M9BEV Output signal turns on when no magnetic force is detected.

Auto Switch Proper Mounting Position (mm) (mm) Auto Switch Mounting Height D-M9 D-M9W D-M9 D-M9W D-A9 Auto switch model Auto switch model D-A9 B A B A Bore size Bore size 20 25 32 40 Hs 30.5 59.5 34 55.5 20 25 32 40 Note) The above values are a guide in the stroke end detection of the mounting positions of the auto switch.

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Series MHZ2 112210, 16, 20, 25 Air Gripper How to Order 11 Vacuum suction type Clean series 11 MHZ2 16 D M9N 22 MHZ2 16 D M9N Copper, fluorine and silicone-free + Low particle generation Bore size 10 16 10 mm 16 mm 22 Vacuum suction type 20 mm 20 25 mm 25 Action Number of auto switches Double acting D Nil 2 pcs. S 1 pc.

NXT02GIO (11+2Ot2.l 2-Floth Plug!3|E'NPt Fod n bo.tlon Etock rrdntlng &rrLc. DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MANIFOLD, VALVE, VV2Q* MANIFOLD VQ 2-PORT, 2J, VV2Q* NO SIZE RATING, 6.28317 lb

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Number of auto switches mounted Rod boot material Symbol Models 2 pcs. 1 pc. 70C00 Nylon tarpaulin J D-C7, C8 D-B5, B6 D-H7 D-G5, K5 110C Heat resistant tarpaulin K 15mm 10mm The maximum ambient temperature for the rod boot itself. 20mm 15mm D-B59W 20mm 10mm D-H7LF 3 Series CBG1 Rubber Bumper Type: CBG1BN With rear lock: CBG1BN Bore size Stroke H MM H GA GB Width across flats B1 2-Rc

/B64 D-B59W D-G5BAL D-G59F D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C Auto switch model D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NTL D-G5W D-K59W D-G5BAL D-G5 D-K59 D-G5NTL D-H7W D-H7BAL D-H7 D-H7C/H7NF D-C7/C80 D-C73C D-C80C D-C73C D-C80C D-B5/B64 D-G59F D-B59W Applicable bore (mm) Hs Hs Hs A A A A A B B B B B B 16 (24) A 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5)

, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8P D-F8N D-F8B Auto switch part no.

mm) Applicable bore size (mm) D C d D C Part No.