AS-FPQ/AS-FPG

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

Vacuum Unit Series ZK2

Vacuum Unit Series ZK2 RoHS How to Order Single Unit Vacuum Pump System 08 P K 5 A L ZK2 00 ZK2 08 A K 5 A L 12 Ejector System (with Valve) ZK2 08 A N 0 N N 12 Ejector System (without Valve) Remains blank when option is not selected. q e r t y u i w e Combination of Supply Valve and Release Valve Note 3) q System/Body Type Supply valve Release valve Supply valve Release valve System Body

Suction Filter with Case FH99 Series

FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186 126

With Factory Installed

Exampte)26NW o f "f able 'pllonaISpeci Ica rIons comb' matlon T Filter 1Regulator applicable model Optional specifications 2 6 8 C J N W Description Symbol Auto drain D D C 1 AW2001 AW3001 AW4001 I Differential pressure type auto drain D ActessOlY Float type auto drain(N.O.) 0 (Optioo) Float type auto drain(N.C.)

TM

(mm) Mounting screw L2 H2 D W1 H1 P L1 W2 W3 Model (Nominal x Length) 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 6 4 2.2 2.8 2.8 3.2 3.2 2 x 6 2.6 x 8 2.6 x 8 3 x 8 3 x 8 TM-04 TM-06 TM-08 TM-10 TM-12 7.5 9.5 91.5 5.5 77.5 6 7.5 77.5 6 15 9 93 12.5 6.5 4.5 16.3 8.8 14.3 7.5 12 12 10 8 9.8 How to Use 2.

The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity. The VQ20/30's long life, high speed coil (up to 20 million cycles at 100cps for pneumatic use) along with its all plastic construction, make it an excellent choice for those who want high performance at a lower cost.Manifold for VQ20/30 pilot operated valve

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Solid state switch Model D-F8 Series Variations Bore size (mm) Rod end configuration Stroke (mm) Clean room series 4 6 8 10 15 20 Action Series Auto switch Double acting Male thread Without thread Nil 4 Single acting (spring return) Double acting 6 Single acting (spring return) CUJ Solid state switch D-F8 D-F9 Female thread Double acting 8 Male thread Single acting (spring return) Double

Information

A L6 D L5 M L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Table of Contents

D-B5/B6 D-B59W D-G5BAL D-G59F Auto switch model D-G5 D-K59 D-G5W D-K59W D-G5NTL D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore (mm) A B B B B B B A A A A A Hs Hs Hs Hs 20 41.5 25.5 43.5 28.5 42 27 40 24 44.5 29.5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Auto switch model Bore size [mm] 32 40 50 63 80 100 125 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV D-A9m/A9mV C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 D-F5m/F5mW D-J59/J59W D-F5BAL D-F59F/F5NTL D-A5m/A6m D-A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-Y59m/Y69m D-Y7P

MB

(mm) Auto switch model Bore size 50 63 80 100 125 32 40 D-A3/A44 D-G39/K39 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BS1-125 BMB2-032 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BAL D-F5NTL BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-P5DWL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BAP2T-080 BMB4-032 BMB4-050 BMB4-050

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Auto switch model Bore size (mm) 32 125 40 50 63 80 100 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A3/A44 D-G39/K39 BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 BS1-125 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BA D-F5NT BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 Mounting example for D-A9(V), M9(V), M9W(V), M9A(V) D-P4DW

High Power Cylinder Series RHC

D-C73C, D-C80C Reed BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7A1, D-H7A2, D-H7B, D-H7C D-H7NW, D-H7PW, D-H7BW D-H7LF, D-H7NF, D-H7BAL Solid state D-B53, D-B54, D-B64, D-B59W Reed BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5NTL Solid state D-A33, D-A34, D-A4 Reed BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M D-G39, D-K39 Solid state 2 Series RHC Theoretical Output Table

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

JIS symbol Auto switch model D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 25 to 1000 25 to 1000 25 to 1300 25 to 1500

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

VZS

from D side as the 1st one.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Auto switch types D-A3, D-A44 D-G39, D-K39 D-A5, D-A6, D-A59W, D-F5, D-J5 D-F5W, D-J59W, D-F5NT, D-F5BA, D-F5F D-B5, D-B6 Bore size (mm) 40 50 63 80 100 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA-04 BA-05 BA-08 BA-10 BT-04 BT-06 BT-06 BT-08 BT-08 Standard Strokes Standard strokes (mm) Bore size (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 25 to 1000 50