EXxx-OMO0027

USINT 2 80x9:01 Channel 0 / User set lower limit value UINT 0 to 65535 80x9:02 Channel 1 / User set lower limit value 80xA:0 Slot x: Filter USINT 2 0=None 1=2 value average 2=4 value average 3=8 value average 80xA:01 Channel 0 / Analogue average filter Enum0803 80xA:02 Channel 1 / Analogue average filter 80xB:0 Slot x: Range USINT 2 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3=010 V 4=05 V 5=15 V 6

ZP

A6) M3 x 0.5 v (uConnection thread: A5/A6) Female thread Nil v (uConnection thread: A8) B5 M5 x 0.8 v v B6 M6 x 1 v v v B8 M8 x 1.25 v v B01 Rc1/8 v v v N01 NPT1/8 v v v T01 NPTF1/8 v v v M5 x 0.8 v (uConnection thread: A8) 04 4 vV vV 06 6 vV vV vV 08 8 V vV Female thread One-touch fitting N4 For 4 nylon tubing1 N6 For 6 nylon tubing1 v v v U4 For 4 soft tubing2 U6 For 6 soft tubing2

Modular/F.R.L. Units Series AC

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30

reduces flow setting time

1/4 V V V V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS-FP AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS-T AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

Modular F.R.L. Units

Outlet pressure MPa Existing model New Conditions AR20-02-A AR20-02-A AR20-02 New New 0.3 Inlet pressure: 0.5 MPa Outlet pressure: 0.3 MPa Flow rate: 500 L/min (ANR) New New AR20-02-A AR20-02 500 Flow rate L/min (ANR) Replacement in hand!

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS3ll1FSGl-l02 1/4 V V V V V V V AS3ll1FSGl-l03 3/8 V V V V V V V AS-FP AS4ll1FSGl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSGl-G01 1/8 V V V V VNote 4) AS-FM AS2ll1FSGl-G02 1/4 VNote 4) V V V V AS-D AS3ll1FSGl-G02 1/4 V V V V G Face seal AS3ll1FSGl-G03 3/8 V V V V AS-T AS4ll1FSGl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

JXCx-OMT0061CN

] . 66 15.2 [820m] . 66 15.3 [5m ] . 67 15.4 [820m] . 67 15.5 . 68 15.6 . 69 15.7 . 70 16. . 71 16.1 . 71 16.2 . 72 17.

JXCx-OMX0009

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield (3) Cable color Terminal No.

SYJ300/500/700

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

Fieldbus system EtherCAT compatible SI Unit

Analogue input unit (EX600-AX#) (continued) Index Name (Meaning) Type Value 40xA:0 Range UNSIGNED8 Number of Channels 0=-10+10 V 1=-5+5 V 2=-20+20 mA 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080D (AXA) 40xA:01 40xA:02 Channel 0 Channel 1 (Analogue range) 3= 010 V 4= 05 V 5= 15 V 6= 020 mA 7= 420 mA Enum080E (AXB) 1: x = Unit No.

Modular Design with Uniform Body Style

Example) AW30K-03BE-2N-D-X406 0.4 MPa Setting Long Bowl Symbol Description V q V q Body size Body size 20 30 40 60 20 30 40 60 V w With backflow function Nil Without backflow function V V V V V V V V K1 With backflow function V V V V V V V V + V e Pipe thread type Nil Rc V V V V V V V V N NPT V V V V V V V V F G V V V V V V V V + 01 1/8 V V 02 1/4 V V V V V V 03 3/8 V V V V 04 1/2

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

/

(mm) Model Flow characteristics NBR, FKM 1 cm3/min or less Port size Weight (g) External Leakage C[dm3/(sbar)] b Cv Seal material Leakage 2 3 4.5 2 0.59 1.2 2.3 0.59 1.2 0.48 0.45 0.46 0.48 0.18 0.33 0.61 0.18 VXE2110-01 VXE2120-01 VXE2130-01 VXE2110-02 VXE2120-02 VXE2220-02 VXE2320-02 VXE2130-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220

0.55

Output circuit Surge voltage 24 V 0 V Polarity protection diode Diode sol.1: Energized 60 V R Internal circuit Internal circuit Surge voltage Red (+) Coil 0 V PWM circuit sol.2: Deenergized 60 V R Surge voltage 24 V 0 V LED Large capacity load: Energized Black () 60 V R Relay There is no S option, since a rectifier prevents surge voltage generation.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors +24 V +24 V Power supply for output Power supply for output 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V 4. Do not install a unit in a place where it can be used as a foothold.