ZL3-OM00601

6 600L/min(ANR) P Port exhaust *2 *2: Port thread type is the same as the thread type selected for 3). 3) Supply (P), vacuum (V) port / one-touch fitting port size Vacuum (V) port Supply (P) port 5) Combination of the supply valve and the release valve 06 Rc3/4 K1 Supply valve (N.C.) + Release valve (N.C.) 04 2xRc1/2 K2 Supply valve (N.C.) 8() F06 G3/4*1 B1 Supply valve (N.O.) + Release

OMS0020

: "01""FF" "EE" "OK" LRC CR, LF (b) Irregular response Code ID Command Result Error details Check Start Sum End Code : "01""FF" "EE" "NG" Refer to "5.5 Error Code" LRC CR, LF 15 DATA (Saved Data) Data will be sent as a value to 5 decimal points.

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Normally open) 2 01 Body ported Rc 1/8 Without sub-plate Rc 1/8 Base mounted 01 Nil Light/Surge voltage suppressor V100 Body type Nil None Rc 1/4 02 SY Z With light/surge voltage suppressor (Indicator light is not available for grommet type.)

VZ5000

-D-01 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-57 Series VZ5000 2 Position Double VZ5220 Grommet (G), (H) VZ5220-01 G H Manual override (Non-locking) (Mounting hole for manifold) (Lead wire length) G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ5220-L-01

Multi-channel Digital Sensor Monitor ( compatible)

V, 80 mA Residual voltage 1.5 V or less When used as a switch output device Max. 80 mA Residual voltage 1.5 V or less -19No.PS-OMW0012-C Pressure Setting Default settings When the pressure exceeds the set value, the switch will be turned on.

0.4

C8 N7 N9 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 1/4" One-touch fitting for 5/16" Option Wiring Stations Note) Note) S D Single wiring Double wiring 01 For 1 station P PL26: 01 to 24 (P kit, 26P) PL20: 01 to 18 (P kit, 20P) JL20: 01 to 16 (J kit, 20P) kit 24 For 24 stations Nil R S Common exhaust type External pilot Built-in silencer

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

Regulator

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0.020.2MPa 0 0 0 0 Set pressure range 1 1 1 1 0.020.4MPa 2 2 2 2 0.020.8MPa + 1 Exhaust direction 0 0 0 0 Bottom exhaust + 2 Nil Nil Nil Nil Rc Pipe thread type NPT N N N N F F F F G + 3 Port size 01 01 01 01 1/8 + 4 Nil Nil Nil Nil Without pressure gauge

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

ZSE40/ISE40

Time Repeatability 0.2% F .S. 1 digit or less IP65 compatible Dusttight/Splash proof type 16-2-16 3 Series ZSE40/ISE40 High Precision, Digital Pressure Switch How to Order 0.100 to 1.000 MPa For positive pressure Set pressure range Nil ISE40 01 22 For positive pressure ZSE ISE ZSE40 01 22 For vacuum/compound pressure PSE Z I SE3 PS Option Set pressure range Nil F Nil For vacuum pressure

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

VX31/32/33

5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (2) Solenoid Valve Option AC Note) Note) Seal material Body material/ Shading coil material Note Note) Guide pin material Main valve poppet Coil insulation type Option symbol Fixed sealant Nil C37 Stainless steel Stainless steel DC NBR NBR G Note 1) Option S, Z are not available as surge

IDX-OM-W023

CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2 TB C12 ILS MC GFCI OLR TDR MOV EDV IDU Series 13

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.