SFOD-OMT0005CN

2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33 (3) . 37 (4) . 37 10 . 41 10.1 . 41 10.2 . 44 10.3 . 46 11 . 47 11.1 . 47 11.2 . 47 11.3 . 48 (1) . 48 (2) () . 48 (3) . 48 11.4 . 49 11.5 . 49 12() . 50 12.1 . 50 12.2 . 51

SFOD-OMT0009CN

I/O . 36 6.1 . 36 6.2 (NPNPNP ) . 36 (1) I/O . 36 (2) I/O . 37 6.3 . 38 (1) I/O1 . 39 (2) I/O2 . 42 6.4 I/O . 44 (1) NPN . 44 (2) PNP . 46 7. . 48 7.1 . 48 7.2 . 49 7.3 . 51 7.4 . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8. . 56 8.1 . 56 8.2 . 57 8.3 . 60 8.4 . 64 8.5 . 67 8.6 . 71 2 No.SFOD-OMT0009CN-B 8.7 . 73 8.8 . 73

JXCx-OMU0004

400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100 600 5 150 700 200 700 200 700 6 200 800 300 800 300 800 7 300 900 400 900 400 900 8 400 1000 500 1000 500 1000 9 500 1200 600 1200 600 1200 10 600 1400 700 1400 700 1400 11 700 1600 800 1600 800 1600 12 800 1800 900 1800 900 1800 13 900 2000 1000 2000 1000 2000 14 1000 2500 1200 2500 1200 2500 15 1100 3000 1400 3000 1500 3000 51

LEC-OM038xx

Wiring of cables/Common precautions.51 15. Electric actuators/Common precautions .52 15.1 Design and selection .52 15.2 Mounting.53 15.3 Handling.54 15.4 Operating environment .55 2 - 15.5 Maintenance .56 15.6 Precautions for actuator with lock.56 16.

JXCx-OMT0034CN

./ . 48 15.1 . 48 15.2 . 49 15.3 . 50 15.4 . 51 15.5 . 52 2 - 15.6 . 52 16. . 53 16.1 / . 53 16.2 . 53 16.3 . 55 16.4 . 55 16.5 . 56 16.6 . 56 16.7 . 56 3 - LEC-G Series/ 1. *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical

LEC-OM036xx

Electric actuators/Common precautions .49 15.1 Design and selection .49 15.2 Mounting.50 15.3 Handling.51 15.4 Operating environment .52 15.5 Maintenance .53 2 - 15.6 Precautions for actuator with lock.53 16.

LEC-OM034xx

Electric actuators/Common precautions .49 15.1 Design and selection .49 15.2 Mounting.50 15.3 Handling.51 15.4 Operating environment .52 2 - 15.5 Maintenance .53 15.6 Precautions for actuator with lock.53 16.

JXCx-OMT0028CN

./ . 51 14./ . 52 14.1 . 52 14.2 . 53 14.3 . 54 14.4 . 55 14.5 . 56 14.6 . 56 2 - 15. . 57 15.1 / . 57 15.2 . 57 15.3 . 59 15.4 . 59 15.5 . 60 15.6 . 60 15.7 . 60 15.8LEC . 61 3 - LEC-G Series/ *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of

SFOD-OMT0010

Setting Data Entry . 48 7.1 Profile parameter . 48 7.2 Basic parameter . 49 7.3 Return to origin parameter . 51 7.4 Step data . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I. 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8.

Filter Regulator

pressure Square embedded ty pe switch pressure gauge P1 A B C D E F G K J J AW20-D 1/8, 1/4 40 87.6 71.8 26 M281 40 5 28 27 27.8 37.5 AW30-D 1/4, 3/8 53 115.3 86.5 31.5 30 M381.5 55 3.5 28 32.5 27.8 43 AW40-D 1/4, 3/8, 1/2 70 147.1 91.5 40.5 38.4 M421.5 80 0 28 41.5 27.8 52 AW40-06-D 3/4 75 149.1 93 40.5 38.4 M421.5 80 0 28 41.5 27.8 52 AW60-D 3/4, 1 95 234.1 155 50 38.4 M621.5 30 0 28 51

EXxx-OMU0020EN

Accessories 51 10.1. Markers 51 10.2. Y Connector 52 10.3. Seal cap 54 10.4. Joint pack 56 11. Dimensions 57 11.1. The Input/Output Modules Manifold 57 12. Troubleshooting 58 12.1. EX245-SPN1/SPN2 58 12.2. EX245-DX1 60 12.3. EX245-DY1 60 -3No.EX##-OMU0020-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Digital Flow Switch

[3 step setting mode] 23 Default settings 23 Function Setting [Function selection mode] 25 Default settings 26 F0 Reference condition/Unit selection function 27 F1 Setting of OUT1 29 F2 Setting of OUT2 37 F3 Response time 42 F10 Sub display 43 F20 External input 47 F22 Setting of analogue output 48 F30 Accumulated value hold 49 F31 Orientation correction function 50 F80 Display OFF mode 51

Digital Pressure Switch

For details of each setting, refer to page 23 to 51 of this manual. Do not touch the LCD during operation. The display can vary due to static electricity. -7No.PS-OMM0007-I Maintenance Turn off the power supply, stop the supplied air, exhaust the residual pressure and verify the release of air before performing maintenance. There is a risk of unexpected malfunction.

ML1C

101 99.5 64 92 118 120 53.5 28 40 242 36.5 30 6.8 6.6 M6 x 1 12 16 116.5 M8 x 1.25 14 M10 x 1.5 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 AA BB CC DD EE FF GG II JJ KK LL MM NN WW XX ZZ Model ML1C25 ML1C32 ML1C40 1/ 8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 8 D1/ 8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 8 1/ 4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51

ML2B

59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51

0.01

Description Note Material Element set 1 SFD-EL200 With 3 O-rings 323 SFD Series Dimensions SFD100-C SFD100-C Dimensions Model A 81 B SFD100C04 C06 C08 4 23 6 81 8 82 26.2 SMC 23 14.7 51 17 Bracket mounting dimensions Applicable tubing O.D.

CLQ

M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (manual unlocking unit) M5 x 0.8 unlocking port (unlocks when pressurized) Rod end male threads H1 Rod end nut H2 X C1 L1 (mm) Stroke range Without auto switch With auto switch Bore size (mm) A G E H I K L M Q S U VH VV W D C A B B 61 68.5 19.5 22.5 51

LJ1H

load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer L2 (mm) L3 (mm) m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 50 51

Electric Actuator with Integrated Guide

Refer to page 66 for part numbers. 47 51 Non-standard Motor Series LTF8 Motor Output Rolled Ball Screw 200W 15mm/20mm lead Horizontal Mount How to Order Motor/switch entry direction Stroke F LTF8 NL 1 G X10 Left entry Power supply voltage Motor specification Switch specifications Right entry Matsushita Electric Industrial Co., Ltd.

ASR

,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114 18.5 35.9 58.7 18.5 8 45.6 50.6 45.6 23 44.6 39.6 16.8 82 105 21 31 53.8 10 127 150 17 36.5 62.9 6 130 153 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R1/4 49.2 55.8 50.8 25.9 49.8 44.8 18.8 120 143 21 32.6 59 10 122 146 22 34.4 60.8 20.9 12 137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51